Precision Clean Regulator

80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure

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Hz 50/60 Hz 50/60 Hz Maximum micro power cut 10ms 10ms 5ms 10ms 5ms Maximum inrush current 0.7A 1.5A 0.7A 1.5A 7A 0.7A 1.5A 7A Maximum power 3W 4W 3W 8W 6W consumption ANALOGUE INPUT CHARACTERISTICS AC INPUT CHARACTERISTICS 10 6 inputs from I01 to I06 Input voltage 100-240 VAC + 10% 15%, 20 8 inputs from I01 to I08 50-60 Hz Measurement range 0-255 Input impedance >or = 800 kOhms Resolution

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.

VCA

All types are equipped with surge voltage suppressor. 17-2-10 5 Series VCA Direct Operated 2 Port Solenoid Valve For Air Standard Specifications Valve construction Direct operated poppet Fluid Air, Inert gas, Low vacuum (133 Paabs) Withstand pressure (MPa) 2.0 Body material Al Seal material HNBR Valve specifications Ambient temperature (C) 20 to 60 Fluid temperature (C) 10 to 60 (No freezing

VCS

power (VA) 50/60 Hz VXA Holding VCS2: 10/8, VCS3: 15/13, VCS4: 19/16 Note 1) For low pressure steam at a temperature of 120C or less, use FKM for the seal material.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Foot bracket VZS 5 1 3 VFS 22.2 Die cast hole For manifold gasket positioning PE port VS VS7 L plug connector (L): VQZ112 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ112 wMwC3, C4, C6, M5 0 1 Cover diameter 1.5 Cross section 0.23mm2 34 <39> 300 (Lead wire length) 76 (Metal seal) <77> 73.5 (Rubber seal) <74.5> 300 82 (Metal seal) <83> 54 <55> (Lead wire length) 80 (Rubber seal) <81> 60

Flow Rate: 7 CFM / 12 m3/hr / 198 LPM , 7 CFM / 12 m3/hr / 198 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .6, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 22.7 lbs. / 10.3 Kg Series Configured Datasheet.

Thomas Oil-less Articulating Piston Compressor Flow Rate: 5.4 CFM / 153 LPM , 5.4 CFM / 153 LPM, Max Pressure: 100 PSIG / 6.9 bar , 100 PSIG / 6.9 bar, Horsepower (60 Hz): 1, Kilowatts (60 Hz): .75, Voltage (60 Hz): 115 / 230, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 16.11 in / 409 mm Width: 11.77 in / 299 mm Height: 7.44 in / 189 mm

Thomas Oil-less Articulating Piston Compressor Flow Rate: 4.3 CFM / 122 LPM , 4.3 CFM / 122 LPM, Max Pressure: 100 PSIG / 6.9 bar , 100 PSIG / 6.9 bar, Horsepower (60 Hz): .75, Kilowatts (60 Hz): .56, Voltage (60 Hz): 208 - 230 / 460, Voltage (50 Hz): 190 / 380, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 15.3 in / 389 mm Width: 10.2 in

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .2, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 8.07 in / 205 mm Width: 5.98 in / 152

Thomas Oil-less Articulating Piston Compressor Flow Rate: 1.4 CFM / 40 LPM , 1.4 CFM / 40 LPM, Max Pressure: 175 PSIG / 12.1 bar , 175 PSIG / 12.1 bar, Horsepower (60 Hz): .33, Kilowatts (60 Hz): .25, Voltage (60 Hz): 115 / 230, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 14.3 in / 363 mm Width: 11.2 in / 284 mm Height: 6.95 in / 177 mm

Thomas Oil-less Articulating Piston Compressor Flow Rate: 1.4 CFM / 40 LPM , 1.4 CFM / 40 LPM, Max Pressure: 175 PSIG / 12.1 bar , 175 PSIG / 12.1 bar, Horsepower (60 Hz): .33, Kilowatts (60 Hz): .25, Voltage (60 Hz): 115 / 230, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 14.3 in / 363 mm Width: 11.2 in / 284 mm Height: 6.95 in / 177 mm

Thomas Oil-less Articulating Piston Compressor Flow Rate: 1.92 CFM / 54 LPM , 1.92 CFM / 54 LPM, Max Pressure: 175 PSIG / 12.1 bar , 175 PSIG / 12.1 bar, Horsepower (60 Hz): .75, Kilowatts (60 Hz): .56, Voltage (60 Hz): 208 - 230 / 460, Voltage (50 Hz): 190 / 380, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 14.3 in / 363 mm Width: 11.2 in

Thomas Oil-less Articulating Piston Compressor Flow Rate: 2.4 CFM / 68 LPM , 2.4 CFM / 68 LPM, Max Pressure: 175 PSIG / 12.1 bar , 175 PSIG / 12.1 bar, Horsepower (60 Hz): .75, Kilowatts (60 Hz): .56, Voltage (60 Hz): 115 / 230, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 14.3 in / 363 mm Width: 11.2 in / 284 mm Height: 6.95 in / 177 mm

Flow Rate: 4.2 CFM / 7.2 m3/hr / 119 LPM , 4.2 CFM / 7.2 m3/hr / 119 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .4, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 8.66 in / 220 mm Width: 5.98 in /

Flow Rate: 7 CFM / 12 m3/hr / 198 LPM , 7 CFM / 12 m3/hr / 198 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .6, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Net Weight: 22.7 lbs. / 10.3 Kg Series Configured Datasheet.

Flow Rate: 4.2 CFM / 7.2 m3/hr / 119 LPM , 4.2 CFM / 7.2 m3/hr / 119 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .4, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.66 in / 220 mm Width: 5.98 in / 152 mm Height: 6.14 in / 156 mm

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .2, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 14.33 lbs. / 6.5 Kg Series Configured Datasheet.

Thomas Oil-less Articulating Piston Compressor Flow Rate: 3.2 CFM / 91 LPM , 3.2 CFM / 91 LPM, Max Pressure: 100 PSIG / 6.9 bar , 100 PSIG / 6.9 bar, Horsepower (60 Hz): .5, Kilowatts (60 Hz): .38, Voltage (60 Hz): 115 / 230, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 14.3 in / 363 mm Width: 10.59 in / 269 mm Height: 6.91 in / 176 mm

Thomas Oil-less Articulating Piston Compressor Flow Rate: 2.2 CFM / 62 LPM , 2.2 CFM / 62 LPM, Max Pressure: 100 PSIG / 6.9 bar , 100 PSIG / 6.9 bar, Horsepower (60 Hz): .33, Kilowatts (60 Hz): .25, Voltage (60 Hz): 115 / 230, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 12.05 in / 306 mm Width: 5.75 in / 146 mm Height: 8.1 in / 206 mm