A modular style regulator with built-in pressure gauge, series ARG offers an optional, built-in backflow mechanism which enables reliable discharge of air pressure from outlet to inlet.  The mounting angle of the pressure gauge is selectable depending on the piping direction, and with the anti-revolving mechanism (PAT.PEND.), the pressure gauge will not be revolved even after the handle

A modular style regulator with built-in pressure gauge, series ARG offers an optional, built-in backflow mechanism which enables reliable discharge of air pressure from outlet to inlet.  The mounting angle of the pressure gauge is selectable depending on the piping direction, and with the anti-revolving mechanism (PAT.PEND.), the pressure gauge will not be revolved even after the handle

A modular style regulator with built-in pressure gauge, series ARG offers an optional, built-in backflow mechanism which enables reliable discharge of air pressure from outlet to inlet.  The mounting angle of the pressure gauge is selectable depending on the piping direction, and with the anti-revolving mechanism (PAT.PEND.), the pressure gauge will not be revolved even after the handle

A modular style regulator with built-in pressure gauge, series ARG offers an optional, built-in backflow mechanism which enables reliable discharge of air pressure from outlet to inlet.  The mounting angle of the pressure gauge is selectable depending on the piping direction, and with the anti-revolving mechanism (PAT.PEND.), the pressure gauge will not be revolved even after the handle

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

5

Trunnion pivot bracket TX TZ TO TO Z + 1/2 Stroke TY B 4 x TT TD TS TH TF TC B 2 x TR TA TL TU TU (mm) Part no.

Table of Contents

Color of lead wire Black Symbol Contact C Z I SE3 Common A White Normally Open B (N.C.)

Electric Actuators

B 89 A A B Section BB Coupling P.C.D.

Table of Contents

B 89 A A B Section BB Coupling P.C.D.

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 4-One-touch fitting 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting One-touch fitting [4 (A), 2 (B) port] Applicable tube

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

Smooth Cylinder/Low Speed Cylinder

REA REB REC CY CY CX MQ RHC RZQ D-X 1175 Smooth Cylinder Series CQ2Y 32, 40, 50, 63, 80, 100 How to Order B 32 30 D C Z CQ2Y B M9BW 32 30 D C Z CDQ2Y With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting style 2 pcs. 1 pc. n pcs.

Table of Contents

closed center: VFR630 -F(Z) 3 position exhaust center: VFR640 -F(Z) 3 position pressure center: VFR650 -F(Z) 0 1 0 1 0 1 2 position double: VFR620 -F(Z) 263 3-2.3 146 93 (Electrical entry) 45 117 A B A B 72 90 108 PE EA EB PE P Manual override 170 186 4-9 (Mounting hole) (Non-locking) G 1/2 Light/Surge voltage suppressor (For FZ) Other dimensions are the same as the single type. 3-5-97

Air Cylinder

CM2 A B Z 40 150 CDM2 With auto switch M9BW 150 A B 40 Z Port thread type Number of auto switches Rod end bracket With auto switch (Built-in magnet) Nil Rc TN NPT TF G Nil None V Single knuckle joint W Double knuckle joint Mounting Nil 2 pcs. S 1 pc. n n pcs.

Air Slide Table

72 42 60 30 36 B N x M5 x 0.8 F N 2 1 x F 29 3 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 0.5 M 7 ZZ Z J I 16.5 Pilot port 3 x M5 x 0.8 (Plug: Width across flats 7) +0.030 5H9 ( 0 ) depth 3 +0.030 5H9 ( 0 ) depth 3 +0.030 5H9 ( 0 ) depth 3 24 G H 24 G H HA 10.7 16.3 A 9.5 5.1 10 A 6 6 NN x M6 x 1 thread depth 9 HB GB GB HB B stroke: 50 mm B stroke: 20 to 40 mm Cross-sectional

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S

CV/MVGQ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S 128 [129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 84 72 60 52.5 M8 x

Table of Contents

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

1

CJ1 Series CJ2 CJP C port A port B port JIS Symbol Function CJ2 Bore size (mm) 10 Z SB SA (B) When air pressure is supplied to the port (B), both A and B stokes extend. 112.5 53.5 31 CM2 SB + Stroke B SA + Stroke A Z + Stroke (A + B) 16 114 54.5 31.5 B stroke A stroke CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside