Series 12-REA Sine rodless cylinder

1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Low torque Metal seal type Rotary joint

Fixed (Body) 0.003 to 0.20 N.m or less 0.003 to 0.20 Low rotational torque 0.003 to 0.20 N.m or less Low rotational torque Rotary Joint Turntable Allowable RPM 600 to 3000 min-1(r.p.m) Allowable RPM 600 to 3000 min-1(r.p.m) 600 to 3000 Drive (Adapter plate) Drive motor Application of adapter plate drive Not suitable for transmission of drive Series MQR Low torque Metal seal type Rotary joint

CEx-OMQ0013

() T J 50 50mm K 63 63mm 80 80mm N 100 100mm R H Z mm mm mm 40 25~850 25~700 1200 950 50 25~800 25~650 1150 900 63 25~800 25~650 1150 900 80 25~750 25~600 1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12 AC

3 Way,3 Port Solenoid Valve NVZ Series

Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

70pvpump

First mark the intersection point for a discharge rate of 600 m l/min and a lifting range of 15 m. 2. Find the pilot air pressure for the marked point.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Ionizer

Touching an emitter when it is electrified may result in electric shock or other accidents. d) Avoid using in a place in the presence of corrosive or explosive gas or where there is a volatile combustible. 3.

4-channel Flow Monitor ( compatible)

(page 72) 0x04C4 (1220) 0x04C5 (1221) 0x04C6 (1222) 0x04C7 (1223) Y S16 0x0258 4 R/W (600) WH1 (Setting of OUT1 window comparator hysteresis) Setting of OUT1 window comparator hysteresis.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H

AMPSeries

(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 SMC Pneumatics Inc. (Richmond) 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (804) 222-5221 SMC Pneumatics Inc. (Cleveland) 2305 East Aurora Rd., Unit A-3 Twinsburg, OH 44087 Tel: (330) 963-2727 FAX: (330) 963-2730 SMC Pneumatics Inc.

Regulator for 2 MPa ARX 20

F C D E Setting the Indicator Needles Move the indicator needles with your fingers. If it is done with a small screw driver, etc., take care not to bend the indicator needles or scratch the gauge dial. There are 2 green indicator needles, to be set at the upper and lower limits of the pressure range.

ZB-OM00301

2V Assy Assy 18 - No.ZB-OM00301 O Assy V Assy Assy V Assy Assy 19 - No.ZB-OM00301 1TK1-123 2 3 1VKJ 2 3 1 0.1 2 0.1 3 0.15 -0.2 2 20 - No.ZB-OM00301 () ( ) ONOFF () 0.1Nm 1 ON 0 ) () () 1 (PA) 0 (AR) () 21 - No.ZB-OM00301 AXT661-12 0.2~0.33mm 2 (1.7mm) ) DXT170-71-1 3.2~3.7mm (DXT170-75-1) 2 0.2~0.33mm (1.7mm) (ACB (1mm) 22 - No.ZB-OM00301 N.C. 300 600

ZSE30/ISE30

Maximum load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Minimum load impedance: 50 Reduce/Increase supply pressure to within the regulating pressure range. Applied pressure error Brown DC(+) Supply pressure is below the minimum regulating pressure.

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

PF3A7xxH.eng

(For accumulated decrement) [ 150] 150 L/min (PF3A703H) [ H] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Caution Press the button once to reduce the value by one digit, press and hold to continuously reduce. [ 600] 600 L/min (PF3A712H) : If the error cannot be reset after the above measures are taken, then please contact SMC.