High Vacuum Angle Valve, XL Series XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
Refer to "List of output modes" on page 23) Normal output NPN (open collector) (output) The switch that uses the NPN transistor for output. O Output configuration The operation principle of the switch output. Refer to "List of output modes" on page 23 for the operation status. Output mode Either hysteresis mode can be selected.
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
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M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable
EXH port EXH port VF 000 75 A 2 3 Series Thread type Nil F N T Rc Symbol 3 5 Series Port size VFA3000 1/8 G VFA5000 1/4 NPT NPTF 1520 VFA3000/5000 Series 5 Port Air Operated Valve Base Mounted/Manifold Dimensions: VFA3000 Series Type 40: VV5FA3-40-2-02: Common exhaust L2 L1 19 6 SYA 13 4 x 5.5 (For mounting) 0.5 SYJA 49 33 40.5 33 33 R P R R P R 23 23 97 VZA 81 24 66 VFA VFA 1/4 [1 (P), 5
Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.
Weight (g) D-F59 D-F5P D-J59 Auto switch model 0.5 m (Nil) 23 21 3 m (L) Lead wire length 81 71 5 m (Z) 127 111 Dimensions (mm) D-F59/D-F5P/D-J59 Mounting hole Indicator light DDMost sensitive position 1589 A Solid State Auto Switch Tie-rod Mounting Style D-G39C/D-K39C RoHS Refer to SMC website for the details of the products conforming to the international standards.
) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5 38 43.5 50.5 59 69.5 Hs 24.5 27 30.5 35 40.5 47.5 20 25 32 40 50 63 80 100 Note 1) Values in parentheses are for the long stroke type.
(mm) Model Conversion Cv 1.2 1.3 1.5 3.9 5.0 4.5 5.8 7.0 11 9.1 15 17 23 17 23 26 34 30 40 41 62 41 66 49 70 73 100 Threaded Note) Flange Kv VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 1.1 1.1 1.3 3.4 4.3 3.9 5.0
Description Material Note 12 Fluorine coated Valve spring 1 14 15 16 Insert bushing Nut Collar New PFA New PFA New PFA 13 Fluorine coated Valve spring 2 883 SRF Series Dimensions/SRF10 Integrated fittings 23 Pilot port Rc, NPT 1/8 12 R 54 32 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 IN OUT 26 32 5.5 (81) HEX.18 With nut 23 Pilot port Rc, NPT 1/8 12 R 48 32 40 1 2 SMC 4 x 3.5 (Mounting hole
Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RQ General Purpose Type P. 7-9-10 Band, Rail, Tie-rod, Direct Mounting 2-color Indication Type P. 7-9-15 Band, Rail, Tie-rod Mounting MU D-X 20Data P. 7-9-16 Solid State Switches General Purpose Type P. 7-9-17 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 7-9-23
K 2 x 4-M6 x 1.0 effective depth 10 A + Stroke M W Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Basic Style A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5 17 M6 x 1.0 10 5 28 23
27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX IN OUT DTheoretical Output (N) -X Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.3 0.2 20OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 Data 79 68 57 45 34 23 OUT 113 12 6 60 51 43
Horizontal mounting Downward mounting 83 27 94 27 26 32 Center bracket/IZS31-BM Reduced-wiring Fieldbus System 40 15 23 14 3 5.4 18 24 39 Static Neutralization Equipment M5 screw for mounting 2 Ionizer 27 100 Alphabetical Index Length Measuring/ Counter Angle adjustable Ionizer full length (L) Note) Number of center brackets included in a model with brackets.
Parallel I/O Connector I/O 1 Wiring example NPN JXC73 PNP JXC83 24 VDC Load 24 VDC Load OUT0 10 OUT0 10 1 1 +COM1 +COM1 OUT1 30 OUT1 30 Load Load 21 21 +COM2 +COM2 OUT2 11 OUT2 11 Load Load 2 2 IN0 IN0 OUT3 31 OUT3 31 Load Load 22 22 IN1 IN1 OUT4 12 OUT4 12 Load Load 3 3 IN2 IN2 OUT5 32 OUT5 32 Load Load OUT6 13 OUT6 13 Load Load 23 23 IN3 IN3 OUT7 33 OUT7 33 Load Load 4 4 IN4 IN4 OUT8 14
3/8 1/2 1/4 3/8 1/2 3/8 1/2 12.5 15.9 12.5 15.9 13.6 17 15.8 19.2 19.6 20.9 21.3 24.5 20.9 21.3 24.5 20.9 21.3 24.5 20.9 21.3 24.5 24 27.2 13.8 15.6 13.8 15.6 16 17.8 20.4 10 14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23
Model Plug side only DMK6P-23 DMK6P-04 DMK12P-23 DMK12P-04 Multi-connector DMK6-23 DMK6-04 DMK12-23 DMK12-04 Socket side only DMK6S-23 DMK6S-04 DMK12S-23 DMK12S-04 Cover Clamp ring 6 DMK-C-6 DMK6-P01 12 DMK-C-12 DMK12-P01 Specifications Applicable tubing materials Applicable tubing O.D.