One-touch Fittings

tubing P Effective area [mm2] Min. port size Release button dimensions L A2 M P Q O N Applicable tubing O.D.

Clean Regulator/Fluororesin Type

Clean Regulator/Fluororesin Type SRF Series RoHS ARJ AR425 to 935 ARX Wetted part materials Wetted part materials Wetted part materials Body: New PFA Body: New PFA AMR Body: New PFA ARM Diaphragm: PTFE Diaphragm: PTFE Diaphragm: PTFE ARP IR-A IR Recommended maximum flow rate IRV 2 L/min 5 L/min 20 L/min VEX SRF10 SRF30 SRF50 SRH SRP SRF SRF Inlet pressure: 0.3 MPa, Fluid: Water ITV Washing

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

(Piping specifications A2(L) and B2(L) are excluded.) ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Parallel l/O Connector 6.1 Parallel I/O specifications Input specifications Output specifications No. Item Specification No.

Air Slide Table Series MXJ

Body tapped l l Maximum screw-in depth l (mm) Maximum tightening torque (Nm) Model Bolt MXJ4 MXJ6 MXJ8 1.14 2.7 2.7 5 6 6 M3 x 0.5 M4 x 0.7 M4 x 0.7 2. Through-hole Mounting Maximum tightening torque (Nm) Caution l (mm) Model Bolt MXJ4 MXJ6 MXJ8 1. Do not scratch or dent on the mounting side of body, table and end plate.

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

High performance type Step Motor Controller (Servo/24 VDC)

Parallel l/O Connector 6.1 Parallel I/O specifications Input specifications Output specifications No. Item Specification No.

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Rotary Cylinder Series MRQ Size: 32, 40 1

A = 0.06 x 40.2 x {(0.5 + 0.1)/0.1}/0.5 = 28.6 l/min B = 0.06 x 4.88 x {(0.5 + 0.1)/0.1}/0.5 = 3.5 l/min C = B = 3.5 l/min D = 0.06 x 33.7 x {(0.5 + 0.1)/0.1}/0.5 = 24.3 l/min Since operation is simultaneous at C and D, total the respective amounts of air requirement.

Step Motor Controller (Servo / 24 VDC)

Lock B-1 Red 4 Lock A-1 Black 5 Sensor B-3 Brown 1 Sensor A-3 Blue 2 Electric Actuator side Controller side 10 - (5) I/O Cable -Pin No. # of wire Color of Dot Dot Pin No. # of wire Color of Dot Dot insulation mark color insulation mark color B1 7 Yellow Red A1 1 Light brown Black Cable length (L) B2 8 Light green Black A2 Light brown Red B3 Light green Red A3 2 Yellow Black B4 9

V

Series VT Not Available In The USA BACKGROUND Many current pneumatic solenoid valves are a c t u a l l y o f s o l e n o i d p i l o t c o n s t r u c t i o n . T h e s o l e n o i d d o e s n o t o p e r a t e d i r e c t l y u p o n t h e s p o o l o r p o p p e t w i t h i n t h e v a l v e . W h a t t h e solenoid does is open a very small pilot valve.

Table of Contents

(mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Digital Flow Switch

A2 Bracket B (Horizontal mounting) Part no. Option Note ZS-28-CA-4 Sensor connector For PF3A7H ZS-46-A1 Bracket A Tapping screw: Nominal size 3 x 8 L (2 pcs.) ZS-46-A2 Bracket B Tapping screw: Nominal size 3 x 8 L (2 pcs.)

Digital Flow Switch (Integrated display type)

CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

OMR0032

Options 15.1 I/O cable 1) How to Order the I/O cable (2) Parallel I/O cable connector terminals L A T H LATH2LATH5Terminal Insulator Insulator number color Dot Dot color color A1 Red Light Red * Cable length [L] brown A2 Grey Black A3 Grey Yellow Red 1 1 m A4 Grey Black 3 3 m A5 Green Light Red green A6 Grey Black 5 5 m A7 Grey Grey Red A8 Grey Black A9 Grey White Red A10 Green Black I/O

Servo Motor Controller (24 VDC)

CN5: Parallel l/O Connector 6.1 Parallel I/O specifications * Input specifications * Output specifications No. Item Specification No.

S Couplers Series KK/KKH/KK13

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 Symbol 01 02 03 04 Symbol 50 60 65 80 85 175 Series KKH Dimensions/Socket (S) Male thread type (mm) A1 A2 When connected T Connection port size D H Width across flats L2 When connected Effective area mm2 L1 Min. bore size Body size Mass g A2 Model A1 T KKH3S-01MS R 1/8 36.0 6.0 20.4 20.3 33.5 39.1 36.6 14 -02MS 20.2 R 1/4 1/8 34.0 9.0 19.4 31.5 39.5 37.0