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Facility water temperature 32C 12 Cooling capacity [kW] 10 8 Facility water temperature 40C 6 4 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Pump Capacity HRSH090--20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Outlet Pump head [m] 0.4 40 0.3 Usable flow rate range 30 0.2 20 Return port 0.1 10 0 0 20 10 40 30 50 60 70 Circulating fluid flow rate [L/min] 0 140 Thermo-chiller

Table of Contents

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

Low Profile Guide Type

M1 3A = M1E/M1E max = 2.25/10 = 0.225 m x g L1 M1E FE M3E = 0.05 x a x m x L2 (FE = 1.4/100 x a x g x m) = 0.05 x 300 x 3 x 0.04 = 1.8 [Nm] Investigate M3E. a From above, find the value of M3E max at 420 mm/s in Graph (3).

AC Servo Motor Driver (CC-Link Type)

An error code is returned if an instruction code outside the range set in parameter No.

HRX-OM-W038

9.4 Cooling capacity 9-7 HRX-OM-W038 Chapter 9 Documents 9.6 Pump capacity 9.6.1 HRS040--20-(BJMWZ) 0.3 0.3 30 Availavel area (Min. neccesary flow5L/min) Circulating fluid pressure[MPa] Availavel area (Min. neccesary flow5L/min) Circulating fluid pressure[MPa] 20 Outlet60Hz 0.2 20 Outlet60Hz 0.2 Pump head[m] 20 Pump head[m] 10 0.1 10 Outlet50Hz 0.1 10 Outlet50Hz Return port Return port 0.0

CXWM/CXWL

Note 1) Only type E (Reed switch) is applicable as an auto switch when mounting a housing of 10.

MK

Clamp stroke Manufacturable Range of Body Options Clamp stroke 10 mm 20 mm 50 mm Applicable bore (mm) 12 to 40 12 to 63 50 to 63 Symbol 10 20 50 Bore size (mm) 12, 16 20 to 63 FN MF N F M Nil Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

New

Reduced apparent power 10 VA m 7 VA (Size 1) Normally Closed (N.C.)

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

Ionizer Nozzle type IZN10 Series IZS

(Supply pressure 0.3 MPa) External air inlet Compressed air External air inlet Yes None Reduced by 50% Air consumption flow rate L/min (ANR) 10 10 Ionized air Discharge time sec 2.5 2.5 5 Compressed air Improved 6 times Ionized air flow velocity m/s 0.4 At 300 mm distance External air inlet External air Neutralizing static electricity from an electric substrate Neutralizing static electricity

Series PF2W Digital Flow Switch For Water

The switches do not have an explosion proof rating. Never use in the presence of an explosive gas as this may cause a serious explosion. 2. Mount the switch in a locations where there is no vibration greater than 98 m/s2 or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

SL5200

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

Industrial Filters

steel 304) Nominal filtration accuracy (m) 5 10 20 40 74 105 Symbol 005 010 020 040 074 105 (Size 65 x L250) 42

JIS Standard Hydraulic Cylinder

12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F D-F5W/J59W D-F5BA

42

Note Conductor resistance W/km, 20C 65 or less 1.5 m AXT100-DS25-015 Cable 0.3 mm2 Approx. 10 x 25 cores 3 m AXT100-DS25-030 5 m AXT100-DS25-050 Voltage limit VAC, 1 min. 1000 L * For other commercial connectors, use a 25pin type female connector conforming to MIL-C-24308. * Cannot be used for transfer wiring.

AZ1000

psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Load Blocking Workpiece Weight and Center of Gravity Y Center of gravity X Weight (m) Workpiece no. X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet