HRX-OM-Q026

Flow switch 6 Blue (DC COM) Terminal No. 13 Terminal No. 3 Black (Output 1) Black (Output 1) 11 Terminal No. Fig. 3-13 Wiring of the external switch (PNP open collector output) (example) HRSH Series 3.3 Installation 3-23 HRX-OM-Q026 Chapter 3 Transport and Setting Up Setting items Table 3-10 shows the setting items of the external switch.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

R1 P 13 13 5 5 10 10 5-M5 0.8 (Piping port) 10 10 28 5-M5 0.8 (Piping port) 28 [ ] for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 27 Series SYJ3000 Valve Drawings 3 Position Closed Center / Exhaust Center / Pressure Center (mm) 3 4 5 G H Grommet (G), (H) : SYJ3 40-M5 10 9 5 10 16.5 33.5 23.2 (Mounting holes) Manual

High Power Cylinder Series RHC

89 78 10 13 90 20 23 61 25 75 95 40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND 25 MM 27.7 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 52 50 342 10 37 1/2 215 24 24.5 27.7 M18 x 1.5 7.5 80 60 95 10 289 55 63 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75

MB1

13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 22 30 35 35 40 40 to 500 to 500 to 600 to 600 to 800 to 800

HRX-OM-Y098

Refer to Chapter 5 Display and Setting of Various Functions for details. (6) (1) (7) (2) (8) (3) (9) (4) (10) (5) (13) (15) (11) (14) (12) Fig. 4-4 Home screen Table 4.2-1 Items displayed on the home screen No.

Modular F.R.L. Unit

Description Model AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B Round G27-10-R1 G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 Pressure gauge Note 1) Square Note 2) embedded type 1.0MPa GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Attachments Accessories G27-10-R1 Note 3) G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46

Vacuum

{check leakage). 98 lloninntal Type Uacuum Entny: Witlrout BullcD lrllilh 0ne-Iouch Tube litting Specif ications 2, 4,6, 8, 10, 13, 16, 10,13,16,20 10, 16,25, 4D 6,8, 10, 13, 16,20 NBR (black), Silicone (white), Urethane (brown), Ftuorine (black with mark), Conductive NBR (black with mark), Conductive Silicone {black with NBR (50 J Silicone rubber (40"J. Urethane rubber.

VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

CRBB-OM00004

The solid state auto switch (D-S9*/T99) for sizes 10 and 15 has a built-in switch in the block. It requires only two parts for mounting (see P211070-13).

Swivels

/16-16 13/16-16 81.4 mm 55.1 mm 28.6 mm 36.5 mm UN-2A UN-2A PS81JMJM-10-10 3.41 2.28 1.12 1.50 1-14 1-14 86.6 mm 57.8 mm 28.6 mm 36.5 mm UN-2A UN-2A PS121JMJM-12-12 3.59 2.36 1.38 1.69 1-3/16-12 1-3/16-12 91.2 mm 60.0 mm 35.0 mm 42.9 mm UN-2A UN-2A PS161JMJM-16-16 3.62 2.36 1.62 1.88 1-7/16-12 1-7/16-12 91.9 mm 60.0 mm 41.3 mm 47.6 mm UN-2A UN-2A D Swivels Quick Coupling Division 8145 Lewis

Fieldbus System

] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting L2 = L1 10.5 L3 = 16 x n1 + 73.8 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 57 L7 = 47 x n2 + 85.8 C10 [1(P) SUP port] (Double sided type: C12) C10: 10 One-touch fitting (C12: 12 One-touch fitting) L1: DIN Rail Overall Length (mm) Valve stations (n1) I/O Unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14

44

17 12 17 17 21 30 34 38 55 59 68 54 58 67 59 63 72 57 60 69 98 106 4 2.5 3 1.8 10 8 13.5 5 L1 M L1 M 4 3 5 2.3 d 6 4 10 3.3 10 10 15 5.8 16 A L2 H2 8 6 H2 6.6 5.3 12 14 17.4 25 30 41 22.2 H1 Connection thread 25.6 10 7.5 6.8 27.5 2 x Applicable tubing 7.6 15 17 20.9 35 25.6 10 8 7.3 47 32 27.5 25.6 12 9 8 48 27.5 16 17 23.5 8.5 41 25.6 12 10 9 61 27.5 31 32.9 16 13 9.3 108 12 21 22 26.2

Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G-27-10-R1 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD37 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD37 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 V.

Series KG Stainless Steel One-touch Fittings

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

CLA

l~ length 01 thread wnhoul boot With boot --l ~ 40 500 20-500 27 30 60 96 V. y, 44 16 32 10 85 15 26 54 10 10 M8X1.25 100 -750 20750 37 40 11 6 140 V. y, 92 30 52 14 124 21 31 76 25 19 M1 2Xl .75 50 600 20-600 32 35 70 108 Yo V. 52 20 40 10 95 17 27 59 13 12 M 8X 1. 25 63 -600 20-600 32 35 86 11 5 'I, 'I, 64 20 40 10 102 17 26 67 18 15 Ml 0Xl .25 80 750 20750 37 40 102 129 'I.

Stainless Steel One-touch Fittings Series KG

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

2/3 Port Valve

Refer to p.4.1-12, 4.1-13 for specifications and model.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

12 10 12 10 11 10 11 10 13 7.2 7.2 b 0.18 0.24 0.18 0.24 0.28 0.25 0.16 0.26 0.26 0.27 Cv 2.4 3.0 2.4 3.0 2.4 2.8 2.4 2.8 2.4 3.3 b 0.24 0.27 0.24 0.27 0.24 0.27 0.20 0.27 0.25 0.29 Cv 3.0 3.3 3.0 3.3 2.4 2.8 2.4 3.3 2.8 3.0 C 12 13 12 13 10 11 10 13 11 12 7.0 7.0 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal