-2A bolt assy, NEW SY3000 MFLD*** $4.74 + Add to Quote Add To Cart Add to Cart SMC SY30M-56-3A bolt assy, NEW SY3000 MFLD*** $5.59 + Add to

-2A bolt assy, NEW SY3000 MFLD*** $4.74 + Add to Quote Add To Cart Add to Cart SMC SY30M-56-3A bolt assy, NEW SY3000 MFLD*** $5.59 + Add to

SMC SY50M-56-5A bolt, NEW SY5000 MFLD*** $7.05 + Add to Quote Add To Cart Add to Cart SMC SY50M-9-1A base gasket kit, NEW SY5000 MFLD*** $2.14 +

SMC SY50M-56-5A bolt, NEW SY5000 MFLD*** $7.05 + Add to Quote Add To Cart Add to Cart SMC SY50M-9-1A base gasket kit, NEW SY5000 MFLD*** $2.14 +

SMC SY50M-56-5A bolt, NEW SY5000 MFLD*** $7.05 + Add to Quote Add To Cart Add to Cart SMC SY50M-9-1A base gasket kit, NEW SY5000 MFLD*** $2.14 +

PA3000/5000/PAX1000

Series PA3000/5000 Dimensions/Automatically Operated Type PA3000 68 85 105 4-7 7.5 (185) Reset button FLUID OUT Rc 3/8 5.5 AIR SUP (pilot air supply port) Rc 1/4 FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56

PFA/PFW

(4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 7 Series PFA Digital Flow Switch for Air Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70 % PFA5 0-m m (N) 1 5 Sensor Unit 98 56 82 60 42 6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43 2-3.4 Pin name Pin No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Sectional view Standard size Minimum position Seal End face Insert bushing Body Tubing Reducer type 17-5-56 15 Series LVD High Purity Chemical Valve (Compact Type) Fitting Assembly Procedure Assemble fittings following the procedure shown below.

70pvpump

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (Pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (Pilot air supply port) (257) 112 Rc 1/4 56 165 56 Reset button

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 3 69 56 32 24 Station L1 L2 L3 L4 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 20 341 328 304 296 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

2/3 Port Valve

N.O. 10.2 10.4 50 VNC0 VNC02 1 4 VNC814-65F VNC811-65F 65 45 65 70 49 1260 880 15.7 P1 P2 VNC914-80F VNC911-80F 80 56 80 100 73 1800 1400 21.2 Air operated Note)The flange should be JIS B 2210 10K (ordinary type) or equivalent.

Shuttle Valve/AND Valve with One-Touch Fittings

Output 3 B Output 1 Output 2 A B C A B A Dimensions (mm) 1in = 25.4mm 1g = 0.0353 oz D3 Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 Applicable tubing O.D. d M1 L1 Metric sizes: Light gray Inch sizes: Orange Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1210F-23 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-04 4 12.8 10.4 56

XL

66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(

SMC SY50M-56-5A bolt, NEW SY5000 MFLD*** $7.05 + Add to Quote Add To Cart Add to Cart SMC SY50M-9-1A base gasket kit, NEW SY5000 MFLD*** $2.14 +

-2A bolt assy, NEW SY3000 MFLD*** $4.74 + Add to Quote Add To Cart Add to Cart SMC SY30M-56-3A bolt assy, NEW SY3000 MFLD*** $5.59 + Add to

Speed Controller with One-touch Fitting

Tubing O.D. 18 g 56 g 6 6 AS221F-02-06 AS221F-02-06A 1/4 1/4 KE 12 12 AS421F-04-12 AS421F-04-12A 1/2 1/2 AS-FG AS-FP AS-FM Face seal adopted for threading AS-D Improved installability (Reduced tool-tightening after hand-tightening) AS-T Face seal Face seal Sealant ASP At hand-tightening After tool-tightening At hand-tightening After tool-tightening ASN AQ ASV AK VCHC ASR ASQ Number of rotations

Solid State Auto Switches

Weight (g) D-F79F Auto switch model 0.5 m (Nil) 13 3 m (L) Lead wire length 56 5 m (Z) 90 Diagnostic Output Operation The diagnostic output signal is output within the red display area (where indicator light is Red), and it is not output within the proper operating range (where indicator light is Green).