CLS

W FA AL C B A K F N N M TT S + Stroke H BY TX TZ ZZ + Stroke BW With rod boot 180, 200, 250 Z1+ l + 1/2 stroke BV BZ BG BE e 4-MA Effective thread depth MB (To attach eyebolt) f l 15 h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200 250 14 14 14 17 17 20 15 15 17 20 20 25 31 31

energy saving effect

temperature 32C 25 25 Ambient temperature 43C Cooling capacity [kW] Cooling capacity [kW] 24 20 20 Facility water temperature 40C 15 15 Ambient temperature 45C 10 10 5 5 5 10 15 20 25 30 35 0 5 10 15 20 25 30 35 0 Circulating fluid temperature [C] Circulating fluid temperature [C] 170 Thermo-chiller Inverter Type HRSH Series If the product is used at altitude of 1000 m or higher, refer

2/3 Port Valve

e, r are for selection of valve composition.

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

Air Fittings & Tubing

H w H w H e e H H r 2.2-2 Series KJ Male connector: KJH Thread (T) UNF NPT 10-32UNF <10-32UNF> <10-32UNF> Tube O.D. (inch) H (Hex.) Min. hole dia.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

L dimension 223 235.5 248 260.5 273 285.5 298 310.5 323 335.5 Weight (g) 56.4 59.6 62.7 65.9 69.1 72.2 75.4 78.6 81.7 84.9 20 21 22 23 24 25 26 27 28 29 No.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

RSQ

W I T 25 24 14 U 10 (11) 20 (22) 4-N through 8-O counterbore 28 100 + Stroke A + 2 stroke B + Stroke E M 0.2 Built-in One-touch fittings Tubing O.D.

SYJ3000/5000/7000

21 25 21 Pg7 28 25 28 25 28 Applicable cable O.D. 3.5 to 7 28 Refer to page 1-5-79 for dimentions with connector cable. 1-5-56 57 5 Port Solenoid Valve Rubber Seal Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 3 4 5 G H C6, N7 C8, N9 Grommet (G), (H): SYJ7 20-01 Built-in One-touch fitting: SYJ7 20G: Approx. 300 H: Approx. 600 (Lead wire length)

High Power Cylinder Series RHC

8-J GA WH ND H1 MM I D E E Effective thread K FA JC JC FB A NF C H S + Stroke B ZZ + Stroke (mm) H GA 80 FB 16 FA 10 EA 23 D 62 C 20 B 53 A E 0 Bore size (mm) Stroke range (mm) Effective thread length 50 70 35 32 250 to 1000 50-0.042 0 80 16 10 23 58 20 60 80 35 32 250 to 1000 63 55-0.074 0 90 20 10 23 61 25 75 95 40 37 250 to 1000 80 65-0.074 0 95 20 10 25 63 30 90 116 40 37 250 to 1000

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

MVGQ

J MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions DSymbol A E Symbol Bore size (mm) 40 A DB E DB Bore size (mm) Stroke Up to 50 st Over 50 st Up to 50 st Over 50 st -X 40 54 90 0 36 16 71.5 20 17.5 50 50 60 102 4 46 20 81 25 25 2063 63 61 102 0 41 20 81 25 20 Data 10-16-13 14 Valve Mounted Guide Cylinder Series MVGQ 80, 100 How to Order How to Order

modular-press-e

-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] AD37 AD38 Square embedded type Note 3) GC3-10AS GC3P-010AS 0.02 to 0.2 MPa setting GC3-2AS GC3P-010AS NPN output/Wiring bottom entry ISE35-N-25-MLA ISE35-N-25-M t ISE35-R-25-MLA ISE35-R-25-M NPN output/Wiring

Modular F.R.L. Pressure Control Equipment

-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] AD37 AD38 Square embedded type Note 3) GC3-10AS GC3P-010AS 0.02 to 0.2 MPa setting GC3-2AS GC3P-010AS NPN output/Wiring bottom entry ISE35-N-25-MLA ISE35-N-25-M t ISE35-R-25-MLA ISE35-R-25-M NPN output/Wiring

VM

C D E F G J K 15 2(A) 4 1(P) 4 VHK R-04F-04F 14.4 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHK R-06F-06F 16 6 6 16.8 VHK R-08F-08F 17 8 8 19.2 VHK R-10F-10F 29 10 10 23.3 VHK R-12F-12F 32 25.7 12 12 Flame Resistant Type: 1(P)/2(A): Male Thread Reference dimensions after

JXCx-OMU0004

P.50 6 * 8 e PLC PLC 9.

VQC

Refer to e.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.