Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C6H (One-touch Fitting ø6mm, Straight Type), Option 1: L (Lead Wire w/Connector, 2m)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C6H (One-touch Fitting ø6mm, Straight Type), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: None, Option 3: T (w/o Operation Manual, Calibration Certificate)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N7H (One-touch Fitting ø1/4", Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C4L (One-touch Fitting ø4mm, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (One-touch Fitting ø6mm, Elbow Type), Option 1: w/o Lead Wire, Option 2: A2 (Bracket B, Horizontal Mounting)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N7H (One-touch Fitting ø1/4", Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C4L (One-touch Fitting ø4mm, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N7H (One-touch Fitting ø1/4", Straight Type), Option 1: L (Lead Wire w/Connector, 2m)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C4L (One-touch Fitting ø4mm, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: None, Option 3: T (w/o Operation Manual, Calibration Certificate)

CLA

X1US nol available v.ith lube type or Rear flan e G iron tube N Non-lube Single clevIs C D Double clevis Number of auto switch F Iron Lube 'Not available on Xl US T Center trunnion 20es Bore size 3 3 pes n n pes 40mm 50mm 40 50 Cylinder stroke (mm) 63mm 63 Applicable Auto Switch Please refer to page 7 for standard stroke. eo BOm m -Refer 10 table below lor selec1'0f1 01 aWlcable auto sWllch

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

VS 8-2/VS 8-4

1) x 19 52 3 U side D side n Station number 4 5 2 1 Indicator light L2 45 L1 45 (n-1) x 19 45 88 15 19 2 2 Manual override 152 (Double dual 3-port) 133 118 (Single) 165(3-position) 6.5 112 99 Circular connector cable assembly AXT100-MC26-015 :1.5 m AXT100-MC26-030 :3.0 m AXT100-MC26-050 :5.0 m 4 x M5 mounting holes Formula: L1 = 19n + 71, L2 = 19n + 123 n: Stations (Maximum 16 stations) Dimension

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

I J K L M N O P Misc.

Table of Contents

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

3 Port Solenoid Valve Metal Seal Series VZ200 1

/surge voltage suppressor 2-3.4 mounting hole VFN Applicable cable O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor 2-3.4 mounting hole 60 52.1 M plug connector: VZ4 2-M(Z)-01 1 2 30 26.7 23 4 With light/surge voltage suppressor 12 19.5 84 2-3.4 mounting hole Max.10 91 300 (Lead wire length) 4-15-13 14 Series VZ400 Dimensions: Sub-plate Mounted Grommet: VZ4 5-G H (S)1 2 01 02 2-4.5 mounting