REC

7 1 1 Head cover Aluminum alloy Rod seal B NBR White anodized w !8 1 1 Cylinder tube Aluminum alloy Piston seal NBR Hard anodized e !

VM

5 w !3 EA EA y A A P P r q B EB B EB !4 !7 !1 !2 t Componet Parts Aluminum alloy NBR Notes No. !1 !0 Description Material PBT ADC Material Notes No. q Description Piston guide B Valve Metallic plated Only external pilot style: ZDC Black zinc chromated Pilot body Body w e Stainless steel Return spring ZDC Head cover r Stainless steel Spool sleeve !2 !3 !4 Rubber Cushion !

7ND9071en

Comply with the requirements for FISCO field device Class I, Division 2, Groups A, B, C, and D; T4/ T5/T6 Ex ic IIC T4/T5/T6 Gc Class I, Zone 2 AEx ic IIC T4/T5/T6 Gc Ui 32 V, Ii 380 mA, Pi 5.32 W, Ci 5 nF, Li 10 H.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

Basic Type/Direct Mount Type

B Counter bore depth C T T Y HT HP P (Piping port) (Operating direction: A) L 0 -0.1 22 8 Note 1) TC X F 14 WP 19.5 12.5 D 30 13 WS GP GW 4 x LD PW QW Plug 12.5 P (Piping port) (Operating direction: B) 2 x 4 x MM Thread depth M Switch rail HR HS CR W K Plug G G Z + Stroke Q + Stroke CY3RG15 P (Piping port) (Operating direction: B) CY3RG25, 32, 40, 50, 63 Note 1) 50, 63: L 0 0.2 CY3RG10 B

Intrinsically Safe Valve

1/4 1/8 C6 (6 One-touch fitting) C8 (8 One-touch fitting) N7 (1/4" Onetouch fitting) N9 (5/16" Onetouch fitting) 1/4 C6 (6 One-touch fitting) C8 (8 One-touch fitting) N7 (1/4" Onetouch fitting) N9 (5/16" Onetouch fitting) C10 (10 Onetouch fitting) N11 (3/8" Onetouch fitting) Port size A, B port Manifold base weight W (g) n: Stations W = 100n + 151 W = 79n + 127 W = 61n + 101 Note 1) For

SV

is mounted) 7.5 B B B B 102.9 111.4 118 100.4 91.9 A A A A B A B A B A B A Dimensions are the ones for SV1300--.

I/O Configurator (NFC version)

R/W detected: NFC communication with the wireless unit is available. R/W undetected: NFC reader/writer is not identified or USB is not connected. Installation not performed: NFC reader/writer driver is not installed. R/W detection/ R/W no-detection button 5 Refer to Preparation befor use (2. Preparation befor use (page 7)).

4-channel Flow Monitor ( compatible)

W Line name 9th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". (0) 1 R/W Line name 1st letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 2 R/W Line name 2nd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 3 R/W Line name 3rd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 4 R/W Line name 4th letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot

JIS Standard Hydraulic Cylinder

W CX U NA T NB Related Products L K F S + Stroke MA ZZ + Q + l + Stroke B Width across flats G RR SS + Stroke A ZZ + Stroke D(mm) With rod boot Stroke range (mm) Bore size (mm) J e CX B C F GA GB NA NB P R S T CD RR SS L U W l f Q B-rod C-rod B-rod C-rod 32 21.5 15 52 M10 x 1.25 25 to 1400 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 38 22 12.5 40 52 12 15 52 M10 x 1.25 25 to 1400 65

CLQ

size M W T2 V 1 1.5 2 Eccentricity tolerance 0.5 Backlash Joints are not included with A type and B type mounting brackets.

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

CJ5-S

MQQ M Double Knuckle Joint Mounting Nut Rod End Nut RHC Knuckle pin and snap ring are packaged together. d d MM ND hole H10 Shaft d9 L MK(2) R1 RS Q G C C + 0.2 0 U1 + 0.2 0 NX A1 L1 RS H A 12 7 B H B H RZQ Material: Stainless steel 304 Material: Stainless steel 304 Material: Stainless steel 304 MI W S Part no. Applicable bore size (mm) L1 Part no. Applicable bore size (mm) 14 Part no.

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

MQQ

+ Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5 M4 x

CXT

D-F9W 12 A B W 16, 20, 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W A B 32, 40 D-A9 D-M9 D-F9W Auto switch model D-F9BAL Symbol A B W A B W A B W Standard Stroke 12 16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5

CQM

W 12 CUJ A B W CU 16/20/25 CQS CQM W A B CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RQ Hs 32/40/50 MU D(mm) -X D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type. 20Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5

CLK1

Hs B 16 14 14 26 29 (36) D-C73C 8.5 A D-H7C 8.5 A Hs B B Hs 14 36.7 38.2 D-G5NT D-B5, B6 B A Hs Hs B A 24.5 24.5 13 33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting Minimum strokes are as follows based on the space required for mounting auto switches.

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No