Rated Pressure Range: -0.1 to 1 MPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate
Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: w/o Operation Manual, w/o Calibration Certificate
Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel
Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel
Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.
Mounting, Operation P.10 1) Operating air P.10 2) Precaution on design P.11 3) Mounting P.13 4) Operating environment P.13 5) Piping P.14 6) Cushion P.15 7) Speed control P.16 8) Direction control P.16 4. Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5.
Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM
Model: 42 (Dual AC), Bar Length: 28 (280mm), Emmiter Cartridge, Material: V (Energy Saving High-efficiency Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 7L (ø1/4" Elbow), Plug Position: w/o Plug, Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage Power Supply
Model: 42 (Dual AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: V (Energy Saving High-efficiency Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 7L (ø1/4" Elbow), Plug Position: w/o Plug, Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage Power Supply
Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: V (Energy Saving High-efficiency Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 7L (ø1/4" Elbow), Plug Position: w/o Plug, Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2)
Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: V (Energy Saving High-efficiency Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 7L (ø1/4" Elbow), Plug Position: w/o Plug, Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage Power Supply: U
15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)
15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)
Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 6 (12VDC), Electrical Entry: G (Grommet w/0.3m Lead Wire), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port: 2 (ø4, Straight), Vacuum, V Port: 2
Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B2 [Supply Valve (N.O.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage
Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage
Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector),
Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector
Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage
A,B Port Thread Type: Rc (or None), Mounting Option: Mounting Screw, Round Head Combination Screw, Wiring Specification: W3 (w/M12 Connector Cable, 1000mm), Port Location: V (Top Ported [1 (P), 5 (EA), 3 (EB) Port: Side Ported]), Sub-plate Thread: N (NPT)