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Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.

Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.

Set pressure Inlet pressure P1: 0.5 MPa Outlet pressure P2: 0.1 MPa Fluid: Water Model: SRF30 0.5 Inlet pressure 0.45 Piping Caution 0.4 Pressure (MPa) 0.35 0.3 1. Connecting tubes with special tools. Refer to the pamphlet: High-Purity Fluoropolymer Fittings Hyper Fittings/LQ1,2 Series Work Procedure Instructions (M-E05-1) for tube connection and special tools. 2.

IBV1 Series SMC Corporation 1.Index 1Table of contents P1 2Specifications P2 3Features P2 4External dimensions drawing P3 5How to mount a nozzle P4 6Relationship between Upstream Piping and Peak Pressure P5 7Safety Instructions P6~10 1 2.

Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 400 Effective area mm2 Effective area mm2 Effective area mm2 6 12 1000 15 300 8 4 500 10 200 500 4 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle rotations Pressure Characteristics (ASR) ASR430F, ASR530F ASR630F 0.4 0.4 Set pressure 0.3 MPa Set pressure 0.3 MPa 0.3 0.3 P2

S1 S2 Preset pressure OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 For safety reasons, it is recommended that one of the preset pressures be set to 0MPa. 1.12-16

K= 2 (Coefficient) [Example 2] Moment of Inertia: 5 x 10-5 kgm2 Rotation time: 0.1s/90 To select model MRHQ16 It cannot be used because the point of intersection P2 on the graph is outside the limiting range. (Review is necessary.) To confirm by calculation, use formula (1) on the right and check kinetic energy of load: E will be within the allowable value below.

) Rc, G, NPT, NPTF 1/4 PAP331m(with tube inlet/outlet) P11m P13m 152 2-M5 with depth 8 4-7 139 64 10 10 120 95 Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual reset Air pilot actuation reset (Rc, G, NPT, NPTF 1/8) FLUID OUT 3/8", 1/2" 8 190 30 14 110 AIR SUP. 84 81 AIR E x H. 67 13 30 26 10 FLUID IN 3/8", 1/2" EXH (P2) Rc, G, NPT, NPTF 1/4

F2 results lrom the secondary pressure (P2) acting on the end face of the spool.

Note 3) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above). 20 For Air Digital Flow Switch Series PFA How to order PFW3 0 0 A Remote Type Display Unit Unit specification Flow rate range Nil M With unit switching function Fixed SI unit Note) 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 1 0

Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).

-10+10 5 -8No.PS-OMF0005CN-E * DIN (B ) DIN No. 1 2 DIN +(-) -(+) 612mm 0.50.6Nm (612) 0.50.6Nm 912 mm (G1/2) M3 0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2

2 SOL.ASOL.B 1 DC24V 2 9 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 3 3 3 3 DIN DIN DIN DIN / / / / 01T 01T 01T 01T DIN (A B AB) COM 1.25-3.5M1.25Y-3L1.25-3M VFR3000 AB+ B+COM -COM 90 O 1) 0.9MPa 2) 3) MAX.50 4) 2 5) P 3 AB ARBF3000 P AB ARBF3050 A B P 1.0MPa 1) 0.10.83MPa 2 -560 () 3) Rc 1/8 (kg) 0.46 mm2) A 21 18.5 11 P1=0.7MPa,P2

N.O. 9 VFR5000-OMN0001 VFR5000 Series/ DIN / 01T DIN 180 (A B AB ) COM ARBF5050 A B P 1.0MPa 1) 1.25-3.5M1.25Y-3L1.25-3M VFR5000 A-B+B+COM -COM AB+ B0.1~0.83MPa 2) VFR5100 A COM 5~60 () 3) VFR5200 A COM B Rc1/8 3 (kg) 0.83 A COM B VFR5 400 PA 44 38 32 (mm2) P1=0.7MPa;P2=0.5MPa S PB 38 40 31 5 AEA 90 (mm2) P2=0.5MPa S AEB 77 1) 0.9MPa 2) 3) .50 4) 2 5) P A B ARBF5000 ARBF5000

(A)(B) (A)(B) Rc 1/8 4 2 4 2 (kg) 0.83 5 1 3 5 1 3 (mm2) PA 44 38 32 (EA)(P)(EB) (EA)(P)(EB) (A)(B) (A)(B) P1=0.7MPa,P2=0.5MPaS PB 38 40 31 4 2 4 2 (mm2) AEA 90 5 1 3 5 1 3 P2=0.5MPaS BEB 77 (EA)(P)(EB) (EA)(P)(EB) ()( ) 2.8N m 7 VFR3000-OMY0001 VFRA3000,4000 3 VFRA3000 VFRA4000 3 1(P) 8 VFR3000-OMY0001 R , 9 VFR3000-OMY0001 No. 1ISO VG 32 R (1) (2) (3) (4) (5) (6) 10 VFR3000