10

9 16.5 19 15 23 6 Width across flats 10 39 19 (4 locations) K (58) 25 19 8 Closed E 9 9 25 Open F 13 13 43 G 4 x M5 x 0.8 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-16DZ 40 45 60 28 68 98 128 26 98 MHL2-16D1Z 70 75 90 58 110 170 200 50 152 MHL2-16D2Z 90 95 110 78 130 210 240 70 192 J dimension is at fully closed.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

DC circuit AC circuit Indicator light A() [+] A SOL SOL C( + ) ZNR Indicator light [] C Locking type (Tool required) VQZ100 No polarity by adopting non-polar light. Connection of Lead Wire If the manual override is turned by 180 clockwise and the mark is adjusted to 1, then pushed in the direction of an arrow (), it will be locked in the ON state.

Stopper Cylinder

BJ4-1 (Switch bracket: White) BJ5-1 (Switch bracket: Transparent) (2) BMA2-A(S) is a set of c and d. Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

Electric Actuator / Slider Type 《 AC Servo Motor 》

Slider type LEFB series . 23 3.1 Specification . 23 3.2 How to Order . 24 3.3 Construction . 25 4. Product Outline . 27 4.1 System construction . 27 4.2 Function/Configuration . 31 5. Wiring of cables / Common precautions . 32 6.

Rotary Table

Doc. no.MSQB-OM04-E PRODUCT NAME Rotary Table MODEL / Series / Product Number MSQ10 to 200() Contents Safety Instructions 2 17 Outline Specifications 17 18 Mass 18 Effective torque 19 Internal construction and parts 22 Basic circuit 22 Circuit structure Recommended models 22 23 Mounting Load restrictions 23 23 Flange application Direction and Angle of Rotation (Adjusting bolt, Internal shock

IDX-OM-W032

IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ON/OFF 3 3 5 () IDFA Series 11-1 11 1 IDX-OM-W032 11 T 11-4 1) 2) 3) 4) 1 2 3 PE L.N: PE: M3 6.5mm 2 :1.25mm :17 :17 11-5 3 5-2 IDFA55E/75E-23 IDFA Series 11-4 11 2 IDX-OM-W032 11 T 11-6 IDFA22E, 37E-23-T IDFA55E, 75E-23-T GFCI R GFCI R GFGI For Option R 1 2 3 L N PE L N 1 2 3 PE TB TB MC TDR MC CM C01

CM2

Dd9 t m L d Part no. l Trunnion Nut CD-S02 CD-S03 0.040 0.076 8 0.9 1.6 19.5 24.5 7.6 Type C 8 for axis Material: Carbon steel 0.040 0.076 10 1.15 1.35 29 34 9.6 Type C 10 for axis Applicable bore size (mm) 20 25, 32 40 D C B d H Part no.

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note 2) Based on JIS C 4003 Option Foot bracket (With screw) (1) Part no.

CY1F

When the cylinder has to be reset at the starting position, install safe manual control equipment. 23 Series CY1F Actuator Precautions 2 Be sure to read before handling. Mounting Lubrication Caution Caution 1. Lubrication of non-lube type cylinder 1. Do not apply strong impacts or excessive moment to the slide table (slider).

Applicable Auto Switch Model

C. welding current is 16,000A. Consult SMC if exceeding 16,000A.

CEx-OMI0064

c. 4. a. b. c. 1 - 1. 1. 1. (), 2. ,, 3. F.G.

ZR

Rc 1/8 IN port Rc 1/8 Out port 1 1 Bracket C Bracket C Note) 1 Dimensions for mounting bracket C Bracket C part no. : P3270155 13-3-20 20 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF

CG1

C-16 type for pivot C-18 type for pivot Clevis pins and knuckle pins are common for bore size 80 and 100.

AC Servo Motor Driver (MECHATROLINK-II type)

It is necessary to set it on the PLC side according to the kind of PLC. 38 - 6.3 The recommended value of the parameter [LEY] LEY25/ LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Initial value Recommended value Parameter *1,*2 Para.

HRX-OM-W069

(C or F). Read the circulating fluid discharge temperature which is displayed on the touch panel.

Guide Table Series MGF ø40, ø63, ø100 1

For details, refer to page 8-30-32. 8-23-13

EX600-DX_DY_DM_eng

Mark C on the unit Mark B at cable end Mark A at cable end (1) (2) (3) End plate bracket (EX600-ZMA2) DIN rail mounting groove 1 Intermediate reinforcing brace (EX600-ZMB2) Intermediate reinforcing brace (EX600-ZMB1) Lock screw: No.4-40 UNC DIN rail 2 End plate bracket (EX600-ZMA2) 5 Connector pin assignment Digital input unit 3 4 3 2 1 1 0 EX600-DX B/DX D EX600-DX C 25 24 23 22 21 20 19

Process Pump Series PA3000/5000/PAX1000 Series PB1000

1) 5 to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow

Shuttle Valve/AND Valve with One-Touch Fittings

Output 3 goes ON if "C" is turned ON, only when output 1 and output 2 are in an ON state. If either "A" or "B" is OFF, output 3 does not go ON even if "C" is turned ON.