4/5 Port Air Operated Valve Series SYJA3000

) (Station n) (Station 1) + + (Light/Surge voltage suppressor) A A 20 48.5 [55.5] 15 B B 5 + + 2 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" (Pitch) P = 10.5 33.1 17 A A 20 15 5 B B 2 (Pitch) P = 10.5 17 M5 x 0.8 (A, B port) M8 connector (WO) L plug connector (L) M plug connector (M) 53 M8 x 1 0.8 98.6[103] 35.5 96.8 0.8 0.8 0.8 79 [83.4] 70.8 [73] 61 [63.2] 69.9 111.5

REA/REB

(Example) A93 3 m L (Example) Y59BL 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

REA/REB

(Example) A93 3 m L (Example) Y59BL 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(P) 3 (R) L plug connector (L) VQZ200 N.C. 3 Port M plug connector (M) 0.45 0.6 (Option) 100V AC 200V AC 110V AC 220V AC (A) 2 VQ M plug connector (M) VQZ 1 (P) 3 (R) N.O.

Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g P M P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04

Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g P M P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04

KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

smcmaintenancepartslist

Cushion seal L Guide gasket M Piston gasket Replacement Parts: Lock-up Unit K, L and M are non-replaceable parts, so they are not included in the seal kit.

REA/REB

Model REAH25 REAHT25 REATH32 REAH15 REAH20 REAH10 Screw size M5 x 0.8 l-8 M8 x 1.25 M6 x 1.0 l-9 M4 x 0.7 l-7 Bolt dimensions l-12 Dimension t Max.

42

COM COM 0.6 m VVQ5000-44A-8-l () Red (+) () Red (+) 1.5 m VVQ5000-44A-15-l SOL.B SOL.B (+) White () (+) White () 3 m VVQ5000-44A-30-l Positive common Negative common Positive common Negative common l: Number of stations 1 to 16.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

Aluminum High Vacuum Angle Valve

D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

[95.1] (Lead wire length) (Non-locking) Manual override 41.5 [48] 29.1 33.5 22.5 R2 R1 P 13 5 10 10 14 5-M5 0.8 (Piping port) 28 [ ] for AC 3 4 5 3 4 5 L type plug connector (L) : SYJ3 40L -M5 M type plug connector (M) : SYJ3 40M -M5 33.5 16.5 33.5 16.5 23.2 (Mounting holes) 23.2 (Mounting holes) 22 3 22 3 2.5 2.5 A B A B 11 11 17.5 17.5 A B A B 47.4 50.7 33.7 About 300 111.6 39.2 [40.5]

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

One-touch Fittings

L D Q L M *1: D is maximum diameter.

MGP

M L MGP 25, 50, 75, 100 16 MXS 20 25 32 40 50 63 MXQ MGP 25, 50, 75, 100, 125, 150, 175, 200 M L MXF MXW 80 100 M L MGP 50, 75, 100, 125, 150, 175, 200 MXP OUT(N) IN(N) Theoretical Force MG (N) Rod dia.