MQQ

Dd9 L d l m t 0.030 0.040 0.040 0.076 0.040 0.076 0.040 0.076 IY-J015 IY-G02 IY-G03 IY-G04 10 5 16.6 4.8 12.2 1.5 0.7 Type C 5 for axis 16 8 Type C 8 for axis 21 7.6 16.2 1.5 0.9 20 10 25.6 9.6 20.2 1.55 1.15 Type C 10 for axis 10 25, 28 41.6 9.6 36.2 1.55 1.15 Type C 10 for axis 10-5-16 16 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM 6, 10, 16, 20, 25 How to Order

MQQ

Dd9 L d l m t 0.030 0.040 0.040 0.076 0.040 0.076 0.040 0.076 IY-J015 IY-G02 IY-G03 IY-G04 10 5 Type C 5 for axis 16.6 4.8 12.2 1.5 0.7 16 8 21 7.6 16.2 1.5 0.9 Type C 8 for axis 20 10 25.6 9.6 20.2 1.55 1.15 Type C 10 for axis 10 25, 28 41.6 9.6 36.2 1.55 1.15 Type C 10 for axis 10-5-16 16 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM 6, 10, 16, 20, 25 How to Order

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Compound No. 1349-80 Symbol Nil N1 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10

Swivels

D Part Number A B C D Wrench Flats Dia.

IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

NCA1

Auto switch capable Bore size Standard Stroke 1.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 2, 2.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How To Order NC D A1 B 150 0400 A XC8 Adjustable Stroke Auto Switch Mounting Bore Stroke Adjustment Range A: 0~1 B: 0~2 Dimensions (in) Bore (in) MM KK A AA B C D DD E EA EE G K

Tie-rod Type Hydraulic Cylinder

CHN W W FY B D E d CHM CHS MA M a NB C CH2 F A K NA B S + Stroke FT H FX CHA CHA ZZ + Stroke FZ Related Products DWith rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C E D d F FD FT FX FY FZ G GA GB J K M MA MM NA NB P R 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 44 18 25 9 10 77 44 95

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

B F H1 C M N BN AL B K A S + Stroke M H ZZ + Stroke With rod boot l 10.2 h + l ZZ + l + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25

CJ5-S

Applicable bore size (mm) CX Applicable snap ring Applicable snap ring A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l l + 0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 Type C 3.2 Type C 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 CY 0.030 0.060 0.030 0.060 + 0.048 0 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 Type C 5 Type C 5 8 25

CJ5-S

Applicable bore size (mm) CX Applicable snap ring Applicable snap ring A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l l + 0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 Type C 3.2 Type C 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 CY 0.030 0.060 0.030 0.060 + 0.048 0 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 Type C 5 Type C 5 8 25

CL

C shape 8 for axis C shape 10 for axis C shape 10 for axis NT-02 NT-03 NT-G04 C shape 8 for axis C shape 10 for axis 13 17 19 20 25, 32 40 15.0 19.6 21.9 12.5 16.5 18 M8 X 1.25 M10 X 1.25 M14 X 1.5 5 6 8 IY-G02 0.040 0.076 8 CD-G02 20 21 7.6 16.2 1.5 0.9 0.040 0.076 8 43.4 7.6 38.6 1.5 20 0.9 IY-G03 0.040 0.076 10 CD-G25 0.040 0.076 10 25, 32 25.6 1.55 1.15 9.6 20.2 48 1.55 1.15 9.6 42.6

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Width across flats 12 N M5 x 0.8 Width across flats 10 8 3 5 Y R R F F Width across flats 12 Width across flats 3 Width across flats 10 Width across flats 2 E E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 10.5 13 40 2 12.5 15.5 29.3

JXCx-OMT0001CN

Memory abnormality has occurred (1-197) E <> EEPROM 10 <> CPU CPU CPU error (1-198) E <> -93No.JXC-OMT0001CN-C 14. / A () 50mm () 5m 5m 10% 15m 20% -94No.JXC-OMT0001CN-C 15./ 15.1.

Secondary Batteries

Non-rotating rod type Bore size Action 10 16 20 25 32 10 mm 16 mm 20 mm 25 mm 32 mm D Double acting Standard stroke (mm) 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

HRL

2 to 45 Circulating fluid CH1: Tap water*1, Deionized water*9/CH2: Tap water*1, Deionized water Set temperature range C CH1: 5 to 35/CH2: 10 to 40 Cooling capacity*2 kW 9 1*8 19 1*8 26 1*8 Heating capacity*3 kW 1.5 1 4.0 1 6.0 1 Temperature stability*4 C CH1: 0.1/CH2: 0.5 Rated flow (Outlet pressure) L/min 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa

RB/RBL/RBQ

RBLC1007 1.4 1.4 8.8 8.8 8.6 8.6 43.8 43.8 57.5 58.5 51.5 51.5 8.7 8.7 67.5 68.5 10 10 14 14 16.2 16.2 4 4 MK(2) Note) L, LL and S dimensions of RBL(C)1007/1006 are different from those of RB(C)1007/1006.

33

0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSE024-A-20/23-(T) [50 Hz] [60 Hz] 3000 3000 Ambient temperature Ambient temperature Cooling capacity [W] Cooling capacity [W] 25C 2500 2500 25C 2000 2000 1500 1500 35C 35C 1000 1000 40C 500 500 40C 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature

SYJ3000/5000/7000

length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 1-5-79 for dimentions with connector cable. 1-5-11 12 Series SYJ3000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ3240-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B Courtesy of Steven Engineering

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.