Series KV2 Fittings

20 13 20 34 65 30 28 37 63 32 41 65 70 64 80 132 116 150 100/800 100/800 100/800 100/600 100/400 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/100 100/200 100/100 100/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation. 6 Series KV2 90 Female Elbow KV2LF_ _-_ _ L1 Applicable Tube M D1 D2 L2 Hex Thread

Suction cups with flange

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

Wedge Cam Operation Provides

20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L (mm) Holding point L (mm) Holding point L (mm) Holding point L (mm) Note) Distance to the holding point L of single acting type is shortened end by spring return.

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

MTS

12) Stroke: Up to 20 stroke 0.1 0.1 D-X 0.05 0.05 Weight W (kg) Weight W (kg) 0.04 0.04 200.03 0.03 Data 0.02 0.02 8 8 0.01 0.01 0 5 10 15 20 25 30 5 0 10 15 20 25 30 Overhang L (mm) Overhang L (mm) Graph (10) Stroke: Up to 30 stroke Graph (13) Stroke: Up to 30 stroke 0.1 0.1 0.05 0.05 Weight W (kg) Weight W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 25 20 30 0 5 10 15 20

MXW

MX 10 MTS Width across flats 13 MY CY 8-M5 x 0.8 thread depth 13 (Helisert) 6H9 +0.030 depth 5.5 0 depth 5.5 6H9 +0.030 MG 7 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D72 98 48 -X 20(Y) (Y) 25 160 40 40 40 L Data 11 24 24 K A 60 50 32.5 Z A N-M6 x 1 thread

CE

20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !

CE

20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !

ZMA

13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics, Standard Supply Pressure: M0.35 MPa ZM07M ZM10M Exhaust Characteristics Flow Characteristics Exhaust Characteristics

Guide Cylinder Series MGG

, 50, 63, 80 and 100.) 13 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

55 79 141 0.4 11 32 45 80 0.3 8 24 34 60 0.6 17 47 68 121 28 79 113 201 Weights Standard Strokes (g) (mm) Body weight 80 105 130 210 210 320 640 830 Additional weight of magnet & rail 10 10 13 20 17 23 20 23 Model MXP 6 MXP10 MXP12 MXP16 Model MXP 65 MXP 6-10 MXP10-10 MXP10-20 MXP12-15 MXP12-25 MXP16-20 MXP16-30 Standard strokes 5, 10 10, 20 15, 25 20, 30 With shock absorber Shock Absorber

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

mA, 7: 4..20 mA 3 Reserved 3 4..6 (Ch1 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0..2 (Ch0 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 4 4..6 (Ch1 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0:

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

Series IDG

Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 0 40 80 120 160 20 40 60 80 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG20 IDG30 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.5MPa 10 P1 = 0.7MPa 20 20 P1

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Refer to page 100 for part numbers. 127 Made to Order/TSUBAKI CABLEVEYOR Specification Series LJ1S10 Dimensions/LJ1S101SC (X40) Scale: 20% Dimensions other than those shown in the drawing are the same as standard. 100 80 2-5H10 depth 6 4-M5 x 0.8 For work piece mounting 20 Mounting plate 4-9.5 4-5.2 5.5 13 21 (4-M5 x 0.8) Work piece mounting dimensions 83 50 20 15.5 10 95 103 80 42 This

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA MU Contact protection circuit None DD-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

KK/KK13

10.1 17 19 50.2 M16 x 1 20 -08E 6.2 18.5 8 22.6 38.2 19.8 25.2 1/4 22 24 53.2 M20 x 1 22 -10E 7.7 21 10 35.3 61.4 27.6 54.2 -12E 9 75.2 40.2 24 27 M22 x 1 23 22 12 50.9 60.1 KK6P-12E 9.2 86.1 41.2 31 1/2 30 32 24.5 M28 x 1.5 62.6 -16E 13 25 16 106.2 125.0 6 S e r Dimensions/Socket (S) Male thread type A2 A1 T D H L L (mm) A2 When connected T Connection male thread Weight g Effective area

S Couplers Series KK/KK13

10.1 17 19 50.2 M16 x 1 20 -08E 6.2 18.5 8 22.6 38.2 19.8 25.2 1/4 22 24 53.2 M20 x 1 22 -10E 7.7 21 10 35.3 61.4 27.6 54.2 -12E 9 75.2 40.2 24 27 M22 x 1 23 22 12 50.9 60.1 KK6P-12E 9.2 86.1 41.2 31 1/2 30 32 24.5 M28 x 1.5 62.6 -16E 13 25 16 106.2 125.0 6 Series KK Dimensions/Socket (S) Male thread type A2 A1 T D H L L (mm) A2 When connected T Connection male thread Weight g Effective

7

VXZ Height Weight Class H/24 VDC Class H/DIN terminal Seal material: EPDM 7%Smaller 20%Lighter VXS (90 g) (7 mm) Approx.

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.