VM Model Ah9 0 0.052 0 0.052 0 0.062 21 28 35 50 63 MK2l32-llF MK2l40-llF MK2l -llF Through hole & both ends tapped (standard) Model J H K L C D E F G lA B S T I M O P Q R U V X Yh9 Z N 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 0 0.62 0 0.62 0 0.62 0 0.62 MK2B32 MK2B40 MK2B50 MK2B63 34 40 50 60 54 61 73 86 5.5 5.5 6.6 9 31.5 35 41 9 Depth 7 9 Depth 7 45 52 64 77 60 69 86 103 Rc(PT)1/8 12 12 15 15 30 30
ANR)] 200 100 400 300 600 500 700 0 Time to Reach Vacuum (Representative value) ZL1 Series ZL3/ZL6 Series ZL3m ZL6m (Tank capacity: 1 L) (Tank capacity: 1 L) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure in tank [kPa] Vacuum pressure in tank [kPa] ZL6H ZL6M ZL3H ZL3M Time to reach vacuum [S] 1 2 3 4 5 6 0 Time to reach vacuum [S] 1 2 3 4 5 6 7 8 9 10 0
positions) Adjustment needle for finger speed MHT 13.6 S 0 13 13 4 MHY 8 0 0.05 4 7 Note) For single acting, one port is used as a breather port. 7 MHW 18 2.3 M5 x 0.8 (Finger opening port) MRHQ Misc.
(Mounting hole) 0 0.1 8 Open 34 +1.2 0 5 13.5 16 0.02 70 68 46 30 32 0 0.2 32 Closed 16 4H9 depth 4 +0.030 0 18 44.5 20 27.6 0.05 73.5 Auto Switch Mounting Groove Dimensions 100 4-M4 x 0.7 (Thread for mounting attachment) M5 x 0.8 (Finger closing port) Auto switch mounting groove (2 positions) Adjustment needle for finger speed 3 15 S O 15 4 10 0 0.05 5 9 7.5 Note) For single acting, one
16 L/min 0.016 0 L/min 40 L/min 0.04 0 100 L/min 0.1 0 250 L/min 0.25 0 4 L/min 0.001057 0 PF2W5 16 L/min 0.004225 0 gal/min 40 L/min 0.01057 0 100 L/min 0.02642 0 250 L/min 0.066 0 oC 100 oC 0.1 0 oF 212 oF 0.18 32 10 L/min 0.01 0 50 L/min 0.5 0 L/min 100 L/min 0.1 0 200 L/min 0.2 0 500 L/min 0.5 0 PF2A5 10 L/min 0.000353 0 50 L/min 0.001766 0 cfm 100 L/min 0.003531 0 200 L/min 0.00706 0
Dimensions (mm) 1in = 25.4mm MSUA3 MSUA3-S, SE Scale: 70% 8-M4 x 0.7 depth 7 C 58 B 36 44 27 30 4-M4 x 0.7 depth 5.5 22.5 5 +0.025 0 41h9 0 0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (positioning pin hole) 22.5 29 2.5 3 +0.025 0 3-3H9 depth 3 ( A , B , C ) 2-4.5 through 3-R1.5 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2-4.5 through 3-R1.5 6 2-M5 x 0.8
positions) S O 3 20 4 16 12 0 -0.05 6 12 8 Note) When single acting, other port is used as bleed port. 23 M5 X 0.8 (Finger opening port) 2.3 MHKL2-25 /Long stroke model 4H9 4 deep +0.030 0 22 26H9 1.5 deep +0.052 0 2-M6 X 1 thread 12 deep 30 2-M6 X 1 thread 10 deep 5 17.5 20 0.02 4-M6 X 1 12 deep Bottom hole dia. 5.1 through-hole 0 -0.1 10 Open 41 +1.2 0 81.6 40 84 56 36 0 -0.2 22 4H9 4
+0.1 A NA B 0 0.3 S + Stroke H U CZ 0 0.3 Z + Stroke R ZZ + Stroke (mm) * A clevis pin and retaining rings are included.
4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.f s | ) ,-Js!jr L , 3 smms { l'.;+_2. ( ) ( L--!9!!" zz r +r 3sd5{fj:3'?L i 3 idb61f-1:-_r: ( ' tl co 22 l+) tL-Lg!!"r5 L+' tL-l-s!"
4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.f s | ) ,-Js!jr L , 3 smms { l'.;+_2. ( ) ( L--!9!!" zz r +r 3sd5{fj:3'?L i 3 idb61f-1:-_r: ( ' tl co 22 l+) tL-Lg!!"r5 L+' tL-l-s!"
steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination
0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] Pmax Qmax 10 Pmax 2 (P1 Q1 ) 3 Qmax 0 37 - No.ZQ-OM01401-B 11.2 () ZQ000A 11.3 -100 -80 [kPa] -60 -40 -20 0 (V 6 ) 0 5 10 15 20 [L/min (AMR) ] ZQA (PD)() ZQ000A (PD) 100 80 [L/min(ANR)] 70 [L/min(ANR)] 0.5MPa 0.5MPa 80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD)()
Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14
6 A @1 @0 !9 !0 #2 $0 A' For ball bushing #5 @5 #0 @8 @6 !7 !0 @1 !3 #8 !2 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.
+ Stroke Relief port With air cushion Cushion valve (Width across flats WH) WA GA RA Relief port M5 x 0.8 WB 20 10 S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5
Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at