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T 24 VDC (10-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!

AR20-B to AR60-B

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

VCA

Coil specifications VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil insulation type Class B Power consumption DC VCA 2: 6.5 W, VCA 3: 8 W, VCA 4: 11.5 W VX3 50 Hz (1) VCA 2: 7.5 VA, VCA 3: 10 VA, VCA 4: 13 VA Apparent power AC VXA 60 Hz Note 1) Since AC coil

CNG

t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

IIIIIII

P T 0 .138 in. (3 5mm) r \ T 0 079 in (2mm) T T . 0 217 in. (5 5mm) F O F 6 61 lbs (3kg) P T 0 138 in (3 5 mm) O T 0 079 in (2 mm) T T 0 217 (5 5 mm) A B c D E F G 4 . 1 1 104.5' 2.O3 t51.51 1.32 i33.51 0.91 (23l o.47 fi21 0.81 (20,s'l 0.39 (10) A B c D E F G 4.29 (10e) 2.20 (56) 1.32 :33.5) 0.91 t23\ o.24 (6) 0.81 r20.5) 0.39 (10) in Parentheses Millimeters in NVM430-N01-07 Panel Mounting

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

VCW

N.O. q q w w e e r r t y u t y u Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IN IN Component Parts Component parts Description Material Description Material No. No.

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 10 XLF/XLFV Series Air Operated, With Solenoid Valve Solenoid valve How to Order [Option] w XLFV 16 2 G M9N A y 1 G q e i r t u o !

Pulse Valve

Description Material 1 Body ADC 8 Seal NBR 2 Main valve Resin 9 Washer Fe (Chromated) 3 O-ring NBR 10 Compression nut ADC 4 Bonnet ADC 11 Hexagon bolt Stainless steel 5 Sub-valve Resin 6 O-ring NBR 7 Bonnet ADC JSXFAF/Direct Piping Type Port size: Sizes 06, 10 Port size: Size 14 i u y t t r r e e w IN w IN q q Component Parts Component Parts No.

Micro Mechanical Valve Series VM1000

5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

(Metal Body) Series AS-M Construction Meter-out type Meter-in type AS1200M AS2200M AS1210M AS2210M u w u w t e r !

Industrial Filters

) 5, 10, 20, 40 74, 105 EM100 All types of gases/liquids, High-temperature fluids P.42 5, 10, 20, 40 74, 105 EM500 Stainless steel 316 21 Filter Selection by Main Application FGD/FGE/FGG type FGD type FGE type FGG type Applications and Applicable Element : Recommended : Can be used : Cannot be used Applicable filter model F G D C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

VEX1

Construction Component Parts Description No. q w e r t y u i o !0 !1 !

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Single Axis Electric Actuator Series LJ1H

143 Deflection Data 145 Part Number Designations 100 F N 1 1 B G LJ1 10 H W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Cable entry direction None B contact specification 2 pcs.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

CXT

PA T (N) d d NN RW RW PW QW PB GP lE W Y Z 2-M5X0.8 2-RB G G HT U (NA) (Option) A L HN(MAX.)

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

\*t W Weight Table Carcualion (Exampl) NCJ2KL10-050 .Basic weishl-''.44 or (610) rAddilional weight..-11 oz !