Micro Mechanical Valve Series VM1000

17 2 x 4.6 mounting hole 8.5 14 3 port (A) 2 2 x M5 x 0.8 depth 4 12 10 1 (P) 3 (R) * 0.5 MPa supply F .O.F .* 15 N T.T. 90 Key can be removed at the on and off positions.

EXxx-OMY0006CN

Table 10-1 specifications EX245-FPS1 EX245-FPS2 EX245-FPS3 (W x L x H) mm 85 x 148.5 x 136 1,100 g 1,200 g 8 128 () 64 (US1) 350 mA 300 mA (US1/US2) XD1/XD2 16 A (US1/US2) 10 A (US1/US2) 24 VDC +20%/-15% <20.4 VDC US1 >21.6 VDC < 17 VDC 6 A 24 VDC +20%/-15% <21.6 VDC : >22.8 VDC US2 / <17 VDC 4 A () 1.2 V US1 US2 4 8 US1 UT1/UT2 24 VDC +20%/-15% 2 A( UT1) 1 A (

44

15 10 15 15 19 20 25 28 39 42 52 48 51 61 1/8" (3.18) 0.086" (2.18) Applicable tubing 1.1 10 8 13.5 5 1.5 L1 M KDM 0.098" (2.5) 5/32" (4) H1 1.6 10 8 13.5 5 1.8 d KB 1/4" (6.35) 5/32" (3.95) 6 10 3.3 12 15.2 6 A L2 12 KR H2 0.236" (6) 5/16" (8) 12 14 17.4 6.6 5.3 Connection thread 16 KA 13 3/8" (9.53) 1/4" (6.35) 15 17 20.4 7.6 5.6 18 30 KQG2 1/2" (12.7) 3/8" (9.53) KG 17 19 23.3 8.5 8.5

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

Pad dia. 10 13 16 20 25 32 40 50 Buffer stroke 10 mm 20 mm 30 mm 40 mm 50 mm Interchangeable with standard type. 15 Rotation 15 Exchangeable at the adapter Pad Material and Characteristics : Little or no influence : Can be used depending on conditions.

Intrinsically Safe Valve

/N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Symbol 3 6 10 15 20 30 100 Lead wire length 300 mm Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

CLK1

A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

EXxx-OMV0017-D

Remote units 0 / 15 / 31 / 63 / 127 Remotes (EX600-WEN#) 0 / 15 / 31 units (EX600-WPN#) 15 Remotes DA refresh time(sec)*1 0.1 / 0.2 / 0.5 / 1 / 2 / 5 / 10 / 30 / 60 s 1 s *1 The analog input update time is set for every Wireless Remote unit. Refer to "3.3 Remote setting".

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

CG5-S

83 13 25 8 137 146 7 9 2 14 30 27.6 21 3 56.5 42 30 158 CG-E020SUS 9 83 13 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 80 22 234 14 23 6 40 80

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

MHF2

0.2 mg F = x 4 2 x 0.1 = 10 x mg = 20 x mg 10 x work piece weight 20 x work piece weight (Note) Even in cases where the coefficient of friction is greater than = 0.2, for safety reasons, SMC recommends selecting a gripping force which is at least 10 to 20 times the work piece weight.

HRX-OM-W060

temperature C 2 to 45 Circulating fluid CH1 : Clear water / CH2 : Clear water,DI water (pure water) 1 Set temperature range C CH1 : 15 to 25 / CH2 : 20 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

6, 10, 15, 20, 25, 32, 40 50, 63 Magnetically Coupled Rodless Cylinder Series 12-CY3B How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 CY3B 300 15 Cylinder stroke (mm) Type Bore size Port thread type Symbol 6 10, 15 M3 x 0.5 M5 x 0.8 Rc NPT G Nil 20, 25, 32, 40 50, 63 TN TF Model Maximum manufacturable stroke Cushion Bore size (mm) Standard stroke (mm) Port

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

D-M9 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Size Operating angle m Hysteresis angle Operating angle m Hysteresis angle A Operating angle m Hysteresis angle B A 20 20 15 15 10 10 10 10 190 190 190 190 40 35 30 25 10 10 10 10 55 45 40 40 10 10 10 10 16.9

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke adjusting range (One side) 0 to 10 mm 0 to 15 mm [Built-in adjusting bolts (2 pcs.)]