Precision Clean Regulator

60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Female thread One-Touch fitting Pad diameter (mm) M5 x 0.8 Rc(PT)1/8 4 tube 6 tube 8 tube 30 32 33 10 to 16 128 133 139 20 to 32 158 159 167 40, 50 (g) Additional Weight by Stroke Pad diameter (mm) Stroke (mm) 20 30 40 50 10 to 16 +10.5 +12.5 +22.5 +24 20 to 50 +37.5 +40 +66.5 6 Series ZPT ZPT 10/13/16 F J/K 10-B5-A10 (With Buffer/Female Thread) ZPT 20/25/32 F J/K 10-B01-A14 (With

Series KV2 Fittings

Part Number T (UNF) H1 (Hex) H2 (Hex) Thread NPT Wt.

CRBB-OM00004

Fig. 3-1 -9 d 1015 170 20 2030 100 15 40 86 10 -/()()/ -/// d 1015 110 10 2030 90 40 52 8 6 No. Auto Switch Mounting D-M9 External view and descriptions of auto switch unit For sizes 10, 15 For sizes 20 to 40 1. Auto switch mounting 1. Auto switch mounting Insert the auto switch into the groove of the switch holder. Insert the auto switch into the groove of the switch holder. 2.

High Power Cylinder Series RHC

metal Bushing 11 Relief valve assembly (rod side) 12 Relief valve assembly (head side) 13 Aluminum alloy Clear anodized Relief valve body retainer 14 20: M5 x 0.8 x 6 25, 32: M6 x 1 x 6 40: M8 x 1.25 x 8 Nickel plated Chromium molybdenum steel Hexagon socket head cap screw 15 Nickel plated 20, 25: M5 x 0.8 x 6 32, 40: M6 x 1 x 8 Chromium molybdenum steel Hexagon socket head set screw 16

LEF-OM006xx

LEFS 25 B 6N 1 20 0 1 DIN 1 6 16 25 25 I/O 32 32 40 40 1.5 m 1 1 3m 3 3m 3 5m 5 5 5m 40 16 25 32 40 16 25 32 ( ( DC24V NPN NPN A A LECP6/LECA6 6N 6N PNP PNP DC24V 6P 6P NPN NPN LECP1 1N * 1N * LECP1 PNP PNP 40 32 25 16 1P * 1P * 40 32 25 16 NPN NPN A A 10 mm 12 mm 16 mm 20mm AN * LECA6 AN * LECA6 PNP PNP B B 5 mm 6 mm 8 mm 10mm AP * AP * 100 mm 100 8m 8m 100 8 8 10m

Soft Start-up Valve AV2000/3000/4000/5000 1

31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

CC

40 28 100 27 1 115 62 180.5 124.9 CCVL02-lG-S 3/4 66 107 116 135 50 24 40 40 28 100 27 2 135 80 180.5 132.8 CCVLl1-lG-S M6 X 1 10.5 to 12.5 3/4 66 107 116 135 50 24 40 40 28 100 27 1 135 80 115 180.5 124.9 CCVLl2-lG-S 3/4 66 107 116 135 50 24 40 40 28 CCVLl3-lG-S 100 27 1 135 80 115 180.5 124.9 3/4 66 107 CCVLl0-S 116 50 40 28 100 27 135 80 115 *Pitch of mounting on the wall

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 : E4-l02 : E4-l03 : E4-l04 1 4 3 8 1 2 1 4 1 2 : E6-l06 : E6-l10 3 4 1 : E5-l04 : E5-l06 : E3-l02 : E3-l03 Adapter assembly (6) 3 8 3 4 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float style auto drain (Bowl assembly) IS1000-01 (Set at 0.4MPa) Compact pressure switch PT elbow (7) 135510 135613 Note 5) l in the gauge part number (e.g.

0.5

/AWG20 (4 pcs.), AWG28 (6 pcs.) Nominal cross section 0.54 mm2 (4 pcs.) 0.09 mm2 (6 pcs.) Outside diameter 0.96 mm2 (4 pcs.) 0.38 mm2 (6 pcs.)

Soft Start-up Valve AV2000/3000/4000/5000

ON OFF IN OUT R 7 Spacer L type bracket Spacer with L type bracket T type bracket Spacer with T type bracket Spacer with L type bracket Spacer with T type bracket T type bracket L type bracket L type bracket Spacer with L type bracket Applicable model T type bracket Spacer with T type bracket Applicable model Applicable model Model Y20T AV2000 B210T Y20L AV2000 AV2000 Y20 B210L Y30T AV3000

AC Servo Motor Driver (CC-Link Type)

Select 'MR-J3-T' through Model" "New" and "Project". -7- 1.

Air-hydro Unit

28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and

25

7 units 6 units 7 units 8 units 8 units 4 units 5 units 5 units 4 units 6 units 6 units 7 units 7 units 3 units Wiring/Piping Connectable number of ionizers (IZS42) with transition wiring (without external sensor) Warning 1.

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

CC

28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 RB Pitch of mounting on the wall

PFA/PFW

DC (+) 1 Flow direction OUT 2 2 DC () 3 OUT 1 4 6 Digital Flow Switch for Air Series PFA Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70% PFA30m-A Display unit Panel mount 3 x 7.2 ( = 21.6) 41.8 40.3 8-M3 40 6.4 4.3 1 2 3 4 SMC FLOW SWITCH 35.8 19.4 40 UNIT RESET SET 5 6 7 8 Panel cutout dimensions 36 + 0.5 0 + 0.5 0 36 The applicable panel thickness is 1 to 3.2mm PFA30m-B Display

ZMA

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.