Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

132 6 22 11 17.5 depth 13.5 26 77 11 Rc 3/8 112.5 100 20 25 98 28 89 100 67.5 M20 x 2.5 156 6.5 26 12 17.5 depth 13.5 26 94 11 Rc 3/8 132.5 107 24 30 117 29 95 Rod end male threads (mm) H X D L K C Bore size (mm) 20 M8 x 1.25 18 15.5 10 23 8 32 M14 x 1.5 30 27 16 38.5 14 40 M14 x 1.5 30 27 16 38.5 14 50 M18 x 1.5 35 32 20 46 18 63 M18 x 1.5 35 32 20 46 18 80 M22 x 1.5 40 37 25 51 22 100

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

HRX-OM-R005

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Stroke Reading Cylinder and Counter

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4 x 4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 64 59 3) 15 mA when BCD is output (Refer to page 676.) 668

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Indicator light Circuit with Light/Surge Voltage Suppressor DC circuit AC circuit Caution Indicator light Do not apply excessive torque when turning the locking type manual override. (0.1 Nm or less) A() A [+] SOL SOL C(+) C ZNR Indicator light [] No polarity by adopting non-polar light. 4-14-22 23 Base Mounted Series VQZ100/200/300 Precautions Be

Compact Type Dual-Rod Cylinder Series CXSJ

V = over 400 mm/s; up to 100 mm stroke 14 15 CXSJM CXSJL Graph V = over 400 mm/s; up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 6 Series CXSJ Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM6 CXSJL6 !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L = 100 mm L = 100 mm L = 100

VQ4000

VQZ SOL.A 8 8 () (+) Purple White SOL.A SOL.B 21 21 () (+) Brown White 8 stations SOL.B SOL.A 9 9 () (+) Gray Black SOL.A VQD SOL.B 22 22 () (+) Pink Red 9 stations Connector terminal no. SOL.B SOL.A 10 10 () (+) White Black SOL.A Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types.

ZP

Form w 1 Material e Vacuum inlet r Connection A thread Width across flats 12 10 13 A5 59 38 22 2.5 M5 x 0.8 21 8 4 16 59.5 38.5 22.5 10 13 Width across flats 7 64 38 22 2.5 16 64.5 38.5 22.5 20 25 68 42 24 3.5 32 68.5 42.5 24.5 40 72.5 46.5 28.5 6 50 73.5 47.5 29.5 20 25 A8 M5 x 0.8 N S U F GN GS N4 N6 U4 U6 A6 M6 x 1 26 8 4 ZP Y U D2 Construction p. 117 58 42 24 3.5 M8 x 1 16 12 4 32 58.5

KN Series Nozzles for Blowing

Weight (g) Connection thread KN-R01-100 KN-R01-150 KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 1 1.5 1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 R 3/4 R 3/4 R 1 10 10 14 14 14 14 14 17 17 22 22 27 27 36 21.4 21 31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1

VXD21/22/23

Series VXD21/22/23 Construction/Principal Parts Material Normally Closed (N.C.) Normally Open (N.O.)

4/5 Port Air Operated Valve Series SYJA3000

) 51 (25) Body ported 5 port base mounted (with sub-plate) 4 Port base mounted (For manifold) Note 1) 2 position 0.36 0.12 0.46 0.35 0.12 0.46 0.33 0.12 0.47 0.31 0.12 0.47 SYJA340-M5 M3 x 0.5 M5 x 0.8 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22

3 Position Cylinder Series RZQ

Model RZQ32 RZQ40,50 RZQ63 Applicable floating joint JB40-8-125 Graph 1 JB63-10-150 200 JB80-16-200 63 100 Guide Shock absorber 50 Load weight (kg) 50 40 40 32 30 Floating joint 3 position cylinder 20 10 Maintenance Caution 5 150 100 200 300 1.

JXCx-OMT0061CN

CN1: . 21 6.1 . 21 6.2 . 21 6.3 . 22 (1) (C24V,M24V,0V) . 22 (2) (EMG) . 22 1 - (3) (BL RLS) . 22 6.4 . 23 1 . 23 2 . 24 3() . 25 7. CN5: . 26 7.1 . 26 7.2 . 26 7.3 . 27 8.

Modular F.R.L. Unit

F Plug 1/8 (VHS3000, 4000 only) 3-port valve for residual pressure release C P U S B IN OUT E EXH D JIS symbol Specifications A Model Port size Effective area (mm) IN to OUT OUT to EXH 10 14 16 31 22 38 57 Port size IN/OUT port size EXH port size 1/8 1/4 1/4 3/8 1/4 3/8 1/2 11 16 14 29 15 29 51 Model A B C D E F VHS2000 1/8, 1/4 1/8 40 53 70 56 74 80 36 45 48 28 48 54 22 28 36 25 30 30 VHS2000

4/5 Port Air Operated Valve SYJA3000 Series

Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions. 1474 4/5 Port Air Operated Valve SYJA3000 Series Specifications Fluid Air 0.15 to 0.7 100 kPa to 0.7 100 kPa to 0.7 2 position single Operating pressure range MPa 2 position double SYA 3 position 2 position single Operating pressure to 0.7 0.1 to 0.7 0.2 to 0.7 Note 1) Pilot pressure

Table of Contents

VQ1000 (VV5Q17)-Plug Lead Unit, Cassette Type (F, P, T, S kit) . 3 3 4 9 10 10 11 12 12 14 16 18 20 22 28 30 32 32 33 34 34 35 36 61 62 64 65 67 68 70 36 37 38 38 40 44 48 52 56 74 74 75 76 76 78 80 82 84 86 89 92 94 96 97 100 104 104 106 108 110 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

VQ5000

with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 158.7 158.7 6-Rc3/4 Ports P (SUP), R (EXH) 6-Rc3/4 Ports P (SUP), R (EXH) 2-G1 (electrical

Compact Guide Cylinder

30 st 100 st or less Over 100 st 12 43 22 50 37 47 33 20 40 110 15 25 60 20 3 3.5 M5 x 0.8 10 5 16 49 24 57 42 51 37 20 22 42 110 15 16 26 60 24 3 3.5 M5 x 0.8 10 5 20 60 28.5 71 49 66 44 24 44 120 30 40 78 28 3 3.5 M6 x 1 12 18 25 73 34 86 60 78 50 24 44 12 29 39 77 34 4 4.5 M6 x 1 12 17 [mm] MGPKL: A, DB, and E Dimensions Bore size [mm] A DB E 30 st or less Over 30 st 100 st or less Over

125

0 01 1 Air operated VEX3 D 5 1 22 2 01 Pilot solenoid Option Operation type Nil None 1 External pilot solenoid 2 Internal pilot solenoid Thread type Nil Rc F G N NPT T NPTF N Pilot exhaust (PE) silencer Body size Port size Body size Port size Port 1(P), 2(A), 3(R) 22 Nil Without sub-plate* Rated voltage 01 1/8 02 1/4 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC