Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

MY1

For MY1M50, 63 Work piece EY SMC EC a FH a 5 4.5 6 4 9 9.5 W 58 70 88 104 128 152 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 7 12 15 15 25 25 S 46.7 67.3 73.2 73.2 99 99 h 3.5 4.5 5.5 5.5 11 11 FW 66 82 95 FH 16 22 22 FC 14 17 22 22 30 35 FB 52 67 78 F 5 6 8 8 8 8 EY 50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 E 20 24

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Option) JXC-MA1 Page 606-11 VUSB cable (Option) JXC-MA1-2 Cable length: 3 m Page 606-11 VController setting software (Option) JXC-MA1-1 Page 606-11 PC Provided by customer 559-0 A System Construction/Parallel I/O (JXC73/83) Provided by customer. The connected actuators should be ordered separately. Provided by customer.

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

7ND9071en

CSA C22.2 No. 0-M91, CSA C22.2 No. 94-M91, CSA C22.2 No. 142-M1987, CSA C22.2 No. 157-92, CSA C22.2 No. 213-M1987, CSA C22.2 No. 60079-0:11, CSA C22.2 No. 60079-11:11, CSA C22.2 No. 60079-15:12, CSA C22.2 No. 60529:05, ANSI/ISA 60079-0: 2009, ANSI/ISA 60079-11: 2012, ANSI/ISA 60079-15: 2012, FM 3600 November 1998, FM 3610 October 1999, FM 3611 October 1999, FM 3810-2005, ANSI/ NEMA 250:1991

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/1285 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS25, CXSL25 10-/11221221S ZZ 12 12 SS

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Air Fittings & Tubing

KQ2U23-M5 38 34.5 2.2 2.2 9 M5 X 0.8 10 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 1 8 KQ2U23-01S KQ2U23-02S 11 14 1 4 39.5 KQ2U04-M5 M5 X 0.8 M6 X 1.0 4 2.2 2.2 Kl KQ2U04-M6 40 36 10 11 10.4 16 4 10.4 1 8 42 38 KQ2U04-01S 4.2 4.2 11 Ml 1 4 KQ2U04-02S 46 40 20 14 42.5 KQ2U06-M5 M5 X 0.8 M6 X 1.0 2.2 2.2 12 KQ2U06-M6 43 39 13 Hl 1 8 12.8 45.5 41.5 KQ2U06-01S 12.8 11 17 6 1 4 49 43 17

CLA

'I. 78 2S 52 14 / 113 21 30 72 23 17 M1 2X l .75 _boot With boot PW S W H 12 ... 1 h f zz j IBore olze k U M MM MM (mm) XIUS N P PG PH PL 40 6 71 11 M1 4Xl .5 7/' 6 20 27 'I, 42 11 20 45 153 8 51 215 43 11 .2 59 223 168 0 I50 58 237 52 11.2 66 245 50 7 80 11 M18Xl .5 30 0/, 46 10 21 V.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10-SYJ5223-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107[111.4] 3 3 3 3 87.4[91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 25, 50, 75, 100, 125, 150

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-11-1 for further information on auto switches.

KJ

(inch) Min. port size D Note) L Q M2 M1 Weight (g) Model Applicable tubing KQ2T01-03 KQ2T01-07 KQ2T03-05 KQ2T03-07 KQ2T05-07 KQ2T07-09 KQ2T07-11 KQ2T09-11 KQ2T09-13 KQ2T11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 18 20.5 19.5 20.5 20.5 23 26 26 29 29 4.5 5.3 4.8 5.3 5.3 6 6.6 6.6 7.8 7.8 16 17 16.5 17 17 18.5 21 21 22 22 5 8 6 8 8 11 17 17 26 28 5 32 2.5 15.5 1 8 1 4 3 16 3

Table of Contents

(Refer to page 14-19-11.)

SV

8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[90.4] 300 (Lead wire length) 107 79.8 VS 45.4 45.4 11 VS7 11 A B A B 5 5 2-2.6 (Mounting holes for manifold) 10 10 (Lead wire length) 19 19 2-2.6 (Mounting holes for manifold) 300 26.6 26.6 40.6[47.1] 29.5[36] 23 23 17.1 10.5 10.5 10 2-2.6 (Mounting holes) 3 3 11 2-2.6 (Mounting holes) 10 11 15 77.4 15 77.4 [ ] for AC Other dimentions are the same as the grommet style

MHZ

point L (mm) Gripping point L (mm) Internal Grip MHZJ2-10D/11-MHZ2-10D MHZAJ2, MHZJ2, 11-MHZ2 Pressure 0.7 MPa Pressure 0.7 MPa 25 0.6 MPa 0.6 MPa 20 Gripping force (N) 0.5 MPa 0.5 MPa 15 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa