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l) Data Switch mounting screw Round head Phillips screw with spring washer M3 x 0.5 x 16 l 1.

Note) For XLA-16/25, mount the washer in the orientation that the groove of the washer faces to the valve seal 2.

Valve diagnostics 2 If the maximum number of valves is 16 coils in the EX245-SPN1/SPN2, the diagnostics will be set FFh.

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

20-M(D)BB With end lock 1.7-30 5.5-2 Copper-free Actuators Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Series/Variation Air cylinder Series C(D)A1 Standard 1.9-2 20-CA1nN Double rod 1.9-16 20-CA1WnN SCA1l Non-rotating rod 1.9-22 20-CA1Kn Non-rotating double rod 1.9-28 20-CA1KWn

10 10 10.1 20.1 5.1 1.1 0.1 20.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 50 50 2.1 4.1 1.1 0.3 0.1 4.1 2.1 1.1 0.3 0.1 100 100 1.1 2.1 0.6 0.2 0.1 2.1 1.1 0.6 0.2 0.1 For transfer load of 3kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 200 10 10.1 5.1 1.1 0.2 20.1 Speed (mm/s) 50 2.1 1.1 0.3 0.1 4.1 100 1.1 0.6 0.2 0.1 2.1 Refer to page 302 for acceleration time. 223 16

" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7 NPT 1/8 26.7 30.7 45.3 52.8 24.4 14.3 NPT 1/4 28.7 34.7 45.3 52.8 24.4 17.5 NPT 3/8 30.4 36.7 45.3 52.8 24.4 17.5 NPT 1/4 33.8 39.8 49.6 55.6 30 17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13-4

Rc 1/16 gauge port 2-4.5 Mounting hole Connection mark All types are the same in terms of connection.

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Panel mount adapter + Front protective cover Note) These options are unassembled in the factory, but are included with the shipment. 16-3-36 5 Series PSE300 Controller Specifications Conforms to CE marking and UL (CSA) standards.

(Refer to Precautions on page 16-2-24 for details.)

SE1-ll-16, -17 I Z PFor swich type "-16" or "-17", rotating SET1 will adjust ON setting for OUT1 (Black lead wire, Red LED) and SET2 will adjust ON setting for OUT2 (White lead wire, Green LED).

16-Bit) and output pressure> Set pressure 0x0 0x0FFF Output pressure 0% 100% Input data shall be entered from Bit 0 to Bit 12 of the 16-Bit process data (2 BYTE). (When F_1=0%F.S. and F_2=100%F.S.) (Ex.) When the output pressure is 100%, the set pressure value is 0x0FFF.

Contents 10 MXP10-PS 12 2 pieces of No.19 MXP12-PS 16 MXP16-PS MXPJ6 Description Material Note Parts list No.

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating flow rate6 [L/min] 20 2 25 2 40 2 Tank capacity [L] 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range [S/cm] 0.5 to 45.0 0.5 to 45.0 0.5 to 45.0 Circulating fluid system

Flow Rate and Effective Area AS3001F AS2051F AS4001F AS2001F AS1001F Model Metric size 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 5/32" 3/16", 1/4" 3/16" 1/4", 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Inch size Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Air flow /min (ANR) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area (mm 2) Note) Flow rate values

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

Weight (g) D-A53 D-A54 D-A56 D-A64 D-A67 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 24 48 96 24 48 24 48 Lead wire length Dimensions (mm) 6 14 6 4.5 5 12 22 Indicator light 12 33 D-A64/A67 without indicator light DD4 16 11 16 Most sensitive position 1639 Reed Auto Switch Tie-rod Mounting Style D-A33C/D-A34C/D-A44C Refer to SMC website for the details of the products conforming to the