LECA6_C W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.
Bearing MLGPM20 to 100 25 l2 = 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100
Bearing MLGPM20 to 100 25 l2 = 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100
500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents
, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X
Thus, it can be used in a Class 100 clean room.
Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14
V V F V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 r Connector (Supply valve/Release valve/Pressure switch for vacuum) For supply valve/release valve: 300 mm (Connector assembly)4 For pressure switch for vacuum: 2 m (Lead wire with connector) Pressure
Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)
(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/12858 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS32, CXSL32 10-/11221221S ZZ SS 38 16 14 2
11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41
) 71 (120) Outlet air pressure dew point IDF IDU 45F (7.2C) 11 (19) 16 (27) 26 (45) 43 (74) 62 (106) 80 (136) Outlet air pressure dew point SCFM Note 1, 2) (m3/h (ANR)) 50F (10C) 12 (20) 17 (28) 28 (47) 45 (77) 65 (110) 86 (147) Outlet air pressure dew point IDFA psi (MPa) Operating pressure 100 (0.7) F (C) Inlet air temperature 100 (37.8) IDFB IDFB F (C) Ambient temperature 100 (37.8) Single-phase
200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1CW MY1CW: m3 MY1CW: m2 MY1CW: m1 30 200 20 100 100 10 50 40 50 40 5 30 30 MY1CW63 MY1CW63 MY1CW63 4 Load weight (kg) Load weight (kg) Load weight (kg) 20 20 MY1CW50 MY1CW50 MY1CW50 MY1CW63 MY1CW63 MY1CW63 3 MY1CW40 MY1CW40 MY1CW40
Weight (kg) Model 0.51 CHNB20-100 0.63 CHNB25-100 48mm 0.89 CHNB32-100 63mm 1.51 CHNB40-100 Basic type with a 100 mm stroke Series Variations Nominal pressure Series Bore size (mm) Mounting bracket Auto Switch 20 Basic type Axial foot type Front flange type Rear flange type Single clevis type Band mounting type 25 Reed type CHN 7.0MPa 32 Solid state type 40 Features 1 Hydraulic Cylinder
8 mm, I.D. 5 mm, Length 100 mm to 500 mm O.D. 8 mm, I.D. 5 mm, Length 100 mm to 500 mm Supply pressure [MPa] 0.25 Flow meter 6 Union tee fitting 0.20 O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.15 0.10 O.D. 6 mm, I.D. 4 mm, Length 100 mm O.D. 6 mm, I.D. 4 mm, Length 100 mm 0.05 Ionizer 0.00 0 300 100 200 Flow rate [L/min
Connection Port CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 180 270 90 180 270 90 180 270 90 180 270 180 270 Rotating angle Single vane Double vane Volume (cm3) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 25 31.5 41 1(0.6) 1.5(1.0) 4.8(3.5) 11.3(8.5) Side ported M5 x 0.8 Port size Axial ported M5 x 0.8 M3 x 0.5 90 100 90 100 90 100 90 100 90 100 Rotating angle Volume (cm
Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.
Operating range and hysteresis How to change the auto switch detecting position Auto switch mounting Auto switch adjustment D53 CRB2 Series Volume [cm3] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Volume 1 (0.6) 1.2 1.5 1.5 (1.0) 2.9 3.7 4.8 (3.6) 6.1 7.9 11.3
100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water