3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

Guide Cylinder Series MGG

M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

limit for intermediate stop using an external stopper, etc.

Modular Type Filter Regulator Series AW

u u Drain Drain Drain Parts list Material No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

Multi-Axis Step Motor Controller

4 r t y u i !5 !6 No.

33

Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet

ISE70/75/75H

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

Slider Type Ball Screw Drive/11-LEFS Series

Note 9) With lock only Note 10) For an actuator with lock, add the power consumption for the lock.

CNG

Operating Range Auto switch model Bore size (mm) 20 25 32 40 D-C7/C-80 D-C73C/C-80C 8 10 9 10 D-B5/B64 8 10 9 10 D-B59W 13 13 14 14 D-H7, D-H7W H7BAL/H7NF 4 4 4.5 5 D-H7C 7 8.5 9 10 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.) There may be the case it will vary substantially depending on an ambient environment.

Power Valve: Economy Valve Series VEX5

Note 2) Cable u outside diameter: 6 to 8 mm 1 2 6 5 4 3 7 9 8 10 Fig.-1 11 Related Products: Silencer (Series AN) Over 30 dB noise reduction Sufficient effective area Exhaust Cleaner (Series AMC) Provides a silencing capability and an oil mist recovery function. Can also be used in a centralized piping system. Refer to Best Pneumatics No. 6 for details.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Lubrication Equipment

Lube ALD600-l06 to 10, ALD900-l12 to 20 At the terminal of an air pressure line in which a D.P. Lube is used, install a strainer (filtration rate of 5m) upstream with a metal seal solenoid valve, which is susceptible to dust.

Air Cylinder RSQ Series Stopper Cylinder

N l O R RSUIOA32 48 5.5 MOxl 10 G@@-l-qtr-5'i.]

FSQ seies

l O R RSUIOA32 48 5.5 MOxl 10 G@@-l-qtr-5'i.]

REC

2-RcP NN CDH10 +0.058 0 G Plugged (M5 x 0.8) G H1 Standard port Width across flats B1 I Eh8 D MM AL CX0.1 0.2 K A U CZ N N F S + Stroke H L NA Z + Stroke RR ZZ + Stroke (mm) A AL B1 CD CX CZ D E F G H H1 I K L MM N Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x 1.25 Up to 700 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 25 M10 x 1.25 Up to 700 22 19.5 17 9 10 10 26 13 10

AC Servo Motor Driver (MECHATROLINK-II type)

If an alarm or warning occurrs, refer toLECYM Operation Manual,section 9.1.2 or LECYM Operation Manual,section 9.2.2 and take the appropriate action. When an alarm occurs, ALM turns off.

VDW Series

(29) 0.4 (58) 1.6 0.2 (29) 0.7 (101.5) Note 1) In case of a type C coil (for 10, 30, 300), the cover will be an integrated type.

AC Servo Motor Driver (MECHATROLINK-III type)

5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0803-10 MI-A0803-20 MI-A1203-10 MI-A1203-20 MI-A1203-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503