MY1

Refer to the order made section on page 105 for details. New New ew ew Uses two linear guides.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread depth 8 thread depth 5 Dimensions by Stroke (mm) Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105

Suction Guard (Produced upon receipt of order) FHG Series

149 74 m 105 m 149 m 1 1/4B, 1 1/2B, 2B 2 1/2B, 3B Length below flange neck (T dimension) M Micromesh Element Standard T dimension T dimension when shipped Symbol Length (mm) 310 380 450 520 590 385 485 585 685 560 650 750 850 Port size (Nominal size) Adjustment range (mm) Differential pressure indication (Max.

3

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

MGP

WB WA E A + Stroke Dimensions (mm) 1in = 25.4mm MGPM, MGPL-XB10/Dimensions WA, WB WA WB (mm) Bore size (mm) Standard stroke (mm) 10 to 39st 20 24 40 to 100st 40 44 101 to 200st 110 110 201 to 250st 200 200 10 to 39st 15 17 40 to 100st 25 27 101 to 200st 60 60 201 to 250st 105 105 12 16 10 to 250 WA WB Bore size (mm) Standard stroke (mm) 20 to 39st 24 24 40 to 124st 44 44 125 to 200st 120

KJ

(mm) Connection thread KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 1 4 1 4 3 8 3 8 3 8 14.7 14.7 15 14.2 13.7 13 15 17 21 23 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 18 19 21.5 24 25.5 2.6 32 36 42 79 105 17 17 19 22 24 M12 x 1 M14 x 1 M16 x 1 M20 x 1 M22 x 1 Applicable tubing 6.8 13.1 20.4 30.4 Straight Union: KCH Applicable tubing O.D.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l M8 x 95l x 100l x 105l x 110l x 115l CHQB63 10D (M) 5D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100

Digital Flow Switches Series PF2A

Specifications PF2A511--1 PF2A200/201 PF2A551--1 Model Applicable flow rate sensor PF2A510--1 PF2A550--1 PF2A521--1 0.5 to 10.5 l/min 2.5 to 52.5 l/min 5 to 105 l/min 10 to 210 l/min 25 to 525 l/min Flow rate measurement range Note 1) 0.5 to 10.5 l/min 2.5 to 52.5 l/min 5 to 105 l/min 10 to 210 l/min 25 to 525 l/min Set flow rate range Note 1) 0.1 l/min 0.5 l/min 1 l/min 2 l/min 5 l/min Minimum

High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

VQ7-6/7-8

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing March, 1999 D-SMC.L.A. P-77.5 (YG)

VQC

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing June, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

XL

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

C95Series

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

Air Cylinder

4.5 58.4 56 30 30 150 (159) 178 (187) 50 79 20 9 50 6 72.4 64 36 36 173 (185) 205 (217) 63 96 20 11 60 8 90.4 74 46 46 178 (190) 215 (227) Bore size Z ZZ 20 96 (104) 117 (125) 25 99 (107) 120 (128) 32 105 (113) 129 (137) 40 115 (124) 143 (152) 50 131 (143) 163 (175) 63 136 (148) 173 (185) Clevis (D) with Pivot Bracket 80, 100 4 x TF B TT TH TW TY TV TX ZZ + Stroke Z + Stroke Male Thread

Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.

Micro Mechanical Valve Series VM1000

VHS 16.5 1.5 1.5 Max. 6 18.5 3 (Pilot exhaust port) M5 x 0.8 PE R2 P R1 (121.5) Symbol (105) 86.5 (B) 2 (A) 4 13.6 B A 14.7 13.6 12 14 3 (R2) 1 (P) 5 (R1) 35 10.8 17 19.8 35 10.8 0.5 MPa supply 1.6 18 28 25 21 3 13 T.T. O.T. P.T.

High Vacuum Angle Valve

of Greene, Tweed Technologies, Inc. 11 Aluminum High Vacuum Angle Valve XLF/XLFV Series Specifications Model XLF(V)-16-2 XLF(V)-25-2 XLF(V)-40-2 XLF(V)-50-2 XLF(V)-63-2 XLF(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLF 5 to 60 (High-temperature type: 5 to 150) XLFV 5 to 50 Operating pressure [Pa(abs)] 1 x 105

ZP

Model 10 13 16 J K: 4 K: 6 G H G H Model ZPRB 6-0-A8 G H G H G H L M L M 79.5 15 53.5 ZPRB10-0-A8 ZPRB10-0-A10 110.5 56.5 63.5 65 99 23 61 97.5 95 43 10.4 20.6 12.8 21.6 ZPRB15-0-A8 ZPRB20-0-A10 115.5 61.5 133 135.5 137 73.5 75 71 51 ZPRB25-0-A8 ZPRB30-0-A10 125.5 71.5 10.4 20.6 12.8 21.6 143 145.5 147 83.5 85 81 ZPRB40-0-A10 179 181.5 183 93.5 95 91 77 193 ZPRB50-0-A10 101 189 103.5 191.5 105

MY1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10 MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B50 MY1B63 MY1B80 MY1B100 35

Integrated Controller

to 300 41.5 53.5 25 30 to 100 27 62.5 39 50.5 (2) 4.2 105 to 400 52 64 32 30 to 100 30.5 65.5 42.5 53.5 (2) 4.9 105 to 500 60.5 72.5 The values in the table above are to be used as a reference when mounting auto switches for stroke end detection.