KR

(mm) Connection thread R Model A M Weight (g) Note) D2 L1 L2 10 D1 KRL06-02S KRL06-01S 1 8 12 22 33 13 21 35 25 26 36 25.5 23 27 29 24.5 28.5 30.5 27 30 32 36 31 33 37 10 20 29 27.5 1 4 19 4.2 14 17 12 14 17 12.8 6 Applicable tubing 9.0 3 8 1 8 KRL06-03S 28 14.9 KRL08-01S KRL08-02S KRL08-03S KRL10-01S KRL10-02S KRL10-03S 1 4 3 8 1 8 1 4 3 8 30 31.5 32 33 34.5 15.2 12 23 8 20.5 21.6 14.9 21.6

SQ1000/2000

CAT.ES11-79 A 5 Port Solenoid Valve Series SQ1000/2000 SQ2000 Plug lead SQ2000 Plug-in SQ1000 Plug-in SQ1000 Plug lead Low profile compact manifold Compact with high capacity Pressure: 0.5MPa/Load factor: 50% Cylinder bore size (mm) Cv factor Series CJ2 Base mounted (with sub-plate) Cylinder speed (mm/s) Series CM2 Series MB/CA1 Rubber seal Metal seal 40 32 40 50 63 80 100 20 25 32 16 6 10

MVGQ

MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions Symbol Symbol A E A E Over 50 st DB DB Stroke Stroke Bore size (mm) Bore size (mm) 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st Up to 50 st 25 25 47.5 16 16 32 0 13 63.5 79.5 62 14.5 Over 50 st Up to 50 st Up to 50 st Over 50 st 71.5 24 32 32 20 16 90 5.5 42.5 53 10-16-12

HRX-OM-X084

Facility water temp. 25 1500 Cooling capacity[W] 1500 25 Cooling capacity[W] 32 32 35 35 1000 1000 500 500 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T1 is selected.

ML2B

Bore size 25 mm 32 mm 40 mm 25 32 40 Auto switch Nil Without auto switch For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

CQS

Rear flange Long stroke Standard stroke (mm) Without auto switch With auto switch Without/with auto switch Long stroke (mm) Bore (mm) Standard stroke (mm) B L L1 A B L L1 A B L L1 17 17 19.5 22.5 A 12 16 20 25 24 25.5 28.5 32.5 13.5 13.5 14.5 15 32 32 41 44 51 51 63.5 67 14 15.5 18.5 22.5 3.5 3.5 4.5 5 22 22 29.5 32.5 31 31 42 45.5 14 15.5 18.5 22.5 3.5 3.5 4.5 5 26 26 32 35.5 35 to 100 35

Compact End Lock Cylinder Series CBQ2

force (Max.) 550 860 1340 2140 Series Variations Bore size (mm) Cushion Standard stroke (mm) Lock direction Manual release Model 10 15 20 25 50 75 100 Non-locking type Front lock CBQ2 Rubber bumper 32, 40, 50, 63 Rear lock Locking type Series CBQ2 How to Order B 50 D C 32 H L CBQ2 Standard A93 S B 50 D C CDBQ2 With Auto Switch 32 H L Number of auto switches With auto switch (built-in magnet

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

l H R port lpE port M:Common exhaust for main and pilot valve M5:10-32 with Nom.

Mechanical Valves Series NVM, NVFM, NVZNI

(NOM.M5) 1/c'.PE10-32(NOM.

High Vacuum Angle Valve, XL Series

XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

XL

XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

o

l H R port lpE port M:Common exhaust for main and pilot valve M5:10-32 with Nom.

IIIIIII

(NOM.M5) 1/c'.PE10-32(NOM.

o

l H R port lpE port M:Common exhaust for main and pilot valve M5:10-32 with Nom.

CLA

MM I Bore 81ze (mm) 40 BQ DC eO eE F GA GB GC GO GL GR J K LV -500 20 500 27 30 70 60 96 Yo %, 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 76.5 ' 50 63 , 80 , 100 M14X1.5 M1 8 Xl .5 M18X 1.5 M22 X l.5 M26Xl .5 -'00 20-600 32 35 81 70 108 y.

reduces flow setting time

/23 AS131FS1-M5E-04 4 8.2 11.5 19.8 AS131FS1-U10/32-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 ASN M5 x 0.8 10/32UNF 8 9.6 9.4 AQ ASV Inch Size [mm] AK Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-01 1/8 VCHC 7.2 9.4 9 17.2 19.8 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10/32-01 AS131FS1-M5E-03 5/32 8.2

Possible to transfer a workpiece at low-speed.

Applicable shaft types: J, K, T Long shaft side X = X = X = Long shaft side Long shaft side Long shaft side Short shaft side Y = Short shaft side Size 20, 30, 40 Size 10, 15 Short shaft side Short shaft side Y = Size 20, 30, 40 Size 20, 30, 40 (mm) X 3 to 18 3 to 20 3.5 to 30 4 to 32 4 to 36 Size 10 15 20 30 40 (mm) Y 17 to 30 18 to 32 18.5 to 36 (mm) Y 17 to 30 18 to 32 18.5 to 36 X 17 to

ML2B

D25 32 40 0.015 0.015 0.040 2.89 4.75 6.87 0.10 0.21 0.32 25 32 40 0.016 0.016 0.041 ML2B MY-A40L Type MY-A25L MY-A32L -X Side Support Part No. As for 3 point preset counter and multi counter, it will be common to CEP1 and CE1 series. For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

port M3 port M5 port U10/32 port Meter-in type Meter-in type M3 port M5 port U10/32 port M3 port M5 port U10/32 port 15-9-4

I/O Configurator (NFC version)

Values for parameter setting Setting items: Set value Hold/Clear (unit) CLEAR Input size (Occupied points for the module input) 32 point/4 byte Output size (Occupied points for the module output) 32 point/4 byte Valve density of...