SYA3000/5000/7000

actuation Port size Flow characteristics Note 1) Mass Note 2) Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) (g) Cv b Cv C (dm3/ (sbar) ) C (dm3/(sbar) ) 69 (34) 71 (36) Single Double 2 position 0.30 1.0 0.24 1.1 0.30 0.26 0.28 0.18 0.85 0.30 0.77 M5 x 0.8 0.19 Closed center Exhaust center Pressure center SYA340-01 1 8 3 position 0.31 0.73 0.18 1.1 [0.55] 0.26 [0.52] 0.24 [0.16] 73 (38

5 Port Air Operated Valve SYA3000/5000/7000 Series

, EB port) 20.5 20.5 33 1472 5 Port Air Operated Valve SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Base Mounted 3 position closed center / exhaust center / pressure center SYA7 403 4 5 02 03 3/8, 1/4 (A, B port) 21 22.5 11.5 13.5 SYA SYA SYJA VZA VFA VFRA VPA4 SYJA VZA 71.1 18.6 57 42 61 2 x M5 x 0.8 (Pilot port) 4 VTA B A VGA PE 38 46 B A VPA Manual override P EB EA VPA3 2 x 4.3

Vacuum

734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 . Q6 ' oB Pad Diameters @10. a13. @16 Flat type Flat type Flat with rib Deep typezPRloD . l6D only Flat type Applicable Tube Male Thrcad/Weight List (sr) Flat type .

5 Port Air Operated Valve

(For mounting) (50) 2 x 5.5 (For mounting) 40.5 2 45.5 2 x 2 (Breathing hole) 17.8 (Breathing hole) 7.5 1 P P 1 7.5 7.5 M5 x 0.8, 1/8 [1(P) port] M5 x 0.8, 1/8 [1 (P) port] 12.9 10 2 x M4 x 0.7 thread depth 5 (For mounting) 10 12.5 12.5 2 x M4 x 0.7 thread depth5 (For mounting bracket) VFA1120-01(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38

SQ1000/2000

Dimension L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 104 Series SQ1000/2000 Manifold Options for SQ1000/SQ2000 Negative COM specifications The following valve part numbers are for negative COM specifications. Manifold part numbers are the same as standard.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) One-touch fitting 4 tube 6 tube 8 tubing 34 35 10 to 16 38 39 20 to 32 134 136 40, 50 Weight by Stroke (g) Pad dia.

ZR

ZR1 V K1 5 M Z Combination of vacuum valve and release valve Manual override With light/surge voltage suppressor Pilot valve Rated voltage Electrical entry 13-3-38 38 Series ZR Large Size Vacuum Module: Vacuum Pump System Vacuum Pressure Switch: ZSE2-0R-15 Specifications Vacuum pressure switch part no.

IIIIIII

(kg) 5.73(2.6) P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.1 38 (3.5) DIUENSIONS A B t c D E F G H J K M N P R 1.38 (35) ).s812.38 '25) 160.s 2.09 t53) 1.42 (36) 0.53 13.5', 0.7',!

Direct Solenoid

NotB that each sprlng cnlers ths spool by maans ol a NVS tto24 NVS4034 ws 4044 NVS 4054 114" Cv 1.47 38" Cv 2.39 'll2' 6t 3.78 3/,1'6.00 38' Cv 1.61 112' Cv 2.72 314' 6t 4.44 1'6.50 15 SERIES DIRECTIONALAIBVALVES DIRECT SOLENOI D OPERATED NVS NVS 4Osa 4a)54 HOWTO ORDER This model number is acoded numberwhich doscrlbs allavailable opiions. 4 .

Vacuum

734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 . Q6 ' oB Pad Diameters @10. a13. @16 Flat type Flat type Flat with rib Deep typezPRloD . l6D only Flat type Applicable Tube Male Thrcad/Weight List (sr) Flat type .

