HRX-OM-W060

Refer to Table 5.4-11 Offset setting for details. (1) (2) Offset setting Table 5.4-11 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

CQS

9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

HRX-OM-Q026

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulphate ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

AS-FG/ASD-FG

18.5 29.5 41 15.2 8 13.2 1/4" 17 55 R(PT) 3/8 23 41.5 46.5 20.9 19 40.2 35.2 NPT 3/8 19 20.9 29.5 41 AS321FG-03-10 AS321FG-N03-09 59 21 31.8 43.3 18.5 10 15.2 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 31.8 43.3 AS321FG-03-12 AS321FG-N03-11 61 22 32.8 44.3 20.9 12 17.9 3/8" 21 59 33.6 47.9 AS421FG-04-10 AS421FG-N04-11 100 21 33.6 47.9 18.5 10 17.9 3/8" 21 100 R(PT) 1/2 NPT 1/2 23.8 25.4 28.6 50.1

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no. MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed selection procedures, refer to pages 8-11-12 to 8-11-13. 8-12-7 8 Series MY1W Maximum Allowable Moment/Maximum Load Weight Maximum Allowable Moment: MY1MW MY1MW/M2 MY1MW/M3 MY1MW/M1 200 40 50 20 100 30 10 20 50 40 5 4 30 10 3 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 20 MY1MW63 MY1MW63 MY1MW63 2 MY1MW50 MY1MW50 MY1MW50 Moment (Nm) Moment (Nm) Moment (Nm) MY1MW50 MY1MW50

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

2/3 Port Valve

Nitrogen gas(N2) Freon 11, 113, 114, Turbine oil(40 to 100 cst), Hydraulic fluid Valve size 5 to 7 Argon, Helium, Turbine oil, Hydraulic fluid (99C) CO2 (0.7 MPa max.) Applicable fluids TL D DIN connector DIN connector with indicator light DL 6, 7, 9.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

JIS symbol 5 Port 4 Port Fluid Specifications Air 22~100 (0.15~0.7) 15~100 (0.1~0.7) 22~100 (0.15~0.7) 2 Position single 2 Position single 2 Position single 2 Position double 3 Position 2 Position single 2 Position double 3 Position A B A B Operating pressure range PSI (MPa) P R R P R Operating pressure to 100 (Operating pressure to 0.7) 15~100 (0.1 to 0.7) 22~100 (0.15 to 0.7) Max.140 Not

RLQ

Allowable kinetic energy (Graph (1)) Extension locking Retraction locking 100 100 63 Load weight kg Load weight kg 63 50 50 40 40 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 32 32 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 1 1 100 500 Maximum speed mm/s 100 500 Maximum

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Brake mechanism added

D-X 695 CE2 Series Auto Switch Mounting 3 Operating Range (mm) (mm) Bore size (mm) Auto switch model Bore size (mm) Auto switch model 40 50 63 80 100 40 50 63 80 100 D-A9/A9V D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BA 7 9 9 9 8 7 5.5 6.5 6.5 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 5 5 5.5 6 6.5 D-F5/J59/F5W D-J59W/F5BA D-F5NT D-F59F D-Z7/Z80 D-A3/A44 D-A3C/A44C 10.5 8 7 9 9.5 4 4 4.5 4.5 4.5 11 9 10 11

REC

300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Thermo-con/Rack Mount Type

Overcurrent protector 10 A 14 A Current consumption 5 A (100 V) to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Specifications W A D With shock absorber (mm) 11-MXPJ6 11-MXP10 11-MXP12 11-MXP16 Model MXPJ6 MXP10 MXP6 MXP12 MXP16 Model Cylinder bore size (mm) 6 10 12 16 Surface C to surface A 0.02 Parallelism Surface D to surface B 0.02 M5 x 0.8 M3 x 0.5 Port size Surface C to surface A 0.004 Traveling parallelism Fluid Air Surface D to surface B 0.004 Action Double acting M dimension tolerance 0.05

KJ

(inch) Min. port size D Note) L Q M2 M1 Weight (g) Model Applicable tubing KQ2T01-03 KQ2T01-07 KQ2T03-05 KQ2T03-07 KQ2T05-07 KQ2T07-09 KQ2T07-11 KQ2T09-11 KQ2T09-13 KQ2T11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 18 20.5 19.5 20.5 20.5 23 26 26 29 29 4.5 5.3 4.8 5.3 5.3 6 6.6 6.6 7.8 7.8 16 17 16.5 17 17 18.5 21 21 22 22 5 8 6 8 8 11 17 17 26 28 5 32 2.5 15.5 1 8 1 4 3 16 3

CL

Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke

MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed Series (mm/s) 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 Horizontal actuation VQ7-6-FG-S-A02 0 1000 900 800 700 600 500 400 300 200 100 0 Courtesy of Steven Engineering, Inc.-230