CA2

n Same side 80 90 80 90 100 100 10 20 100 1 Different sides 2 Same side D-A3C D-G39C D-K39C 20 + 35(n 2) n = 2, 3, 4 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 Different sides n 100 + 100(n 2) n = 2, 3, 4 Same side 100 + 100 (n2), n = 2, 4, 6, 8 80 90 80 90 80 90 10 20 55 1 Different sides 2 Same side 20 + 35(n 2) n = 2, 3, 4 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Vertical Mounting, Ball Bushing Bearing r Over 40 mm stroke e 35 mm stroke or less 100 100 LEYG32L LEYG32L Load mass m [kg] Load mass m [kg] 10 10 LEYG25L LEYG25L 1 1 0.1 0.1 1000 1000 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] * The limit of vertical load mass varies depending on lead and speed.

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Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

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4 inputs 1 input Calibration method Push-button calibration Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 to 1 MPa 10 to 101 kPa 100 to 100 kPa 10 to 100 kPa 50 to 500 kPa 0.1 to 1 MPa 10 to 101 kPa 101 to 101 kPa 10 to 100 kPa Set pressure range 0.2 to 2 kPa

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3/8 21 40 204 22 80 130 10 100 M26 x 1.5 23 1/2 21 40 204 100 130 26 10 6-5-60 61 Air Cylinder: With End Lock Series CBG1 Rubber Bumper Type: CBG1BN Rod end lock: CBG1BN Stroke R Bore size GB Bore size (mm) DL1 S GB TB ZZ 20 19.5 10(12) 80(88) 11 117(125) CJ1 25 19.5 10(12) 80(88) 11 122(130) 32 20 10(12) 81(89) 10(11) 123(131) CJP 40 19 10(13) 87(96) 10(12) 139(148) 50 23.5 12(14) 102(114

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VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

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P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

15

70 10 75 Stroke [mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 LEYG32M Load mass m [kg] Load mass m [kg] LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max

Environment

10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 5 10 20 30 15 25 0 5 10 15 Work load [kg] Work load [kg] LEJS40A LEJS63A 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio

CRB2/CRBU2/CRB1

180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 48 52 98 104 136 146 272 294 50 Single vane Double vane 63

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Air Cylinder

17 32 12 26 0 0.033 13 10.5 8 45 6 8 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 122 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 10 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 154 With Rod Boot (mm) B3 e f h l ZZ Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101

Cylinder with Lock

32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s

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K 20 m roll 100 m reel Model TRB0604 TRB0806 TRB1075 TRB1209 M 6 8 10 12 Inner tubing O.D. (mm) Inner tubing I.D.

Applicable Auto Switch Model

100 14 63 13 12 7.5 50 11 80 13 40 11 15 16 8.5 20 9.5 9 10 8.5 25 9.5 9 10 32 11 11 Note) qIn the case operation load is an inductive load.

CL

140 6 7 7 11 11 44 52 64 78 92 14 18 18 22 26 30 35 35 40 40 16 20 20 25 30 71 80 99 117 131 32 40 40 52 52 27 32 32 37 37 10 10 10 14 14 15 17 17 21 21 85 95 102 113 124 60 70 86 102 116 26 27 26 30 31 54 59 67 72 76 10 13 18 23 25 10 12 15 17 19 M10 X 1.25 M12 X 1.75 M12 X 1.75 W/o out rod boot (Both sides) W/ rod boot (One side) Bore (mm) 40 50 63 80 100 MM N PH TDe8 TT TY TZ W PG PL TX

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Output Black lead wire 100 MSD013P1E MSM012P1A 200/230 MR-C10A1 100/115 Mitsubishi Electric Corporation HC-PQ13 100 MR-C10A 200/230 SGDE-01BP 100 SGME-01BF12 100/115 Yaskawa Electric Corporation Blue lead wire SGDE-01AP SGME-01AF12 200/230 H S For motor mounting dimensions, refer to the dimensions for series LJ1 10 on page 143 as a reference for mounting and design.

MGP

MGP 5 4 3 10 MGQ 5 10 100 200 20 30 40 50 1 100 10 200 20 30 40 50 2 3 4 5 MGG Eccentric distance l (mm) Eccentric distance l (mm) MGC Over 75 stroke Over 125 stroke MGF 100 100 63 200 P=0.5MPa P=0.5MPa CY1 80 100 50 Load weight m (kg) Load weight m (kg) MY1 50 40 40 50 30 40 30 32 20 20 10 10 100 10 10 100 200 20 30 40 50 20 30 40 50 200 Eccentric distance l (mm) Eccentric distance l (mm

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.