CE2

0 !1 !2 !3 !4 !5 !6 !7 !8 !

Industrial Filters

FGC FGC FGF How to Order Elements FGH B 200 E N 005 FQ1 Element symbol Seal material/Operating temperature range FN Seal material Operating temperature range (C) Symbol Symbol Element material EB ES A Note) Element material Bronze Stainless steel 316 0 to 150 0 to 120 0 to 80 0 to 120 Non-asbestos Fluororesin NBR FKM T N V B S Symbol Element size Note) Not possible with bronze elements.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

bumper Shock absorber (option, not available on MXP6) None (with metal stopper) Non-lube Standard equipment (MXP6 adjustable on one side only) Cushion Lubrication Stroke adjuster MXP12 One side only, 0 to 5mm Both ends, 0 to 3mm each Both ends, 0 to 5mm each Both ends, 0 to 4mm each Rubber stopper Stroke adjustment range Shock absorber One side only, 0 to 6mm Both ends, 0 to 5mm each Metal

Title not found

Inch Cubic Foot 0 1x10 3 1x10 6 2.642x10 2 6.102x10 4 35.314 0 1 1x10 -3 1 0 1x10 3 2.642x10 -1 61.024 0 3.531x10 -2 1x10 -6 1x10 -3 1 0 2.642x10 -4 6.102x10 2 3.531x10 -5 4.546x10 -3 4.546 0 4.546x10 3 1.200 0 2.774x10 2 1.605x10 -1 3.785x10 -3 3.785 0 3.785x10 3 1 0 2.310x10 2 1.337x10 -1 1.639x10 -5 1.639x10 -2 16.387 0 4.329x10 -3 1 0 5.787x10 -4 2.832x10 -2 28.317 0 2.832x10 4 7.481

Title not found

Inch Cubic Foot 0 1x10 3 1x10 6 2.642x10 2 6.102x10 4 35.314 0 1 1x10 -3 1 0 1x10 3 2.642x10 -1 61.024 0 3.531x10 -2 1x10 -6 1x10 -3 1 0 2.642x10 -4 6.102x10 2 3.531x10 -5 4.546x10 -3 4.546 0 4.546x10 3 1.200 0 2.774x10 2 1.605x10 -1 3.785x10 -3 3.785 0 3.785x10 3 1 0 2.310x10 2 1.337x10 -1 1.639x10 -5 1.639x10 -2 16.387 0 4.329x10 -3 1 0 5.787x10 -4 2.832x10 -2 28.317 0 2.832x10 4 7.481

tTV2000/3000

2tvPa Series lTV301tr Hysteresis Repeatability Linearity 0 1 0 0 0 9 o 0 5 s i 0 5 r s 0 0 8 I a9 d 0 0 7 I ooo E o o E 0 0 : fr I 0 0 5 o 3 o 0 4 I 4 0 0 3 E oo, o !

240

20 40 60 80 100 0 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph x Maximum Speed 300 mm/s or Less 10 Selection Example (Vertical Mounting) 1.

EX500-GPR1A.eng

Address setting switches 1, 2 and 3 ( SW1, SW2 and SW3 ) OFF N.C ON OFF ON With bus terminator Without bus terminator Without bus terminator OFF OFF ON OFF OFF ON OFF OFF ON SW3 1 1 2 100 10 SW3 SW2 0 1 2 9 8 7 6 SW2 3 4 5 0 1 2 0...9 SW1 0...9 9 8 7 6 SW1 3 4 5 0 1 2 1 Common to EX500-S 01/EX500-Q 20 21 Note1: For wiring method, refer to subsection "Wiring" ( page 10 ) of section "EX500"

Serial Network

(U, D)-SCS1 EX124 (U, D)-SCS2 EX140-SCS1 EX140-SCS2 EX120/121/122-STA1 EX123(U, D)-STA1 IN313-TA1 N N Y Y 16 8 16 8 16 8 16 16 16 16 8 16 8 0 0 0 0 0 0 0 0 0 0 0 0 0 VQ, SX, SY & SV VQ2000/4000/5000 CompoBus/S OMRON N N N Y SQ1000/2000, SZ3000/5000 VQ, SX, SY & SV VQ2000/4000/5000 (N)VFR/S, (N)VZS, ISO SYSBUS N EX120/121/122-SSL1 N VQ, SX, SY & SV EX120/121/122-SSL2 N S-Link SUNX EX123 (

VM

SA 1 0 2.5 mm (Option) 4.8 mm Basic only.

CL

0 !1 !2 !3 !4 !5 !6 !7 No.

53

20 s Max.

CS1

0 !1 !2 !3 !4 !5 !6 !7 !8 !

MK

Model Ah9 0 0.052 0 0.052 0 0.062 21 28 35 50 63 MK2l32-llF MK2l40-llF MK2l -llF Through hole & both ends tapped (standard) Model J H K L C D E F G lA B S T I M O P Q R U V X Yh9 Z N 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 0 0.62 0 0.62 0 0.62 0 0.62 MK2B32 MK2B40 MK2B50 MK2B63 34 40 50 60 54 61 73 86 5.5 5.5 6.6 9 31.5 35 41 9 Depth 7 9 Depth 7 45 52 64 77 60 69 86 103 Rc(PT)1/8 12 12 15 15 30 30

100

ANR)] 200 100 400 300 600 500 700 0 Time to Reach Vacuum (Representative value) ZL1 Series ZL3/ZL6 Series ZL3m ZL6m (Tank capacity: 1 L) (Tank capacity: 1 L) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure in tank [kPa] Vacuum pressure in tank [kPa] ZL6H ZL6M ZL3H ZL3M Time to reach vacuum [S] 1 2 3 4 5 6 0 Time to reach vacuum [S] 1 2 3 4 5 6 7 8 9 10 0

MHK2

positions) Adjustment needle for finger speed MHT 13.6 S 0 13 13 4 MHY 8 0 0.05 4 7 Note) For single acting, one port is used as a breather port. 7 MHW 18 2.3 M5 x 0.8 (Finger opening port) MRHQ Misc.

MHK2

(Mounting hole) 0 0.1 8 Open 34 +1.2 0 5 13.5 16 0.02 70 68 46 30 32 0 0.2 32 Closed 16 4H9 depth 4 +0.030 0 18 44.5 20 27.6 0.05 73.5 Auto Switch Mounting Groove Dimensions 100 4-M4 x 0.7 (Thread for mounting attachment) M5 x 0.8 (Finger closing port) Auto switch mounting groove (2 positions) Adjustment needle for finger speed 3 15 S O 15 4 10 0 0.05 5 9 7.5 Note) For single acting, one

4-channel Flow Monitor ( compatible)

16 L/min 0.016 0 L/min 40 L/min 0.04 0 100 L/min 0.1 0 250 L/min 0.25 0 4 L/min 0.001057 0 PF2W5 16 L/min 0.004225 0 gal/min 40 L/min 0.01057 0 100 L/min 0.02642 0 250 L/min 0.066 0 oC 100 oC 0.1 0 oF 212 oF 0.18 32 10 L/min 0.01 0 50 L/min 0.5 0 L/min 100 L/min 0.1 0 200 L/min 0.2 0 500 L/min 0.5 0 PF2A5 10 L/min 0.000353 0 50 L/min 0.001766 0 cfm 100 L/min 0.003531 0 200 L/min 0.00706 0

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA3 MSUA3-S, SE Scale: 70% 8-M4 x 0.7 depth 7 C 58 B 36 44 27 30 4-M4 x 0.7 depth 5.5 22.5 5 +0.025 0 41h9 0 0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (positioning pin hole) 22.5 29 2.5 3 +0.025 0 3-3H9 depth 3 ( A , B , C ) 2-4.5 through 3-R1.5 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2-4.5 through 3-R1.5 6 2-M5 x 0.8

Wedge Cam Operation Gripper Series MHK2

positions) S O 3 20 4 16 12 0 -0.05 6 12 8 Note) When single acting, other port is used as bleed port. 23 M5 X 0.8 (Finger opening port) 2.3 MHKL2-25 /Long stroke model 4H9 4 deep +0.030 0 22 26H9 1.5 deep +0.052 0 2-M6 X 1 thread 12 deep 30 2-M6 X 1 thread 10 deep 5 17.5 20 0.02 4-M6 X 1 12 deep Bottom hole dia. 5.1 through-hole 0 -0.1 10 Open 41 +1.2 0 81.6 40 84 56 36 0 -0.2 22 4H9 4