Rotary Table/Vane Style Series MSU

With auto switch: MDSUB1-D 1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V) 30: When using D-97/93A 2) 60: When using D-90/90A/97/93A 69: When using D-S99(V)/T99(V)/S9P(V) CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MSZ Adjustment bolt CRQ2X MSQX A port MRQ B port 2 x M3 x 0.5 (Port location: Side ported type only) 24 1 60 (69) 2 D-97/93A 30 1 DIf the adjustment bolt is removed, rotation will be

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Stroke Reading Cylinder and Counter

V, 12 V 12 V 5 V, 12 V 12 V Connector M9NW M9PW M9BW M9NA1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire Relay, PLC IC circuit Diagnostic indication (2-color indicator) No No Yes Yes Yes Yes 24 V Grommet Water resistant (2-color indicator) IC circuit M9PAV1 M9PA1 M9BAV1 M9BA1 F79F With diagnostic output (2-color indicator) IC circuit 5 V, 12 V 3-wire (NPN equivalent

7.4

V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page

Brake mechanism added

Reed auto switch Solid state auto switch 3-wire (NPN) 2-wire Terminal conduit 12 V Yes Yes Relay, PLC 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indicator) 3-wire (PNP) 24V 12 V 5 V, 12 V 2-wire Grommet 3-wire (NPN) 3-wire (PNP) M9PA1 Water resistant (2-color indicator) M9BA1 2-wire 12 V F59F 4-wire (NPN) With diagnostic output (2-color indicator) G59F IC circuit

PFxx-OMX0002

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -92No.PF-OMX0002-B Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

energy saving effect

detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item dt HED < For 400 V type and option B [With earth leakage breaker]> 3.

Cylinder with Lock Series CNS

V Reed switch Solid state switch IC circuit Terminal conduit 5 V, 12 V 12 V 3-wire (NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire (NPN) Relay, PLC Yes IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 24 V 12 V Grommet IC circuit 5 V, 12 V Water resistant (2-color indication) 12 V IC circuit With diagnostic output (2-color indication)

PFxx-OMA1007

Signal Details 1 24 V 24 VDC (US1): OUTPUT 2 Internal Bus B Internal Bus B 3 0 V 0 V (US1) 4 Internal Bus A Internal Bus A : Do not turn on the power supply. Wireless adapter side connector: M8 4-pin A-coded (Plug) Connector Pin No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C10 M5 02 One-touch fitting for 3.2 v v v v Configuration One-touch fitting for 4 2 position single One-touch fitting for 6 (A) 4 (B) 2 One-touch fitting for 8 1 One-touch fitting for 10 M5 thread Rc(PT)1/4 5 (R1) 1 (P) 3 (R2) 2 position double (A) 4 (B) 2 (A) 4 (B) 2 Note 1) Refer to p.1.12-27 for inch size and One-touch fitting. 2 5 (R1) Metal Rubber 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R2)

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

, PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 2-wire 24 V 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) IC circuit 24 V 5 V, 12 V 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 2-wire IC circuit 3-wire (NPN) Terminal conduit 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color

CL

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

Table of Contents

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

Cylinder with Lock Series CLS

100 V, 200 V Solid state switch Reed switch 3-wire (NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire (NPN) Terminal conduit 12 V Relay, PLC IC circuit Yes 5 V, 12 V With diagnostic output (2-color indicator) 24 V 12 V Grommet 5 V, 12 V Water resistant (2-color indicator) 12 V 5 V, 12 V With diagnostic output (2-color indicator) IC circuit A96 A93 A90

2–4

V 16 12 2 x 2-OB counterbore with depth RB 2-M5 x 0.8 Auto switch 2-HB through F Q 2-HA through KA IB IA 2-N through T EB EA M KA (KB) 2 x 2-OA V (RB) Note) 2 x 2-RA L M Flat washer W B + Stroke EB A + Stroke EA 20, 25 (mm) With auto switch HA OA Without auto switch A 31.5 Stroke range (mm) Bore size (mm) EB F HB IA IB NN NN EA A 26.5 B 17 B 22 12 16 20 25 8-32UNC M3 x 0.5 4-40UNC M4 x

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

) P = 10 A B 0 A B 0 8 L1 L2 Vacuum release flow adjusting needle P PE Exhaust part 2 x 3.5 (Body mounting hole Note 4)) 13.2 (With L-type plug connector) 28.8 62.8 3 75 Vacuum pressure switch Suction filter 63.6 68.9 Note 2) 76.8 Attached washer Attached washer (60.1) SMC SMC SMC V 81 8.9 10.2 8.5 9 Right Left Left Right 107.5 Note 1) Vacuum (V) port (M5) Note 5) 21 10 111 Note 1) (3.7)

0.55

Surge intrusion circuit example (NPN outlet example) (24 VDC) P Grommet or L/M-type plug connector With light/surge voltage suppressor (lZ) Output circuit Surge voltage (~) 24 V 0 V sol.1: Energized 2 V or less LED Varistor Coil R Surge voltage 0 V (~) sol.2: Deenergized 2 V or less Surge voltage R P DIN or Conduit terminal With light/surge voltage suppressor (lZ) 24 V 0 V Large capacity

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 3-wire (PNP) 5 V, 12 V CC IC Grommet 2-wire 12 V RB Connector 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Grommet J 12 V Relay, PLC 24 V 5 V, 12 V Diagnostic indication (2-color) DIC 12 V -X Grommet 2-wire Water resistant (2-color) IC 5 V, 12 V 204-wire (NPN) With diagnostic output (2-color) 2-wire Magnetic field resistant (2-color) : Manufactured

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

) 3-wire (PNP) 5 V, 12 V CC IC Grommet 2-wire 12 V RB Connector 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Grommet J 12 V Relay, PLC 24 V 5 V, 12 V Diagnostic indication (2-color) DIC 12 V -X Grommet 2-wire Water resistant (2-color) IC 5 V, 12 V 204-wire (NPN) With diagnostic output (2-color) 2-wire Magnetic field resistant (2-color) : Manufactured upon