IDX-OM-W094

3.1 z z z z 50kg IDFA60/70/80/90 Series 3-1 IDX-OM-W094 3.2 3.2.1 z (85%) z z z z z z 245 050 z z () z z z z z 2000m z z z 600 mm 600 mm 600 mm 600 mm 600 mm z z z 3.2.2 z z 7 7.3 z IDF-AB500 14 1 IDFA60/70/80/90 Series 3-2 IDX-OM-W094 3.2.3 z z z z z 60 z 65 65 z z z z z z z OUT IN (IN) (OUT) IN OUT IDFA60/70/80/90 Series 3-3 IDX-OM-W094

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

asilltr

, tri.gr,o*e 056 (r/6) h l:0.36 ot s 1s1"1 % l=0.36 r06 (170') % , 1 L l=0.52 150 \1%',) ls, th l=0.5 2O0 (2') h, t1 t:O.44 250121/z') h t:O.44 300 (3') 16, 1n l-0.55 400 (4') th, la l=0.65 056 (%6') 11,4a o75 (%',I 1'Aa 1 % 106 (1%a) 't% 15o 11%'l 13A 2 200 (2'1 1'la 2'Aa 25O l2%',) 1151e 213,4e 300 (3') 2 2% 400 (41 2uAe 33Aa NOTE l) Female lhread length ('l l rs shorter lor lhe above listed

ZR

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch unit 20 ZR1 S 1 5 M Z E C K1 Ejector unit Supply valve self-holding Vacuum switch unit 5 M Z E C K2 1 20 L ZR1 Supply valve N.C.

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

Basic Type/Direct Mount Type

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB 4 x counter bore dia.

Compact Cylinder with Air Cushion

Operating principle A + A' A' qWhen the piston is retracting, exhaust is discharged from both A and A' until piston seal H passes the air passage A. wAfter piston seal H has passed the air passage A, exhaust is discharged only from A'.

RSH/RS1H

MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

DO Without connector Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 18 Series SYJ500 Body Ported [ ] for AC Grommet (G), (H): SYJ52G H -M5 With bracket: SYJ52G H -M5-F G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] 37 M5 x 0.8 (A port) 33.5 2-3.5 (For mounting) 30 3.5 15.5 2.5 15 11 A 18 25 + Manual override

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

DO Without connector Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 36 Series SYJ700 Body Ported [ ] for AC Grommet (G), (H): SYJ72G H -01 With bracket: SYJ72G H -01-F 44 36 1/8 (A port) 2-4.5 (For mounting) 4 23.5 10.9 Manual override 0.8 1.5 26 34 13 + A 2-3.2 (For manifold mounting) 25.4 16.1 48.4 G: Approx. 300 H:

RSH/RS1H

MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.

LEC-OM02904

(9001100) [mm] D H T E ()L d W D T Max.

LVQ

T) U Z M N LVQ40, LVQ60 C B A D (Max.

Compact 5-Port Solenoid Valve

With power-saving circuit JSY 1 0 1 0 Z 5 T Made to Order (Refer to page 135 for details.)

PF2D

H H ON PS NO OFF P-1 P-2 Flow rate measuring unit confirmation Real-time flow rate Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OUT1 Output mode This function allows to confirm the accumulated flow rate Hysteresis mode when real-time flow rate is selected

AC

T[s] = (V/10) X (T2 T1)/(Z) T(s) = (4.8/10) X (12 3.7) = 4 NO NO Increase number of booster regulators (Z) to decrease T.

Air Cylinder NCQ7 Series Compact Cylinder

, tri.gr,o*e 056 (r/6) h l:0.36 ot s 1s1"1 % l=0.36 r06 (170') % , 1 L l=0.52 150 \1%',) ls, th l=0.5 2O0 (2') h, t1 t:O.44 250121/z') h t:O.44 300 (3') 16, 1n l-0.55 400 (4') th, la l=0.65 056 (%6') 11,4a o75 (%',I 1'Aa 1 % 106 (1%a) 't% 15o 11%'l 13A 2 200 (2'1 1'la 2'Aa 25O l2%',) 1151e 213,4e 300 (3') 2 2% 400 (41 2uAe 33Aa NOTE l) Female lhread length ('l l rs shorter lor lhe above listed

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

ZSE30/ISE30

PRESSURE PRESSURE PRESSURE PRESSURE OUT OUT Hysteresis mode Window comparator mode OUT OUT Hysteresis (H) Hysteresis (H) Hysteresis (H) Hysteresis (H) Hysteresis (H) Hysteresis (H) Manual Auto ON ON ON ON Press the SET button to set the auto preset and return to the measuring mode.