Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-49 8 Series AS-FG How to Order AS 200 1 F G 06 Body size Applicable tubing O.D.

Precision Cylinder Series MTS

113 + Stroke 6 Series MTS Dimensions/20 MTS20 Basic type 49.5 47 11 8.5 2-cushion needle Width across flats 8 4.5 4.5 Rod cross section 6 4.5 2-M5 x 0.8 (port size) 5.5H7 +0.012 0 10h7 0 0.015 16 0.2 4-M5 x 0.8, effective length 8 24 0.2 4-4.5 through 2 x 4-7.5, counter bore depth 4.5 (opposite side also) 14 15 4 28 0.2 28 0.2 38 36 26 53.5 102.5 + Stroke 18 25 M5 x 0.8 120.5 + Stroke 16

10

MHL2-mmD2Z MHL-AA1003 MHL-AA1603 MHL-AA2003 MHL-AA2503 MHL2-mmDZ MHL-AA1004 MHL-AA1604 MHL-AA2004 MHL-AA2504 4 MHL2-mmD1Z MHL-AA1005 MHL-AA1605 MHL-AA2005 MHL-AA2505 Rack MHL2-mmD2Z MHL-AA1006 MHL-AA1606 MHL-AA2006 MHL-AA2506 Rod cover assembly MHL-AA1007 MHL-AA1607 MHL-AA2007 MHL-AA2507 10: 9, 14, 16, 19, 25, 26 16 to 25: 9, 10, 14, 16, 19, 25, 26 Finger assembly MHL-AA1008 MHL-AA1608 MHL-AA2008

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

18 2 Rc(PT)1/8 6.2 14 12.5 15.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT 40/50 F-B 8/01 (Without Buffer/Female Thread) ZPT25F-B8 25 28 M8 x 1.25 8 12 36 ZPT25F-B01 Rc(PT)1/8 6.2 14 ZPT32F-B5 32.5 M5 x 0.8 5 9 ZPT32F-B8 32 35 M8 x 1.25 8 12 13 16 36.5 ZPT32F-B01 Rc(PT)1/8 6.2 14 Width across flats P N NL F D C Y 2.5 A B Dimensions A (mm) B C D F N NL P Y Model ZPT40F-B8 M8 x 1.25 8 12 40 43 12.5 18.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Description Material Note 13 14 15 16 17 18 19 No.

New

460 460 460 460 460 460 1/8 C6 13/64 VX210 1 5/64 1/8 C8 13/64 5/32 9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

AC Servo Motor Driver (SSCNET /H Type)

Process error 2 DB 16.C Encoder initial communication Process error 3 DB 16.D Encoder initial communication Process error 4 DB 16.E Encoder initial communication Process error 5 DB 16.F Encoder initial communication Process error 6 DB -67- Alarm reset Stop CPU reset Power off on Error reset No.

Pressure Gauge Guide

The installation torque is 0.3 to 0.5 Nm. 14-11-15

LC6D/LC6C

LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

14 100 44 16 12 44 54 120 M6 34 52 6.5 14 4 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 11 12 14 107 44 20 16 47 64 148 M8 35 64 6.8 19 50 7 13.5 16.5 115 49 20 16 50 78 162 M10 38 77 7.5 19 63 16.5 6.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 27 27 40 20 6.6 11 7.5 1/8 13 38 30 104 44 118 86 106 40 M8 x 1.25 M8 x 1.25 21.5 32 32 46 22 8.6 14 9 1/4 9 47 40

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

(same side) n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 Different sides 120 15 90 2 pcs. "n" pcs. 2 pcs. "n" pcs. 2 pcs.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Stainless Steel, Brass 14 2 x 3.4 14 2 x 3.4 33 4 33 4 1/8 1/8 1 20 39 1 20 39 JSX20, 30 JSX20U, 30U The grommet type is only available for the JSX20 and 30. JSX20, 30 JSX20U, 30U The grommet type is only available for the JSX20 and 30.

Multi-Axis Step Motor Controller

(Option) JXC-W1 p. 16 VUSB cable (Option) JXC-W1-2 Cable length: 3 m p. 16 VController setting software (Option) JXC-W1-1 p. 16 PC Provided by customer. *1 The connected actuators should be ordered separately.

2/3 Port Valve

Description B VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Bracket (with bolt and washer) 4.2-30 VNH Specifications 3 port valve 2 port valve A B A B VNH311 20A A B VNH411 25A A B VNH113 10A A B VNH213 15A A B VNH313 20A A B VNH413 25A A B VNH133 10A A B VNH233 15A A B VNH333 20A A B VNH433 25A A B VNH111 10A VNH211 15A Model Operating fluid pressure Fluid Operation 0 to 7.0MPa 0 to

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

:, ' Exlerial piloi pon 14 Pods) L Type Plug Connector(L) ,,, M Type Plug Connector(M) TUpe S42R/ Side Ported NW3J3-542R-a!!4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?

o

:, ' Exlerial piloi pon 14 Pods) L Type Plug Connector(L) ,,, M Type Plug Connector(M) TUpe S42R/ Side Ported NW3J3-542R-a!!4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?

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:, ' Exlerial piloi pon 14 Pods) L Type Plug Connector(L) ,,, M Type Plug Connector(M) TUpe S42R/ Side Ported NW3J3-542R-a!!4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?

Secondary Batteries

2) Specified layout (up to 16 solenoids possible.) 16 16 stations Including the number of blanking plate assemblies.