Micro-Mist Separator with Prefilter Series AMH

D-SMC, P-63 (M) 2nd printing September 1996. D-SMC, P-59(YG) March 1997. 29(YG) Printed in Japan.

MGZ Series

The theoretical output for extension is 1924N, from the theoretical output table on page 5. 20 80 50 50 50 40 60 40 40 30 40 20 10 0 0 Note: 1kg = 2.2046lb 1in = 25.4mm 1MPa = 145psi 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) Selection Graphs to (Horizontal Mounting) Graph l: 100mm or less Graph l: 101 to 200mm Graph l

MHL2

Refer to p.0-20 and 0-21 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.2.0-3 and 2.0-4 for precautions on every series. Warning If a workpiece is hooked onto the attachment, make sure that excessive impact will not be created at the start and the end of the movement.

Process Pump

(A) 2 23 (AR) (A) 2 Refer to Best Pneumatics No. 1 for further details. 3 (R) 1 (P) 3 (R) 1 (P) Regulator Series AR Model Specifications Model AR20 Port size 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR20 AR25 AR30 AR40 Model Proof pressure 1.5 MPa 1.0 MPa 0.05 to 0.85 MPa 1/4, 3/8, 1/2 Max. operating pressure Pressure gauge port size 1/8 1/4 Set pressure range Ambient and 5 to 60C (No freezing

ZSE F/ISE

500 kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure) 0.000 to 1.000 MPa 0.100 to 1.000 MPa 1.5 MPa 0.001 0.01 0.01 0.1 Rated pressure range Operating pressure range and regulating pressure range Proof pressure kPa MPa kgf/cm2 Note 1) Setting/Display resolution ZSE ISE bar psi mmHg inHg PSE Z I SE3 Fluid that will not corrode stainless steel 630 and 304 12 to 24 VDC, Ripple (p-p

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Buffer mounting (Male thread) Buffer mounting (Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11

Air-hydro Unit

For details on how the models are indicated, refer to How to Order. 315 or more 50 200 or more 63 CCT63 120 or more 80 75 or more 100 1164 Air-hydro Unit CC Series Data (A) Volume of Cylinder/Capacity of Converter 160 140 125 100 800 700 600 300 250 200 180 10,000 8,000 500 400 80 6,000 5,000 4,000 300 600 500 63 3,000 200 400 50 2,000 300 40 Effective oil level stroke (mm) 500 200 1,000

CC

Data (A) Volume of Cylinder/Capacity of Converter 160 140 180 125 300 250 800 700 600 200 Selection Step 100 10,000 8,000 6,000 5,000 4,000 500 400 Step (1) Select the bore size of air-hydro cylinder 80 300 First of all, select a bore size from data (D) .

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Standard motor LJ1H202NF-K 100W to 250 [Tamagawa Seiki Co., Ltd.]

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

EXxx-OMN0029CN

kbps 0 1 1 2 500 kbps 0 2 2 3 : : : : PGM 6 2 62 9 6 3 63 6 4 : : PGM 9 DeviceNetPGMHW/SW ON -21No.EX-OMN0029CN-D V_SEL SI () Settings1 SI 1 2 OFF OFF 32 4 byte() OFF ON 24 3 byte ON OFF 16 2 byte ON ON 8 1 byte Baud Rate EX600 Settings1 3 4 OFF OFF 1 Mbps() OFF ON 500 kbps ON OFF 250 kbps ON ON 125 kbps 1 Mbps() -22No.EX-OMN0029CN-D Settings2 1 2 OFF OFF 0 () 0 byte OFF ON

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Female thread type Compression Manually Operated Type Fitting Knob Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ For details, refer to the product catalog

MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 Accessory Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 J 10 20 50 70 100 250 280 500 595 Clamp bolt Hexagon socket head cap screw Hexagon nut Spring washer MK-A020 87 123 290 320 525 640 1100 1520 D1350 1805 MK-A032 (g) Additional Weight 12 -X MK-A050 16 20 25 32 40 50 63 Bore size (mm) 20Both ends tapped style 6

MLU

: (800) 258-9200-www.stevenengineering.com KA (manual unlocking unit) Dust cover NH1 M(D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB

Fluoropolymer Tubing Variations

KM P.502 P.503 KF M H/DL L/LL KC KK KK130 FEP Tubing (Fluoropolymer) TH/TIH Series Soft Fluoropolymer Tubing TD/TID Series DM Modified PTFE Material FEP Material KDM KB Flexibility improved by approx. 20% (Compared with SMC TL/TIL Series) Suitable for applications which require flexibility. This has better resistance in chemical environments.

Process Gas Diaphragm Valve

Welded type, ports (2, 3, 4 ports) and porting configuration (flow direction 2, 3, 4) selectable How to order P.1110, 1112 Further information Optional porting configuration P.1114 Further information Example) Outlet Inlet Face seal fitting (Male) 1/4 Face seal fitting (Female) 3/8 Air operated type Fitting Status Body material Max. operating pressure (MPa) Cv 1) Connections Page Series

PF-OMM0004_C

() <> -5No.PF-OMM0004-D * 16 FG (49N () M8 IN IN OUT OUT OUT OUT IN 40 -6No.PF-OMM0004-D * () 6 33 () () 10 m DC(-)() -7No.PF-OMM0004-D * () () CE -8No.PF-OMM0004-D * 3 2459 LCD * -9No.PF-OMM0004-D * , *PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250

Plate Cylinder with Lock Series MLU

GC1 MM1 KA (manual unlocking unit) Dust cover NH1 M(D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB NA K 2 x 4-NC counter bore Prepared

Regulator for 2 MPa ARX 20

Contact P/A if the product will be used in an application with a high frequency of operation. 1. Do not subject the gauge to impacts, such as dropping, during transportation and mounting. This can cause loss of indication accuracy. 2. Do not use in locations with high temperature and humidity. This can cause malfunction. 3.