25

[mm] Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 1 s 0.5 s 150 150 0.5 s 200 200 2 s 1 s 2 s 250 250 5 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

Cylinder with Lock Series CNG

0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

MTS

160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm) Overhang L (mm

Speed Controller with One-touch Fittings

Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

Plug-in Unit

Series VQC4000 Base Mounted Plug-in Unit How to Order Manifold VQC F L M VV5QC 4 1 08 02 TD0 / / / SQ P T VQ0 Kit VQ4 S Kit VV5QC 4 1 16 03 SDQW VQ5 Series Option VQZ 4 VQC4000 Nil K N None Special wiring specifications (except for double wiring) Note 1) Manifold model VQD With name plate (available for T kit only) Note 2) 1 Plug-in unit When specifying more than one option, enter symbols

VZ100/300/500

DXT170-176-2-01 DXT170-176-2-02 DXT170-176-2-03 DXT170-176-2-04 DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 For Series VZ300/500 With light/surge voltage suppressor With surge voltage suppressor 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC S E For VZ120 Indicator light is not available for grommet type.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5 98 L1 L2 L3 L4 2.10-14 VQZ100/200/300 Body Ported Dimensions: VQZ200 Station VV3QZ22C (5.5) (35) 2-4.5 Mounting

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 4 173 162.5 145 14 L n 4 185.5 175 155.5 15 2 148 137.5 124 12 3 160.5 150 134.5 13 5 185.5 175 155.5 15 6 198 187.5 166 16 7 210.5 200 176.5 17 8 210.5 200 187 12 9 223 212.5 197.5 13 2 160.5 150 134.5 13 3 173 162.5 145 14 5 198 187.5 166 16 6 210.5 200

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

(2") 075 (3/4") 088 (7/8") 106 (1 1/16") 125 (1 1/4") 150 (1 1/2") 200 (2") Mounting Height (NCDM) (in) D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7F D-B5 D-B6 D-B59W D-H7C D-G59 D-K59 C-C73C D-C80C Auto switch model HS 0.96 1.02 1.12 1.22 1.34 1.59 HS 0.87 0.93 0.98 1.08 1.20 1.46 HS 0.98 1.04 1.14 1.24 1.36 1.61 Bore 075 (3/4") 088 (7/8") 106 (1 1/16") 125 (1 1/4") 150 (1 1/2") 200 (2") 6-14-

Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

High Power Cylinder:

Basic Rc(PT)P Rc(PT)P GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5

Compact Electric Actuator Series LG1

Nonstandard Compatible Motors: Motor model Corresponding driver model Power supply voltage (AC) Motor output (W) MSM011P1A Matsushita Electric Industrial Co., LTD 100/115 MSD011P1E MSM012P1A 100 200/230 MSD013P1E 100/115 MR-C10A1 Mitsubishi Electric Corporation HC-PQ13 100 200/230 MR-C10A Yaskawa Electric Corporation 100/115 SGDE-01BP 100 SGME-01BF12 200/230 SGDE-01AP SGME-01AF12 Refer to

High Power Cylinder Series RHC

to 700 20 31 8 6 48 49.5 56.5 16 18 12 22 45.5 36 19.5 200 to 700 25 38 9 6 51 51.5 55 19 18 12 22 51.5 44 19.5 200 to 1000 32 47 11 8 54.5 51.5 56 21 20.5 16 24 61.5 53 21 200 to 1000 40 N NE NA NB NF ND NN P S WH ZZ MM K JD JC Bore size (mm) 252 1/4 192 15.0 13 M22 x 1.5 30 26 M8 x 1.25 33.5 22 5 30.5 43 20 5.8 to 8.8 257 1/4 193 19.6 17 M24 x 1.5 36.9 32 M10 x 1.25 37 27 5.5 25.5 39 25

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

AC Servo Motor Driver (CC-Link Type)

Check that the main circuit power supply (200 VAC) and controller circuit power supply (200 VAC) are wired correctly. When using the emergency stop SW etc. provided by customer, wire it to the EMG (Forced stop) of the input/output signal(CN6-1). When wiring, I/O connector(LE-CSNA) or I/O cable(LEC-CSNA-1) is required. (EMG (Forced stop) cannot be controlled with CC-Link.)

VZS

DXT170-176-2-01 DXT170-176-2-02 100 VAC 200 VAC 100V 200V DXT170-176-2-03 220V 110V 110 VAC DXT170-176-2-04 220 VAC DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240 VAC 240V 6VD 12VD 24VD 48VD 6 VDC 12 VDC 24 VDC 48 VDC Circuit with Indicator Light AC Circuit diagram DC Circuit diagram D: Protective diode LED: Emitting diode R: Resister NL: Neon bulb R: