Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type

CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

Series SV

center [M12 waterproof connector type] SV100(R)-W-01 13.3 14.5 13.5 62.6 51.8 14.3 35 19 19 2-3.2 M5 x 0.8 (External pilot port) 17 17 (Mounting hole) 3 A B 22 A B SMC B A PE X EB EA P Manual override (non-locking) A side: Orange B side: Green (Light/Surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 41 11.3 (L = 300 to 5000) 97.8 92.2 M12 waterproof connector

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

VS 8-2/VS 8-4

Terminal block box (Terminal block) Terminal block box P.3, 17 P.3, 17 T kit IP65 compliant IP65 compliant IP65 compliant Electrical entry IP65 enclosure with use of multiple wire cable with sheath and waterproof connector Lead wire P.3, 19 P.3, 19 L kit 25-core cable 26 pins Circular connector Circular connector IP65 enclosure with use of waterproof circular connector P.3, 21 P.3, 21 M kit

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

5 Port Solenoid Valve SY Series

(-F2) G H 22.5 28.5 [35.5] A, B port M5 x 0.8 28.5 [35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 21.5 die-cast hole 19 22.5 L plug connector (L): SY3120-L(-F ) M plug connector (M): SY3120-M(-F ) C4, N3 C6, N7 M8 connector (W0): SY3120-W0(-F ) 1 2 1 2 C4, N3 C6, N7 C4, N3 C6, N7 1 2 28.5 [35.5] 13.1 (Lead wire length) 33 M8 x 1 Approx. 300

Intrinsically Safe Valve

L 156 M5 x 0.8 (Pilot EXH port) Manual override 17.6 109.7 33.7 EA P EB PE X A A A A 24 23.6 20 20 65.4 5.3 20 29 7.3 68 39 B B B B 6 x 1/4" {P(1), EA(5), EB(3) port} 46.3 M5 x 0.8 (External pilot port) (Pitch) P = 17.5 21 L1 L2 5 Stations 1 n 2 47.5 53 38 27.3 8.5 9.8 2n x 1/4" {A(4), B(2) port} (Pitch) P = 17.5 19 L (Lead wire length) L-type plug

Stainless Steel One-touch Fittings Series KG

Body rotates at 360 around the stud axis. 6/4-M5 6/4-M5 MS-5ATHU-6 MS-5HLH-6 P. 133 P. 134 Applicable MS-5ALHU-6 MS-5HLH-4 MS-5HLH-6 MS-5ATHU-6 only Gasket Gasket(H) To seal M5 thread. M-5GH To seal M5 thread M-5G1 P. 134 P. 134 132 Miniature Fittings Series MS Barb fitting for soft nylon: MS-5AU-3, -4, -6 Effective orifice(mm 2) Weight (g) D L Part No.

LJ1H

Cable entry direction D E 25mm 40mm 2m 3m 4m 5m 2 3 4 5 Motor output: 200W Axial Right Left Top Bottom F R L T B Lead screw type Refer to Table below. Power supply voltage Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Non-standard motor Nil W None N.C.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

3 Port Solenoid Valve Rubber Seal Series SY100 1

(For AC) (Light/Surge voltage suppressor) (Station 1) (Station n) (Station 1) (Station n) A A A A 13 13 8.7 7.7 (Pitch) n-M3 x 0.5 (A port) 12.6 P = 10.5 n-M5 x 0.8 (A port) 12.6 P = 10.5 (Pitch) M3 M5 L plug connector (L) M plug connector (M) 31.7 (For AC) 30.4 (For DC) 15.6 39.1 (For DC) 45.6 (For AC) 40 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 26.4 Other dimensions

CXWM/CXWL

CX D2-M5 x 0.8 Hexagon socket head cap plug 6H7 +0.012 0 2 x 2-5.2 through 2 x 2-9.5 counterbore depth 5 End lock mechanism -X (6H7 hole pitch) 4-M5 x 1.0 thread depth 9 20Data 4 positions for set screws for 6H7 depth 4 +0.012 0 6H7 thread depth 8 +0.012 0 fixing shock absorbers 2-RB1006-X552 Shock absorber (mm) F L P Q S SS Z ZZ Model CXWL20-25R CXWL20-50R CXWL20-75R CXWL20-100R CXWL20-

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Type 2-Port Solenoid Valve JSXM Series p. 39 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Brass p. 19 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Aluminum p. 21 Glossary of Terms Bracket Options p. 23 How to Order p. 39 Flow Rate Characteristics, Common Specifications p. 40 Construction p. 41 Dimensions p. 42 Modular Connection Examples p. 44 Spacer / Spacer with Bracket

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust