RSH/RS1H

Note 3) The dimensions marked with "" vary according to adjustment of the shock absorber dial. 10-9-9 9 Series RSH/RS1H Dimensions/Bore Size: 50, 63, 80 RS1H 63 50 80 0.2 FX FZ S X Load carrying direction 4-N through 8-O recessed area L CZ CT CT Y V U Conveyor lower limit position CD T R Stroke H B 2-P D QA FT A GA Rear pressure port Front pressure port QB 2-Plug WB GB E W (Width across

VQ5000

2 position double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550 1-G H 194.5(200) 121.3 53 73.2(78.7) Indicator light 213 121.3 91.5 13.5 2(B) port 59.5 53 4 (A) port17.5 13.5 2(B) port 59.5 4(A) port 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1

53

IDH Particle Filter Set Parts List HRS PF005 H No.

CRQ2

io n ge io at of at ot ot R an R e n r ng tio ra ta n Ro io at ot R Unit Used as Flange Mount The L dimensions of this unit are shown in the table below.

MHK2

Series MHK Series MHKL Series MHK Series MHKL D20H H H H L Gripping point Gripping point Gripping point Gripping point L L L L: Gripping point distance H: Overhang distance Proper gripping points should be selected in accordance with the operating pressure. The distance to the gripping point L and the overhang distance H should be within the limited range given in the graphs below.

MHK2

Series MHK Series MHKL Series MHK Series MHKL D20H H H H L Gripping point Gripping point Gripping point Gripping point L L L L: Gripping point distance H: Overhang distance Proper gripping points should be selected in accordance with the operating pressure. The distance to the gripping point L and the overhang distance H should be within the limited range given in the graphs below.

Cooling Capacity: 030 (30 kW), Type: Fluorinated Fluid, Pump Inverter Control: S (Pump Inverter Type), Option: DZ (D+Z)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: YZ (Y+Z)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: Y (DI Control Kit)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: YZ (Y+Z)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: Y (DI Control Kit)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: C (Analog Communication)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: C (Analog Communication)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: CNZ (C+N+Z)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: DN (D+N)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: DNZ (D+N+Z)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: NZ (N+Z)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CNZ (C+N+Z)