The ITV series is IP65 equivalent.Controls air pressure in proportion to an electric signal., Available in MPa, kgf/cm , bar, PSI, and kPa units., Pressure range of 0.005 to 0.9MPa., Available port sizes 1/4 and 3/8., Mounting bracket option., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, FB, IT4000 1/2 INCNPT VERSION, 2.42508 lb

, bar, PSI, and kPa units., Pressure range of 0.005 to 0.9MPa., Available port sizes 1/4 and 3/8., Mounting bracket option., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, FB, IT4000 1/2 INCNPT VERSION, 1.42198 lb

The ITV series is IP65 equivalent.Controls air pressure in proportion to an electric signal., Available in MPa, kgf/cm , bar, PSI, and kPa units., Pressure range of 0.005 to 0.9MPa., Available port sizes 1/4 and 3/8., Mounting bracket option., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, FB, IT4000 1/2 INCNPT VERSION, 1.47737 lb

The ITV series is IP65 equivalent.Controls air pressure in proportion to an electric signal., Available in MPa, kgf/cm , bar, PSI, and kPa units., Pressure range of 0.005 to 0.9MPa., Available port sizes 1/4 and 3/8., Mounting bracket option., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, FB, IT4000 1/2 INCNPT VERSION, 1.42198 lb

EXxx-OMV0018_ENG

Element Description Safety Instructions S/E ST L/A1 PWR(V) L/A2 Fieldbus interface connector (BUS OUT/Port2) 1 POWERLINK connection PORT 2 (M12 4-pin socket, D-coded) LED Status Description These safety instructions are intended to prevent hazardous situations and/or equipment damage.

EXW1-NT1_eng

Este equipamento opera em carter secundrio, isto , no tem direito a proteo contra interferncia prejudicial, mesmo de estaes do mesmo tipo, e no pode causar interferncia a sistemas operando em carter primrio.

Digital Flow Switch (Remote type monitor unit)

[February 2017] E: Contents revised in several places.[March 2018] F: Contents revised in several places.

Digital Flow Switch (Integrated display type)

E: Modified errors in text. F: Modified errors in text. G: Modified errors in text. [September 2017] H: Contents revised in several places.

Digital Flow Switch (Remote type sensor unit)

E: Contents revised in several places. [September 2017] F: Contents revised in several places.

Digital Flow Switch (Integrated display type) ( compatible)

PF3W704 PF3W720 PF3W740 PF3W711 -98No.PF-OMW0010-D PF3W721 -99No.PF-OMW0010-D Flow characteristics of the flow rate adjustment valve PF3W704S PF3W720S PF3W740S -100No.PF-OMW0010-D Dimensions PF3W704/720/740/711 Basic type Symbol Piping port size A AA B D E F H J K L N P Model PF3W704 3/8 70 50 30 66 40.6 15.2 14 35 26 18 13.6 2.7 depth 14 PF3W720 3/8, 1/2 78 54 30 66 40.6 15.2 18 39 30 18

Digital Flow Switch (Integrated display type) ( compatible)

PF3W704 PF3W720 PF3W740 PF3W711 -100No.PF-OMV0006-B PF3W721 -101No.PF-OMV0006-B Flow characteristics of the flow rate adjustment valve PF3W704S PF3W720S PF3W740S -102No.PF-OMV0006-B Dimensions PF3W704/720/740/711 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model PF3W704 3/8 70 50 30 66 40.6 15.2 24 14 35 26 18 13.6 2.7 depth 14 PF3W720 3/8, 1/2 78 54 30 66 40.6 15.2 27 18

LFE-OMZ0012

E Electric conductivity This means "full span" or "full scale", and indicates maximum variation width at rated value. For example, when analogue output is 1 to 5 V, F.S.=5[V] 1[V]=4[V]. (Reference: 1%F.S. = 4[V] 1% = 0.04[V]) F F.S. (full span / full scale) Fluid contact part A part that comes into physical contact with the fluid.

Low Profile 2/3-Port Solenoid Valve

. -7- Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model SX91 SX92 SX090 Valve

HRX-OM-T004

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-R028

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

Air cooled Thermo-con (Compact type)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1

Air cooled Thermo-con (Compact type)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii INR-244-831 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1

High Vacuum L Type Valve

Construction and Outer dimensions Indicator Handle Ass'y(Maintenance part) (Including ,,,) 1 Bellows holder (Material: SUS304) 7 Heater(option) Exterior seal (Maintenance part) 3 Bellows (Material: SUS316L) Valve (Material: SUS304) 6 5 Valve seal (Maintenance part) 2 Body (Material: A6063) 4 D C E E F C H B G A A Unit: mm Model H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41

XLJ- -*G1 Series 25 40

Construction and Outer dimensions 1 Atm , vent port Bonnet assembly (maintenance part) (inc. each part excluding body, external seal and accessory) Bonnet (material A6063) 6 External seal (maintenance part) 3 Vacuum pump side Valve seal (maintenance part) 2 Valve (material SUS304) 5 Body (material A6063) 4 Chamber side E C A A B D Dimensions [mm] Model A B C D E XLJ-25 50 139 111 48 44 (54

Pin Cylinder/Single Acting, Spring Return

When embedded O-ring Air Machining dimensions for mounting Sealed with O-ring Air Bore size (mm) Stroke A B C D E F G 5 12 8.5 6 4 3.5 M8X1.0 6.5 3 10 20 16.5 14 15 28 24.5 22 5 16 12.5 10 6 3.5 M10X1.0 8.5 3 10 23 19.5 17 15 30 26.5 24 5 17 13.5 10.5 10 3.5 M15X1.5 12 4 10 23.5 20 17 15 30.5 27 24 5 19 14.5 11.5 16 4.5 M22X1.5 19 5 10 25 20.5 17.5 15 31.5 27 24 Note) E and F should be machined