Speed Controller with One-touch Fittings

Model Metric size Inch size 4 stations 6 stations 8 stations 10 stations pcs. 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 Length 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 Hexagon nut Flat washer pcs. pcs.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Material Note 1 2 3 4 5 6 7 8 9 10 PBT Brass Electroless nickel plated Brass Electroless nickel plated Steel wire (1) HNBR NBR NBR Tool steel Note 1) AS1001F type: Stainless steel 589 Series AS1F-D Dimensions L4 D3 Applicable tubing O.D. d L3 D1 L2 M1 M1 L1 D2 Metric Size Inch Size Weight (g) Weight (g) 8 1/8" d 8.4 D1 D2 D3 38 L1 4.5 L2 26 L3 L4 M1 Model Model d 8.4 D1 D2 D3 38 L1 4.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Material Note 1 2 3 4 5 6 7 8 9 10 PBT Brass Electroless nickel plated Brass Electroless nickel plated Steel wire (1) HNBR NBR NBR Tool steel Note 1) AS1001F type: Stainless steel 741 AS1F-D Series Dimensions L4 D3 Applicable tubing O.D. d L3 D1 L2 M1 M1 L1 D2 Metric Size Inch Size Weight (g) Weight (g) 8 1/8" d 8.4 D1 D2 D3 38 L1 4.5 L2 26 L3 L4 M1 Model Model d 8.4 D1 D2 D3 38 L1 4.5

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

) AS33l1FG-03-12(S)A 12 18.5 42.5 28.3 57 17 38 (39) AS43l1FG-04-10(S)A 10 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 58 (57) AS43l1FG-04-12(S)A 12 18.5 21 26.2 48.3 (48.2) 28.3 63.4 17 62 (61) 11.2 12.9 16.6 20.2 36 21.4 50.1 3/8 19 42.3 40.7 37.1 35.5 ASR ASQ Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation Note

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

(S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FSG-02-06 (S) 6 1/4 17 (17.5) 13 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-08 (S) 8 13.2 22.7 33 14.2 AS321FSG-02-10 (S) 10 15.9 26.7 37 35.7 15.6 48 (49) AS321FSG-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FSG-03-06 (S) 6 1/4 19 16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38

CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 7 12 Air flow (l/min (ANR)) 38 Controlled flow CX 0.1 0.2 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C In-line Type RHC Air Flow/Effective Area MK(2) AS2001FM

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

effective depth 6 2 x M5 x 0.8 2 x 2 x 6.5 counterbore 5.5 M5 x 0.8 (Piping port) (Relief port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 2 x 3.5 through 32 0.5 15.5 25 6 Flat washer 5 10 4 4 3.5 27 + Stroke 15.5 30.5 + Stroke 25 16 17.5 5 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 (Piping port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 38

Low Profile Guide Type

Technical Data 1555 CY1F Series Auto Switch Mounting Proper Auto Switch Mounting Position (Detection at stroke end) D-A9, D-A9V (mm) Note 2) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range 9 B1 B2 B3 (mm) 10 15 25 38 60 18 80 38 80 10 39 66 19 86 39 86 11 44.5 95.5 24.5 115.5 44.5 115.5 D-M9, D-M9V, D-M9W, D-M9WV D-M9A, D-M9AV Mounting pattern q B1

Plug-in Unit

or less Closed center (A) 4 (B) 2 VQC2000 2.0 VQC2301 2.2 0.28 0.49 0.31 0.60 Rubber seal 34 or less 44 or less 2.0 VQC2400 2.6 0.15 0.46 0.15 0.60 Metal seal 29 or less 38 or less Exhaust center 110 1 (P) 5 (R1) 3 (R2) 2.0 VQC2401 3.2 0.28 0.49 0.30 0.80 Rubber seal 34 or less 44 or less 3 position closed center 2.4 VQC2500 2.0 0.17 0.57 0.18 0.46 Metal seal 29 or less 38 or less Pressure

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95