ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Buffer mounting (Male thread) Buffer mounting (Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11

Air-hydro Unit

For details on how the models are indicated, refer to How to Order. 315 or more 50 200 or more 63 CCT63 120 or more 80 75 or more 100 1164 Air-hydro Unit CC Series Data (A) Volume of Cylinder/Capacity of Converter 160 140 125 100 800 700 600 300 250 200 180 10,000 8,000 500 400 80 6,000 5,000 4,000 300 600 500 63 3,000 200 400 50 2,000 300 40 Effective oil level stroke (mm) 500 200 1,000

CC

Data (A) Volume of Cylinder/Capacity of Converter 160 140 180 125 300 250 800 700 600 200 Selection Step 100 10,000 8,000 6,000 5,000 4,000 500 400 Step (1) Select the bore size of air-hydro cylinder 80 300 First of all, select a bore size from data (D) .

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Standard motor LJ1H202NF-K 100W to 250 [Tamagawa Seiki Co., Ltd.]

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

EXxx-OMN0029CN

kbps 0 1 1 2 500 kbps 0 2 2 3 : : : : PGM 6 2 62 9 6 3 63 6 4 : : PGM 9 DeviceNetPGMHW/SW ON -21No.EX-OMN0029CN-D V_SEL SI () Settings1 SI 1 2 OFF OFF 32 4 byte() OFF ON 24 3 byte ON OFF 16 2 byte ON ON 8 1 byte Baud Rate EX600 Settings1 3 4 OFF OFF 1 Mbps() OFF ON 500 kbps ON OFF 250 kbps ON ON 125 kbps 1 Mbps() -22No.EX-OMN0029CN-D Settings2 1 2 OFF OFF 0 () 0 byte OFF ON

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Female thread type Compression Manually Operated Type Fitting Knob Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ For details, refer to the product catalog

MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 Accessory Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 J 10 20 50 70 100 250 280 500 595 Clamp bolt Hexagon socket head cap screw Hexagon nut Spring washer MK-A020 87 123 290 320 525 640 1100 1520 D1350 1805 MK-A032 (g) Additional Weight 12 -X MK-A050 16 20 25 32 40 50 63 Bore size (mm) 20Both ends tapped style 6

MLU

: (800) 258-9200-www.stevenengineering.com KA (manual unlocking unit) Dust cover NH1 M(D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB

Fluoropolymer Tubing Variations

KM P.502 P.503 KF M H/DL L/LL KC KK KK130 FEP Tubing (Fluoropolymer) TH/TIH Series Soft Fluoropolymer Tubing TD/TID Series DM Modified PTFE Material FEP Material KDM KB Flexibility improved by approx. 20% (Compared with SMC TL/TIL Series) Suitable for applications which require flexibility. This has better resistance in chemical environments.

Process Gas Diaphragm Valve

Welded type, ports (2, 3, 4 ports) and porting configuration (flow direction 2, 3, 4) selectable How to order P.1110, 1112 Further information Optional porting configuration P.1114 Further information Example) Outlet Inlet Face seal fitting (Male) 1/4 Face seal fitting (Female) 3/8 Air operated type Fitting Status Body material Max. operating pressure (MPa) Cv 1) Connections Page Series

PF-OMM0004_C

() <> -5No.PF-OMM0004-D * 16 FG (49N () M8 IN IN OUT OUT OUT OUT IN 40 -6No.PF-OMM0004-D * () 6 33 () () 10 m DC(-)() -7No.PF-OMM0004-D * () () CE -8No.PF-OMM0004-D * 3 2459 LCD * -9No.PF-OMM0004-D * , *PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250

Plate Cylinder with Lock Series MLU

GC1 MM1 KA (manual unlocking unit) Dust cover NH1 M(D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB NA K 2 x 4-NC counter bore Prepared

Regulator for 2 MPa ARX 20

Contact P/A if the product will be used in an application with a high frequency of operation. 1. Do not subject the gauge to impacts, such as dropping, during transportation and mounting. This can cause loss of indication accuracy. 2. Do not use in locations with high temperature and humidity. This can cause malfunction. 3.

AMD

and pages 14-20-62 to 64 for more detailed precautions on every series. 14-20-22 2 Micro Mist Separator Series AMD How to Order AMD150 to AMD850 AMD 250 03 J B Body size Option 1 4 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard Standard Standard J Drain guide B female thread R IN-OUT reversal direction Accessory (Option) Symbol Description Bracket T Element

AME

Accessory (Option) Applicable model Bracket assembly With cap bolt and spring washer AME150 AME250 AME350 AME450 AME550 AME650 AME850 BM51 BM52 BM53 BM54 BM55 BM56 BM57 AME 250 03 R B HA Option specifications AT R IN-OUT reversal direction Body size Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 ID Nil Bracket B Nil AMG Port

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

AMH

Max. air flow rate (m3/min (ANR)) JIS Symbol P . 14-20-55 Inlet pressure (MPa) Caution Be sure to read before handling.

C85

A (mm) M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.