Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

39

0 D E E F G F 200.03 10 G 200.03 10 300.025 300.025 250.05 9 through 9 through H 300.025 300.025 I M61.0 H M61.0 150.03 150.03 I R45 500.05 6.5 6.5 18 10 30 3 10 3 18 R6 R6 R25 R25 19 19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA236M ACA237M ACA238M NAAMS code ACA246M ACA247M ACA248M A B C D E F G H I A B C D E F G H I Part no.

Thermo-chiller

Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.

PSxx-OMV0008CN

ISDU 1 (10 ) 0x0002 (2) 0 W (68 ) 0x000C (12) 0 R/W 0x0 (69 ) 0x0010 (16) 0 R SMC Corporation 0x0011 (17) 0 R www.smcworld.com 0x0012 (18) 0 R ISE70G-02-L2 0x0013 (19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Enclosure: IP65 Leakage Select from 2 Piping Directions. 1 x 10-10 Pam3/s Rear ported Bottom ported 1 x 10-5 Pam3/s R, Rc, NPT, G)> Applicable Fluid Examples Welded structure for sensor units and fitting parts Select from a face seal or compression fitting.

Booster Regulator/Air Tank

V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 1012 Booster Regulator VBA Series VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.

HRS100/150

Applicable model Minimum operating flow rate [L/min] (50/60 Hz) HRS-BP007 HRS100-28/42 HRS150-q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.

-fl Seies

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

PSxx-OMV0003CN

bot U8 0 Y 0OFF(dot ) 1ON(dot ) 1826 0x0722 0 R/W Line bot U8 0 Y 1110 0x0456 0 R/W drE () U8 0 Y 0 1(1/10) 1140 0x0474 0 R/W Cut (Zero-cut) U8 0 Y 010 0 0 1.0% 1800 0x0708 0 R/W Eco () U8 0 Y 0oFF 1on Pin () U8 0 Y 0 1 1810 0x0712 0 R/W 1811 0x0713 0 R/W NPin () U16 0 Y 0999 a F32 N 2000 0x07D0 0 R (63 ) 2001 0x07D1 0 R b F32 N 2002 0x07D2 0 R U16 0 N 6163 2003 0x07D3 0 R

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

One-touch Fittings Series KQ2

13.5 2.7 2.7 6 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 3 8 1 2 11.8 13.8 10.0 9.9 10.7 17.2 17 4 10.0 5 14 8 18.5 16.2 6 23.3 17 10.0 17.2 5 17 10 27.5 21 26.6 39.0 8 22 28 33.5 29 28 39 35 46.0 8 19 12 44.5 22 60.0 10 22 10 12 81 113 (81) (96) 25 24 25.7 16 Reference dimensions after R(PT) thread installation.

Compact Cylinder with Air Cushion

RS M W V T2 Applicable mounting bracket Bore size (mm) Weight (g) Joint 2D through 2O counter bore T1 B E J A type mounting bracket B type mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Carbon steel (nickel plated) mm 80 YU-08 YA-08 YB-08 90 100 YU-10 YA-10 YB-10 160 Bore size (mm) Part no.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Series KP/KPQ/KPG

Equipment Clean Series Tubing Polyurethane Tubing Series10-TU Series P 20m bundle (~6ft) Tubing size Metric size (series TU) 20 TU0425 10 BU 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TU0425 O.D. mm Designation 8 10 5 6.5 12 8 2.5 6 4 4 I.D. mm Color Clean series B Black Black White (W) Red (R) Blue (BU) Yellow (Y) Green (G) Clear (C) Orange (YR) W White R Red BU Blue Tubing designation

Series KP/KPQ/KPG

Equipment Clean Series Tubing Polyurethane Tubing Series10-TU Series P 20m bundle (~6ft) Tubing size Metric size (series TU) 20 TU0425 10 BU 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TU0425 O.D. mm Designation 8 10 5 6.5 12 8 2.5 6 4 4 I.D. mm Color Clean series B Black Black White (W) Red (R) Blue (BU) Yellow (Y) Green (G) Clear (C) Orange (YR) W White R Red BU Blue Tubing designation