Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)], Operation

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: 01 (R1/8)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: R1/8, Lead Wire: -, Bracket: -, Operation Manual: -

High Vacuum Angle Valve

D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !

Electric Actuators

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Table of Contents

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

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A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

ISO Cylinder

Please contact SMC regarding water resistant types with the above model numbers. 2 1 m lead wire is only applicable to the D-A93. None N (Example) H7CN Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed above, refer to page 111 for details.

Electric Actuator with Integrated Guide

Allowable Moment (Nm) Allowable dynamic moment LTF6 Model Mounting orientation Load movement direction 200 L1 (mm) L3 (mm) Pitching Rolling Vertical Vertical 100 m a a=1000 a=2000 a=3000 L1 Mep 0 6 4 2 Transfer load m (kg) 200 100 a=1000 a=2000 a=3000 a L3 Mey 6 4 2 0 Transfer load m (kg) m : Transfer load (kg) a : Work piece acceleration (mm/s2) Me: Allowable dynamic moment L : Overhang

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

CXS

Standard Type: CXS Vertical mounting L L Mounting orientation m m up to 300 up to 400 up to 700 ( up to 800) up to 200 up to 600 up to 100 Max. speed (mm/s) Stroke (mm) All strokes 1 2 6 10 15 Selection graph 3 4 5 6 20 25 32 Horizontal mounting L Mounting orientation m m Refer to the caution notes below.

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

The spacing (L) of the support must be no more than the values shown in the below graph. MY2 H/HT MY3A MY3B m (800) MY3M 50 L (600) 40 m L 30 MY1H40 (550) Mass m (kg) m MY1H32 20 L L MY1H25 10 Caution 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting it.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

GA 2-RcP 4-FD J R MM FY BB D E e Air release K F Width across flats G MA l C f Air release 10 NB NA FT A SS B SS + Q + l + Stroke S + Stroke FX H M ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS e f Q 32 M10 x 1.25 58 62 38 14 21 15 11 37 31 3/8 39 130 11 13 88 40 109 30 52 21.5 15 25 to 1400 1/3.5

17

The spacing (L) of the support must be no more than the values shown in the below graph. MY2 H/HT m MY3A MY3B 60 MY3M (1550) MY1B40 50 L (1350) 40 MY1B32 Mass m (kg) (1100) 30 MY1B25 m L 20 m 10 0 5000 4500 4000 3500 3000 2500 2000 1500 1000 500 0 Support spacing L (mm) L L Caution D1.