SFOD-OMT0009CN

b) 2 1 (8) (14) (a) B1 A1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 10.4 [820m] (a) (b) L E C P * A B-1 2 L 1 A A-1 6 B B-2 ) 8 8m 5 B A-2 ) 3 A 10m COM-A/COM B-3 4 COM-B/ A-3 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 ) A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B A1 5 6 (17.7) 1 (c) 2 1 (18) A6 B6 (6.3) 15 16 L (11) (30.7) 82 No.SFOD-OMT0009CN-B

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

Compact Cylinder

+ Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23 19.5 6 6 23 4 21.5 M3 x 0.5 26 1.5 5 3.5

OMR0032

Outside Inside the controller 10k (a) 1k (a) IN0 to SVON (b) (b) COM Caution Unused input terminals should not be in an unconnected (open) state.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

Intrinsically Safe Valve

4/25/3 (A/BEA/EB) Valve model (P, EA, EB) 4, 2 (A, B) 1, 5, 3 4position dual 3 port Cv b C [dm3/ (sbar)] Cv b C [dm3/ (sbar)] N.C.

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B ZZ -t2 xstrokes.1 12 + 2X!

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

XL-OMV0002

D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

SFOD-OMT0005CN

20m * Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (2) 1 2 (5.5) (14) (1) B1 A1 5 6 (17.7) (3) 2 1 (18) A6 B6 (6.3) 15 16 (11) (30.7) -58- 14.3 ()[5m ] (1) (2) LE CP B A B-1 2 A A-1 1 (L) B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shield Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-

Air-hydro Unit

D-X Technical Data 1173 B CC Series Air-hydro Unit Weight (kg) Combined valve 50 100 150 200 300 Effective oil level stroke 400 500 600 700 800 2.7 3.2 3.4 3.3 3.3 3.2 3.4 3.3 3.3 3.2 3.4 3.3 3.3 Converter nominal size Control valve 0 Valve unit size 21.6 22.8 23.2 23.0 23.0 22.8 23.2 23.0 23.0 8.0 8.5 8.7 8.6 8.6 8.5 8.7 8.6 8.6 8.5 8.7 8.6 8.6 9.1 10.3 10.7 10.5 10.5 10.3 10.7 10.5 10.5

Rotary Actuator

CRQ2X MSQX MRQ Auto Switch Working Principle [Pressure is applied from the B port.] The auto switch B is turned ON by the magnet B in the state that the pressure is applied from the B port and the piston B moves to the left side. At this time, the auto switch A turns OFF . Magnet B Piston B A port B port Auto switch B Auto switch A [Pressure is applied from the A port.]

ZP3

B C D E Y q Pad dia.

CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

LECP6_C

INP ONOFF 12 APEA ON,OFF AREA 1,2 ONOFF 43 - 11 111 [5m ] A B-1 2 L A A-1 1 B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 S 9 B A-6 8 3 14.2 2 1 (8) 14 18 B1 A1 17.7 5 6 2 1 A6 B6 15 16 11 30.7 112 [820m] A B-1 2 A A-1 1 L B B-2 6 8 8m B A-2 5 COM-A/COM B-3 3 A 10m COM-B/ A-3 4 B 15m Shield

CY1F

Refer to "Replacement Actuator (Cylinder)" on page 11 about how to order . 2.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...