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SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

1.5 3) 3)1 1 () [] -3No.PS-OMM0006CN-E () () () () -4No.PS-OMM0006CN-E () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 ) JIS B 8392-1 1.1.21.6.2:2003 () -5No.PS-OMM0006CN-E * (16 ) / / FG (49 N ) () () M8(3 ) * 6 33 () () 10m DC(-)() ( ) -6No.PS-OMM0006CN-E * ( ) () CE CE -550 (5 ) * ON , 1015 10 /1 2351 LCD -7No.PS-OMM0006CN-E * -8No.PS-OMM0006CN-E (M8(3 )11

0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 200 400 600 800 1000 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 6 Series IR1000/2000/3000 Series IR3000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000 1000 2000 3000 1000 2000 1000 3000 5000 7000 3000 5000 7000 3000 5000 7000 20, 30 100 100 200 300 100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060

/decel. time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S)} 8 (mm) 1000 3000 (mm/s2) = 133 (ms) -26- 5.3.4 Move distance Configuration and Operation < Move distance Configuration> Set the

5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8 x 1.25 10.5 13.5 11 5 1.6 17 57 49 16 20 74 14.5 M10 x 1.5 96 3 17 8 56.5 6.6 M8 x 1.25 10.5 15.5 11 5 1.6 17 7 ISO Standards [ISO/21287] Compact Cylinder Series C55 Mounting Bracket Foot bracket Flange bracket Hexagon socket head cap screw (accessory) 2 x FD

Use only supplied cable and nut. 600 mm Maximum length for L-type 1000 mm 1500 mm 2000 mm 3000 mm 10 mm Semi-standard Warning Note) When placing an order for body ported solenoid valve as a single unit, mounting screws and gaskets for manifold are not included. Order them separately, if necessary. (For details, refer to page 18.)

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

(Refer to 11. Nominal filtration accuracy on page 118.)

and transportation) * For altitude of 1000 m or higher Because of lower air density, the heat radiation efficiencies of the devices in the product will be lower in the location at altitude of 1000 m or higher.

TB 1 TB ID 1 1 CN4 2 CRC 3 func 4 ID 5 6 7 8 ID 119 - 9 FLASH 10 FLASH 11 1 CN4 11 2 3 4 120 - Ver1.** Ver2.** TB Ver.511 1TB Ver1.** TB Ver.511 11 TBsetting Language 12 TBsetting Language12 11 SET MENU TEST MONITOR DATA ALARM JOG SETTING SET AX IS. Setting 1 MENU Recconect Start Disp Easy Item Speed 1 Disp AX IS.

No anchor bolt is included. 139 A HRSH090 Series Inverter Type * If the product is used at altitude of 1000 m or higher, refer to Operating Environment/ Storage Environment (page 151) Item 14 * For altitude of 1000 m or higher.

VAC for 1 minute between terminals and housing 50 M or more (500 VDC measured via megohmmeter) between terminals and housing 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, 25C reference).

VVZ400-32A-11 pc. (Blanking plate) VV3Z4-50-061-01 (6 stations) VZ415-1G3 pcs. VZ425-1G2 pcs. VVZ400-32A-21 pc.

SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption

NO.TQ1050188-OM002 PRODUCT NAME Pressure switch for energy-saving control ejector with N.O. type valve MODEL / Series / Product Number ZK2-ZSV#-A-X188 Table of Contents Safety Instructions 2 Model indication and How to order 9 Summary of Product parts 10 Definition and terminology 11 Wiring 15 Wiring 15 Internal circuit and wiring example 16 Mounting and Installation 17 Installation 17 Easy

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. 11 - NO. ZQ-OM01501 No.

Supply pressure (MPa) Suction flow (l /min (ANR)) 13-3-11 11 Series ZR Ejector exhaust Ejector supply P port Vacuum pad connection V port Ejector Unit Nozzle Dia./1.0, 1.3, 1.5, 1.8, 2.0 mm Circuit diagram 2 2 Adapter B Silencer Ejector indication Nozzle dia./1.0, 1.3, 1.5 mm ZR1-W 1 10 13 15 2 Ejector 1 1 1 1 (Mounting hole) 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.