New

Maximum operating pressure differential Weight Note) Flow-rate characteristics Port size Size Orifice diameter (g) Model Av x 106 m2 psi MPa inch mm Conversion Cv Port size 1/8 Port size 1/4 Port size 3/8 3/64 1.2 1.4 0.06 210 1.5 1 VXN13 1/8 3/32 2.4 5.0 0.21 140 1.0 290 1/8 3.2 8.4 0.35 85 0.6 3/32 2.4 5.0 0.21 430 3.0 430 1/8 3.2 8.4 0.35 180 1.2 2 VXN23 1/8, 1/4, 3/8 430 460 5/32 4

Vacuum Unit

and PD port dimensions1, 4 For high-noise reduction silencer exhaust 37.4 38 36 8.4 B 26.4 D 2 x Common exhaust (EXH) port2 10.5 33 15 3.5 33.8 n x Vacuum (V) port (Built-in suction filter) n x Individual exhaust (EXH) port3 (n1) x 15 C [mm] Stations 1 2 3 4 5 6 7 8 9 10 Port type A Hexagon width across flats B C D L1 30 45 60 75 90 105 120 135 150 165 L2 45 60 75 90 105 120 135 150 165 180

MY2

NT NH PE PD LB NW C LW NV LD T-slot for body mounting NC MY2H40G LE H7 depth R GB Cushion needle 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180

AFF

N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to 125 kW 150A 150 kW 220A 180

Air Tank Series AT 1

180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

Compact Cylinder with Air Cushion

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 2 Series RQ Weights Basic weights Additional weights Unit: g Unit: g Bore size (mm) Magnet Double end tapped Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 40 13 6 27 17 155 214 198 196 20 5 6 4 159 143 137 92 50 14 6 53 32 243 373 348 393

RSH

RSQ/RSG Stopper RSH CE1 CE2 wChange of stopping direction and piping position ML2B Stopping direction and piping position can be changed in 90 increments. (20 : 180) ML1C P20 Loosen the set screw (M3) located on the side of rod cover and pull out guide rod out of cover. Rotation of lever section is free and possible to reverse 180.

RSH/RS1H

How to change the positional relationship between the transfer and piping directions The positional relationship between the transfer and piping directions can be changed in 90 increments (or 180 increments in case of 20). 20 Loosen the fixing screw (M3) beside the rod cover and pull up the guide rod.

MVGQ

The valve orientation can also be changed 180. Refer to Fig. (5), which shows the relationship between the selector plate and the installed orientation of the valve. When the speed controller that is located on the side of the selector plates () direction is in the meter-out mode, the speed controller controls the speed on the extension side.

Table of Contents

Series CQ2 Compact Cylinder: Large Bore Size Type Double Acting, Single Rod 125, 140, 160, 180, 200. How to Order . Precautions. Specifications. Construction. Dimensions . Series CQ2W Compact Cylinder: Large Bore Size Type Double Acting, Double Rod 125, 140, 160, 180, 200 . How to Order . Precautions. Specifications. Construction. Dimensions .

RQ

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 7-7-5 5 Series RQ Weight Basic Weight Additional Weight (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196 50 14 6 53 32 243 373 348 393

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB2 -032 BMB2 -040 BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 MDB 8-30-57 58 Technical Data 2: How to Mount and Move the Auto Switch Mounting

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB2 -032 BMB2 -040 BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 MDB 8-30-57 58 Technical Data 2: How to Mount and Move the Auto Switch Mounting

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Cushion needle 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 1 1 SS XX SS RR NE QQ PP H UU TT RW PH G A N UU VV T-slot for body mounting Z + Stroke (mm) LB 72.4 108.7 135.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 MW 64.6 97.5 121.5 C 3.3 5.4 8.6 M 7 9 13 B 6.5 9.5 14 L 80 110.8 180

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Not in compliance with UL standards Flow Rate Characteristics Applicable Fluid Checklist Flow rate characteristics*1 Max. operating differential [MPa] Model Weight*2 [g] Air Water, Oil C b Cv Kv Conversion Cv Stainless steel body*3 Brass body 10 1/8 2.4 0.62 0.45 0.15 0.13 0.15 0.9 JSX11U-S Cm201 180 180 Applicable fluid Seal material NBR FKM EPDM Air V V V Water V V V Oil V Orifice diameter

Thermo-con/Rack Mount Type

242 279 379 429 64 0 201 180 180 145 130 105 27 0 0 Facility water outlet Rc3/8 Circulating fluid inlet Rc3/8 Label Circulating fluid outlet Rc3/8 Facility water inlet Rc3/8 1.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

unit EX600 Serial wiring with input/output unit EX120 Dedicated output serial wiring EX260 Dedicated output serial wiring For circular connector D-sub connector Flat ribbon cable IP67 IP67 (Manifold assembly) Dusttight (IP40) IP67 2 IP67 Dusttight (IP40) Dusttight (IP40) 1 Enclosure of a gateway unit and input manifold is IP65. 2 Enclosure is IP40 when the communication connector is D-sub. 180

Support Guide/11-LEFG Series

5.52 5.73 527 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG16-S 4 x M4 x 0.7 thread depth 6.4 3H9 (+0.025 0 ) depth 3 24 40 (72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33 (40) 21.7 20 n x 3.5 Vacuum port M5 x 0.8 x 5 34 B D x 100 (= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Pg7 51.2 71.1 53.6 M8 x 1 77.7 [84.7] (Lead wire length) Approx. 300 101.5 [103.6] EA P EB PE X EA P EB PE X 91.7 [93.8] 107.4 [111.8] EA P EB PE X EA P EB PE X 137.8 125.2 100.5 127 [131.4] 159.6 147 111.5 110.5 120 [124.4] 123 110.4 93.2 139.6 [144] 157.8 145.2 Note) Refer to page 176 for dimensions of connector types. 3 68 58 4 84 74 5 100 90 6 116 106 7 132 122 8 148 138 9 164 154 10 180

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Station L1 L2 L1 L2 Port size M5 1/