MLGP 9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !
9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !
If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1
R E (g6) Q3 Q2 F (h9) B Q1 P C D G1 G2 J K L M N Model A 90 180 270 M5 M3 3.4 (5.5) CRB2BW10-S CRB2BW10-SE CRB2BW15-S CRB2BW15-SE CRB2BW20-S CRB2BW20-SE CRB2BW30-S CRB2BW30-SE M3 (6) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 0 0.036 15 24 8 14 9 3 1 5 9 0.5 0.004 0.012 29 4 M3 M3 (5) 3.4 (6) M5 M3 M3 (10) 0.004 0.012 0 0.043 20 29 9 18 12 4 1.5 6 10 0.5 5 34 M3 M4 (7.5) 4.5 (11) M4
Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51
Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51
Connector C Actuator side (Terminal no.) 1 2 5 6 (14) (18) 8 A1 B1 (13.5) (17.7) (17.7) Cable length (L) 1 3 5 8 A B C 1 2 A6 B6 1.5 m 3 m 5 m 8 m (30.7) Connector A 5 6 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 m (14.2) Connector C (Terminal no.) 1 2 5 6 15 m 5.5 6.3 Actuator side (14) (18) (Terminal
Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15
CRA1 2 or less Backlash P . 11-10-18 to 11-10-19 For detailed explanation of effective output, refer to the description on page 11-10-5. CRQ2 MSQ Linear Motion Parts/Standard Stroke 32, 40 Standard stroke (mm) Size MRQ 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to page 11-10-18 for other intermediate strokes.
5-9 Current circulating fluid temperature [PV] . 5-10 Circulating fluid set temperature [SP] . 5-10 Circulating fluid discharge pressure [Press PV] . 5-11 Circulating fluid flow rate [Flow PV]. 5-11 Circulating fluid flow rate [DI PV]. 5-11 Independent pump operation [Pump] . 5-12 Operation mode [MODE] . 5-12 RUN/STOP display . 5-12 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status
Alarm Setting Menu . 5-9 5.3.7 Communication setting menu . 5-10 5.3.8 Reset menu . 5-11 5.3.9 Information Monitor Setting Menu . 5-11 5.4 Basic setting mode . 5-12 5.4.1 Screen configuration . 5-12 5.4.2 Main menu . 5-12 5.4.3 Alarm display menu . 5-14 5.4.4 Notice for maintenance Menu . 5-15 5.5 Advanced setting mode . 5-17 5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents
15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W 13 9 DD-A3/A44 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 5.5 6.5 7.5 7 5.5 5.5 -X D-Y7BAL 5 4.5 4 3.5 3.5 3.5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 4.5 4.5 4.5 4 4 3.5 Data D-G39/K39 11 11 11 10 9 4 4 4.5 4 4.5 9 D-P5DWL Since this is a guideline including hysteresis, not meant to be guaranteed.
15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W 13 9 DD-A3/A44 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 5.5 6.5 7.5 7 5.5 5.5 -X D-Y7BAL 5 4.5 4 3.5 3.5 3.5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 4.5 4.5 4.5 4 4 3.5 Data D-G39/K39 11 11 11 10 9 4 4 4.5 4 4.5 9 D-P5DWL Since this is a guideline including hysteresis, not meant to be guaranteed.
B1 Bore size (mm) 32 40 50 63 80 100 125 l2 E B2 B3 L1 TG1 T FL d1 d2 d3 CN R 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32
H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 25 12 16 18 35 5 38 12 6.6 55 11 5.5 50 27 16 21 20 40 5 51 46.5 15 9 65 15 6.5 63 32 16 21 23 45 5 56.5 15 9 75 15 6.5 80 36 20 25 27 45 5 72 18 11 95 18 10 100 89 18 41 20 25 30 55 11 115 18 10 5 6-12-9 10 Series C95 Dimensions: Cylinder Mounting Accessory DS and ES [First angle projection] Mounting style (DS) Courtesy of
Stations 1 2 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Description/Model A B Single PEB EA A B Double P EA EB A B Closed center EAPEB A B Valves Options Exhaust center P EA EB A B Pressure center EB P EA 4 2 Dual 3-port valve (A) 1 5 3 N.C. N.C. 4 2 Dual 3-port valve (B) 1 5 3 N.O. N.O. 4 2 Dual 3-port valve (C) 1 5 3 N.C. N.O.
Note 5) Separate interfaces are required for modular unit. 11 F.R.L.
3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.
. 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12