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T-nuts (weight 10.0g) Dedicated communication cable (IBM PC/AT compatible computer) M Model LC1-1-RC M Model 17.5 LC1-1-N3 M3 x 0.5 Cable length 02 2m 04 4m 03 3m 05 5m LC1-1-N5 M5 x 0.8 18 7.5 PC Controller T-brackets Model LC1-1-L5 (weight 16.0g) Model LC1-1-L3 (weight 15.5g) Cable length: 2 to 5m M5 M3 17.5 17.5 11 Dedicated communication cable (D-Sub) (for NEC PC-98 Series) Model LC1-

Air inlet 22 C Draft air inlet F L 16 M Model IDFS6E IDFS8E Port size J A B C D E F G H K L M 315 380 260 470 540 85 130 350 325 440 297 330 Rc 3/4 560 530 470 540 325 260 85 130 Rc 3/4 297 315 330 440 IDFS11E 605 575 325 355 540 285 110 130 315 Rc 3/4 325 485 515 Note: The diagram above is drawn base on IDFS6E dimension with scale 1:6 6 Series IDUS/IDFS Option Specification Refer to pages

HA AT Model IDUS3E IDUS4E Port size A B C D H K J L M E F G 297 330 315 380 260 470 540 85 130 350 325 440 Rc 1/2 ID 85 130 Rc 1/2 440 260 560 540 297 330 315 470 325 530 IDUS6E 315 130 605 540 Rc 3/4 325 355 515 485 325 575 285 110 AMG Note: The diagram above is drawn base on IDUS3E dimension with scale 1:6.

Pi n assi gn of bus adapt or si de connect or I t em Pi n assi gn I t em Socket assi gn SLD SLD 4 4 3 D B D B CCLi nk I N CCLi nk O U T 3 2 5 D G D G D A 1 2 D A N . C.

U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

side OUT side Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 4, 5/32 2.5 6 11 37.5 2.5 6 11 37.5 6 3 6.5 11 36 3 6.5 11 36 6 3 6.5 11 38 3 6.5 11 38 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 1/4 6.5 6 11.5 40.5 6.5 6 11.5 40.5 710 Regulator/

Air inlet 22 C Draft air inlet F L 16 M Model IDFS6E IDFS8E Port size J A B C D E F G H K L M 315 380 260 470 540 85 130 350 325 440 297 330 Rc 3/4 560 530 470 540 325 260 85 130 Rc 3/4 297 315 330 440 IDFS11E 605 325 575 355 540 285 110 130 315 Rc 3/4 325 485 515 Note: The diagram above is drawn base on IDFS6E dimension with scale 1:6 6 Series IDUS/IDFS Option Specification Refer to pages

Parameter Default ( ) 6. 6. Clear Error Log -32No.EX-OML0010CN-C 4. Parameter Setting() 2. [4.Parameter Setting] Waring 1. 3. 4. 1. 34 2. 34 3. 35 4. 41 -33No.EX-OML0010CN-C 1. a) b) c) d) 2.

position single) SY3000-37-29A (For 2 position double, 3 position) Stations 04 4 stations Applicable blank plate ass'y: SYJ3000-21-3A (With dust cap) : : 12 12 stations P Port NPTF NPTF R Port Type 32P (4 Port/Base Mounted Type) Applicable valve: SYJ3 33 LOU SYJ3 33Y LOU 5 6 5 6 SS5YJ3--32P-07--M5T Applicable connector ass'y: SY3000-37-28A (For 2 position single) SY3000-37-29A (For 2

FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.

Auto switch model Bore size (mm) 40 50 63 80 100 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV D-A9l/A9lV CJ1 BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 CJP D-F5l/J59 D-F5lW/J59W D-F59F/F5NT D-A5l/A6l D-A59W BT-04 BT-04 BT-06 BT-08 BT-08 CJ2 JCM D-G39C/K39C D-A3lC/A44C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 CM2 D-Y59l/Y69l D-Y7P/Y7PV D-Y7lW/Y7lWV D-Y7BA D-Z7l/Z80 BA4-040 BA4-040 BA4

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. Example 3) Discharge rate 5l/min, when operating 8 h/D (for PA5000 automatically operated type) Maintenance Caution Discharge rate 5 0.100 50 (cycles/min) = = Cycles per minute Discharge per cycle 6.

) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () () ( 8 ) CE2 14.5mT CE2 15000 18cm 7-2 ()() A /B (CEU1CEU5 )0.1mm

d e. 6. f. g. ( ) h. i. 7. j. k. l. 2. 8. ,,, 9. 1. 10. 2. 11. 3. 1. 1. 0.11.0MPa 0.30.5MPa :060 2. 3 2. 1. 3. 5 2. 35% 1. ( 6 ) ()70% ()35% 2. 50% ( 6 ) 15% 3. 1. 4. () 0.5 3. 5. F.G. 4. 1. 1. 2. 2. 3. 1. 1. 2. 2 3. 2. 1.52 4. 5. 1. 1ISO VG32 1. 2. 1. 2. 3. 1. 2. 1. 2. 14.5mT CE2 3. 15,000 18cm 4. 3. 4. IP65 5.

(Normally open) B 4 VP 5 6 24 VDC 12 VDC Thread type VG Rc Nil G F 7 240 VAC, 50/60 Hz 9 Other VP NPT N Option NPTF T Electrical entry S070 G Grommet D DIN terminal Port size VQ 04 06 10 1 2 Rc T Conduit terminal E Grommet terminal 3 4 Rc Rc 1 VKF Light/Surge voltage suppressor VQZ Nil None S With surge voltage suppressor (Only grommet type is only available.)

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.