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The proof pressure is double the operating pressure range. -69No.LV50***-OMQ0002-G Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow[L/min] B Model Minimum Maximum A LFE1 0.5 20 Flow rate 0 Minimum rated flow Maximum rated flow LFE2 2.5 100 LFE3 5 200 Out of range -70No.LV50***-OMQ0002-G Dimensions Note) The electrical

Most sensitive position/Operatinq range incn (mm) i i . : i l i . . , : i r i r r i . r r i , , I i I i r I i i ] i : I I i I I i I I i . i D-H7A2 ( ) D-H7B ( + ) Solid slale swilch* ar ihlerchMgable with Ed 6wilches. D C7 lype D-HT lype I SERIES NCDJ2 D-C73c, D-C80C Band Mounted Reed Type Soecifications & ]J -v -rtF !F . Bponse time 1.zms .LeadwiE Oil pr@f vinyl, 63.4, 0.008 in.'?

Most sensitive position/Operatinq range incn (mm) i i . : i l i . . , : i r i r r i . r r i , , I i I i r I i i ] i : I I i I I i I I i . i D-H7A2 ( ) D-H7B ( + ) Solid slale swilch* ar ihlerchMgable with Ed 6wilches. D C7 lype D-HT lype I SERIES NCDJ2 D-C73c, D-C80C Band Mounted Reed Type Soecifications & ]J -v -rtF !F . Bponse time 1.zms .LeadwiE Oil pr@f vinyl, 63.4, 0.008 in.'?

R. Fittings & Tubing Air Cylinders Rotary Actuators Clean series 10 11 Relief type Vacuum suction type M9BW R Z 60 16 A R 2 J D C 10 B M9BW R Z 60 16 A R 2 J D C 21 B Bore size (mm) Number of auto switches Built-in magnet Cylinder stroke (mm) Nil Auto switch Nil No Nil S n 2 pcs. 1 pc. n pcs.

1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm

) Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 12 V Water resistant (2-color indication) 2-wire Y7BA Lead wire length symbols: Solid state switches

) Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 12 V Water resistant (2-color indication) 2-wire Y7BA Lead wire length symbols: Solid state switches

Symbol (B) 2 (A) 4 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Valve model Port size Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27

P R 63.8 (DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector

Oil proof heavy duty vinyl cord: 2.7, 0.5m D-F9N(V), D-F9P(V): 0.18mm x 3 cores (Brown, Black, Blue [Red, White, Black]) D-F9B(V): 0.15mm x 2 cores (Brown, Blue [Red, Black]) Note) Refer to page 7 for auto switch common specifications and lead wire length. Internal circuits Weights (g) D-F9N(V) D-F9N(V) D-F9P(V) D-F9B(V) Auto switch part no.

LAT Applicable Stroke Table*4 V: Standard Model Stroke [mm] LZ 200 300 400 500 600 700 800 900 1000 1200 1500 LEJS40 V V V V V V V V V V LEJS63 V V V V V V V V V V LC3F2 *4 Please consult with SMC for non-standard strokes as they are produced as special orders. For auto switches, refer to pages 142 to 144.

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17

V o/pa ~pa ::;; a. V~V ::;; Q) /-Y :; ~0 . 04 '// ~ / /,/ ~ 0.04 r<~ ~ V 80.02 Max.fIow line 0.3MPa 80.02 ---::'.'_. .. <:. --"i,, _ , .. " ... .::;::.. , 0 3000 6000 9000 12000 15000 Air flow rate Qlmin (ANR) rr ---:--~!'--.. -. .,.. -_---0.7MPa .:':: .,.' ..".'

S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type VQZ VZ VS For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] VFN Light/Surge voltage suppressor Electrical entry Nil R U Z For DC, AC Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 24 V, 12 V, 6 V, 5 V, 3 VDC/100

K39 5 V, 12 V Solid state auto switch 3-wire (NPN) 5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NA1 v v V v v IC circuit 3-wire (PNP) M9PA1 v v V v v 2-wire 12 V M9BA1 v v V v v 24 V Water-resistant (2-color indicator) Grommet With diagnostic output (2-color