3

2 q w e r t y !1 !0 o i u Component Parts No.

HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Thermo-chiller

Right Left Rear Front w q Parts List e Part no. Applicable model No.

EXxx-OMV0017-D

Select (d) [Pairing mode] from (c) [Remote registration] on the (a) [Properties] tab and then click (e) [Reset module]. Base setting screen (e) (b) (a) (c) (d) A Base unit that supports CC-Link (EXW1-BMJA#) will change to pairing mode using the protocol set in "System setting".

CL

MNB CNA Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range. (The lock-up cylinder can operate at 50 to 200 mm/s.)

VZ100/300/500

port R port P , E port R port Electrical entry Note) VZ52R is for manifold only.

Multistage Ejector Series ZL112/212 1

P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting 6 Vacuum port One-touch fitting 12 2-5.4 Mounting hole Label EJECTOR MULTISTAGE 59.5 59 56 8.5 30 Section A/ With Digital Vacuum Pressure Switch 4.5 166 175 36 ZL112-E (ZSE4) ZL112-EB (ZSE4B) ZL112-EE (ZSE4E) 28 (2) (1.6) 4-M4 x 0.7 Thread depth 8 (Mounting hole) 59 85 13-7-8 9 Multistage Ejector

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

SFOD-OMT0005CN

<> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (01-194) Over current E <> -66- <> <> I sent ALM (1-195) E <> (01-196) E <> <>EEPROM (01-197) E <> (EEPROM 10 ) <>CPU (CPU ) CPU (01-198) CPU E <> *1 (code)-3 Byte16-19 10 -67- 16/ A () (50mm ) () ( ) 5m 5m 10%(15m 20%) -68- 17/ 17.1.

LECA6_C

ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A () (50mm ) () () 5m 5m 10% 15m 20% 53 - 14 / 141.

Clean Air Module

AME Digital flow switch AMF Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Filter Restrictor Regulator ZFC SF SFD LLB LLB AD GD Nominal filtration rating: 0.01 m Nominal filtration rating: 0.01 m (Filtration

Lightweight and Compact

Description w q DI filter vessel (resin) w Mounting bracket Circulating fluid return port e DI filter inlet tube !0q r DI filter outlet tube t Tapping screw (4 pcs.) u y Mounting screw (4 pcs.) Circulating fluid outlet To circulating fluid outlet u DI control piping assembly e i DI sensor assembly o Nipple (2 pcs.) o !

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 E: Angle adjustment range 5 E: Angle adjustment range 5 B port Angle adjustment screw A port Clockwise rotation 0 8 0 e Allowable Lateral Load to the Piston Rod End gl 10 n a e nt gl e an m st t en u dj m a m st u ju m i in ad M Using friction fittings makes it easier to mount the load to the piston rod end.

Wireless System

supply field wireable connector (7/8 inch) q End Plate Bracket e Reinforcing Brace This bracket is used for the end plate of DIN rail mounting.

LECP6_C

ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A 50mm () () 5m 5m 10% 15m 20% 53 - 14 / 14.1 LE () EMG 1000 1 54 - /Best Pneumatics No UL UL1310 Class2 14.2 55 - 14.3 90~100 DC24VSVON a) b) c) d) e) 56 - D (100 ) 14.4 1. 2. 3. 4. 5. 6. 7. 8. /-10603585% 57 - 14.5 5 14.6

4-channel Flow Monitor ( compatible)

Remarks Power supply/output cable ZS-26-L Length 2 m For PF2A5##, PF2W5##, PF3W5## Connector for sensor lead wire (e-con) ZS-28-CA-4 1 pc., Finished outside diameter: 1.15 to 1.35 Cover colour: Blue For PF2D5## Connector for sensor lead wire (e-con) ZS-28-CA-2 1 pc., Finished outside diameter: 0.9 to 1.0 Cover colour: Red Panel mount adapter ZS-26-B With set screw M3 x 8L (2 pcs.) and waterproof

Vacuum Filter AFJ Series

[kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.

IR1000/2000/3000

IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.

HRX-OM-W032

*1: To use the power of the device, the total load current must be 500 mA or less.